Surface and bulk passivation of multicrystalline silicon solar cells by ...
Surface and bulk passivation of multicrystalline silicon solar cells by ... Surface and bulk passivation of multicrystalline silicon solar cells by ...
TABLE OF CONTENTS Chapter Page 1 INTRODUCTION 1 1.1 Solar Cell-A Perspective ...... ......... . .. . .......... 1 1.2 How Does A Solar Cell Work, 4 1.3 Silicon Solar Cells 9 1.3.1 Three Generations of Solar Cells .... , ... , . , 9 1.3.2 Silicon Solar Cells ... 11 1.4 . Structure of A Crystalline Si Solar Cell 12 1.5 Role of Defects and Passivation in Solar Cells 13 1.6. Impurity Gettering in PV-Si ................ . ..... . ............ .......... . ............... 16 1.7 .Passivation of Residual Impurities and Defects 17 1.8 Dissertation Outline ........................................................................... 18 2 SILICON NITRIDE LAYER FOR SOLAR CELL APPLICATIONS: AN OVERVIEW.....................................,..,.....................................,.,........ 20 2.1 . Antireflection Coating 20 2.2 . Fabrication of Silicon Nitride for Si Solar Cells 25 2.3 SiN-Si Interface Structure 31 2.4 Surface Passivation of Si by. PECVD SiΝx :H Film 32 2.5 Bulk Passivation of Si by PECVD SiΝx :H Film 34 2.5.1 The Mechanism of H Transport 34 2.5.2 Hydrogen Passivation Effect 35 viii
TABLE OF CONTENTS (Continued) Chapter Page 3 MODELING OF SURFACE RECOMBINATION VELOCITY — ROLE OF THE DAMAGED LAYER 38 3.1 Background 38 3.1.1 Recombination Mechanisms in Silicon 38 3.1.2 Surface Recombination 40 3.2 Modeling of Surface Recombination Velocity at SiN X Si Interface 47 3.2.1 A Program for SRV Calculation 48 3.2.2 Modeling Results and Discussion 51 3.2.3 A Modified Model including Recombination in The Damaged Region 57 3.3 H Transportation Mediated by SiΝx :H Layer .. 61 4 MINORITY-CARRIER LIFETIME MEASUREMENTS 65 4.1 Quasi-Steady-State Photoconductance Decay .... 65 4.2 Wafer Preparation and Passivation Procedure for Reproducible Minority Carrier Lifetime Measurements 67 4.2.1 Objective 67 4.2.2 Influences of Wafer Cleaning 68 4.2.3 Influences of Illumination 71 4.2.4 Discussion 73 5 EFFICIENCY LIMITATIONS CAUSED BY DEFECT CLUSTERS 76 5.1 Background 76 5.2 Objective 77 ix
- Page 1 and 2: Copyright Warning & Restrictions Th
- Page 3 and 4: ABSTRACT SURFACE AND BULK PASSIVATI
- Page 5 and 6: SURFACE AND BULK PASSIVATION OF MUL
- Page 7 and 8: APPROVAL PAGE SURFACE AND BULK PASS
- Page 9 and 10: Chuan Li, B.L. Sopori, P. Rupnowski
- Page 11: ACKNOWLEDGEMENT The work presented
- Page 15 and 16: LIST OF TABLES Table Page 2.1 Posit
- Page 17 and 18: LIST OF FIGURES (Continued) Figure
- Page 19 and 20: LIST OF FIGURES (Continued) Figure
- Page 21 and 22: 2 percent; however, soon, more adva
- Page 23 and 24: 4 Figure 1.1 World solar module pro
- Page 25 and 26: 6 bond is called a hole. It too can
- Page 27 and 28: 8 Figure 1.4 The I-V characteristic
- Page 29 and 30: 10 First generation cells consist o
- Page 31 and 32: 12 Basically, materials for manufac
- Page 33 and 34: 14 Defects are generally categorize
- Page 35 and 36: 16 copper, or nickel in concentrati
- Page 37 and 38: 18 the SiNx:H layer during the ther
- Page 39 and 40: CHAPTER 2 SILICON NITRIDE LAYER FOR
- Page 41 and 42: 22 reflectance of polished Si can b
- Page 43 and 44: 24 information is application-orien
- Page 45 and 46: 26 film fed growth (EFG) ribbon sil
- Page 47 and 48: 28 Figure 2.5 Deposition of SiΝ :
- Page 49 and 50: 30 Figure 2.6 shows the dependence
- Page 51 and 52: 32 atoms, the interface states are
- Page 53 and 54: 34 2.5 Bulk Passivation of Si by Si
- Page 55 and 56: 36 It was found that the bulk lifet
- Page 57 and 58: CHAPTER 3 MODELING OF SURFACE RECOM
- Page 59 and 60: 40 Figure 3.2 Schematic diagram of
- Page 61 and 62: 42 σ and σp are the capture cross
TABLE OF CONTENTS<br />
Chapter<br />
Page<br />
1 INTRODUCTION 1<br />
1.1 Solar Cell-A Perspective ...... ......... . .. . .......... 1<br />
1.2 How Does A Solar Cell Work, 4<br />
1.3 Silicon Solar Cells 9<br />
1.3.1 Three Generations <strong>of</strong> Solar Cells .... , ... , . , 9<br />
1.3.2 Silicon Solar Cells ... 11<br />
1.4 . Structure <strong>of</strong> A Crystalline Si Solar Cell 12<br />
1.5 Role <strong>of</strong> Defects <strong>and</strong> Passivation in Solar Cells 13<br />
1.6. Impurity Gettering in PV-Si ................ . ..... . ............ .......... . ............... 16<br />
1.7 .Passivation <strong>of</strong> Residual Impurities <strong>and</strong> Defects 17<br />
1.8 Dissertation Outline ........................................................................... 18<br />
2 SILICON NITRIDE LAYER FOR SOLAR CELL APPLICATIONS: AN<br />
OVERVIEW.....................................,..,.....................................,.,........ 20<br />
2.1 . Antireflection Coating 20<br />
2.2 . Fabrication <strong>of</strong> Silicon Nitride for Si Solar Cells 25<br />
2.3 SiN-Si Interface Structure 31<br />
2.4 <strong>Surface</strong> Passivation <strong>of</strong> Si <strong>by</strong>. PECVD SiΝx :H Film 32<br />
2.5 Bulk Passivation <strong>of</strong> Si <strong>by</strong> PECVD SiΝx :H Film 34<br />
2.5.1 The Mechanism <strong>of</strong> H Transport 34<br />
2.5.2 Hydrogen Passivation Effect 35<br />
viii
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