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Dielectric Aluminum Oxides: Nano-Structural Features and ...

Dielectric Aluminum Oxides: Nano-Structural Features and ...

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Figure 5. Cross-Section of ICD Foil Tunnel: <strong>Nano</strong>-Composite Oxide Produced by<br />

Anodizing, Hydrating, <strong>and</strong> Forming.<br />

Further study of nano-composite oxide using Focused Ion Beam [FIB] thinning techniques<br />

prior to TEM examination in Figure 6 shows greater detail in the layered structures obtained.<br />

This sample was deliberately produced with excess porous oxide prior to hydration to<br />

illustrate the nearly total conversion of the porous oxide incorporated into the barrier layer<br />

during the pore filling steps of hydration <strong>and</strong> formation in the prior example. Porous oxide<br />

above the barrier forming voltage is not converted. The greater sensitivity of the TEM to<br />

subtle differences in density <strong>and</strong> crystallinity reveal that the crystalline layer is not<br />

monolithic but is itself a composite of at least two layers. Electron diffraction patterns of<br />

each region confirm the relative crystallinity in a qualitative sense.<br />

6<br />

5<br />

4<br />

3<br />

1<br />

2<br />

Figure 6. TEM Photo of <strong>Nano</strong>-Composite Oxide Cross-section:<br />

1: Residual Hydrate; 2: Residual Porous Oxide; 3: Mostly Crystalline Oxide; 4: Highly<br />

Crystalline Oxide; 5: Amorphous Oxide; 6: Base <strong>Aluminum</strong> Metal<br />

68

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