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APPENDIX IV<br />

SUMMARY OF DIFFUSION PARAMETERS OF H IN Si, Si 3N4 AND SiO2<br />

Medium D0 (cm2/ S) Ea (eV)<br />

Si 8.3x1011 [1] 0.48 (atom), 0.78 (molecule) [1]<br />

Si3N4 5x108 [2] 1.0 [2]<br />

SiO2 3x10 16 [3] 0.73 [3]<br />

D =D0 exρ<br />

References:<br />

kT<br />

[1] Vi Zhang's doctoral thesis, New Jersey Institute <strong>of</strong> Technology (2002).<br />

[2] S.S. He <strong>and</strong> V. L. Shannon, Solid-State <strong>and</strong> Integrated Circuit Technology, 4th<br />

International Conference, 269-271 (1995).<br />

[3] D. Fink et. al. Appl. Phys. A 61, 381-388 (1995).<br />

108

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