NanoFlex™

NanoFlex 

Single- and double-axis flexure stages 

17 TFB, TFD & 

TFJ Stages 

The NanoFlex single- and double-axis flexure stages are versatile, compact 

positioners with up to 3 mm of travel and 50 mm of piezoelectric movement. 

Designed to carry loads of up to 500 g, they are ideally suited for all 

laboratory and OEM applications. Optical components can be attached to 

the moving platform and precisely and smoothly translated under manual 

and piezoelectric control in a single direction at submicron resolution. 

These NanoFlex stages are particularly suitable for stacking in x-x, x-y, x-z, 

and x-y-x configurations. 

Features 

◗ Low profile 

◗ Vacuum compatible to 10 –6 torr 

◗ No friction of stiction 

◗ MicroLab compatible 

Âµ

NanoFlex Single-Axis Flexure Translation Stages 

Arcuate Resolution PZT PZT Load 

Travel Displacement (setting sensitivity) Travel Manual Pushing Force Capacity Weight PRODUCT NUMBER 

(mm) (mm) (nm) (mm) Drive (N) g (lb) g (lb) With PZT Without PZT 

1.5 15 50 25 Thumbscrew 50 300 (0.7) 90 (0.2) 17 TFB 001/T 17 TFB 011/T 

2 10 50 50 Thumbscrew 100 500 (1.1) 200 (0.4) 17 TFD 001/T – 

2 10 50 50 Differential Drive 100 500 (1.1) 200 (0.4) 17 TFD 001/D – 

3 35 2 50 Thumbscrew 100 500 (1.1) 425 (0.9) – – 

0.3 – 100 50 Differential Drive 100 500 (1) 425 (0.9) 17 TFJ 001/D 17 TFJ 011/D 

Optical Table Mounting Plate (3 counterbored holes at 25.4-mm spacing) 17 TFA 001 

Note: Piezoelectric drivers provided separately. NanoFlex stages are compatible with 17 PCS 001, 17 PCW 001, and 17 PCW 011 controllers. 

SMC 

connector 

3 x f4.5 

thru top 

5 x M2 x 2.5 deep 

in top 

SMC connector 

2 x f7.5 thru top 

34 

drive thread 

20 

M4 X 2.5 deep 

in top 

drive thread 

20 

6 x M4 x 4 deep 

both sides 

18 12.5 

20 

20 

M2 x 2 deep 

2 sides 

6 x M2 x 2.5 deep in base 

30 

2 x f4.3 

thru base 


both sides 

3 x f2.3 thru base 

dimensions in mm 

17 TFB 001/T NanoFlex single-axis compoundflexure 

stage 


50 

RMS thread both sides 

VIEW A 

17 TFD 001/T NanoFlex single-axis flexure 

translation stage 

30 


2 sides 

34 

4 x M2 x 4.5 

deep both 

sides 

25 

RMS thread 

both sides 

65 

20 

VIEW A 

4 x M4 x 4.5 

deep 

both sides 


17 TFJ 001/D NanoFlex dual-axis flexure 


Âµ 

www.mellesgriot.com 

USA 55 Science Parkway • Rochester, NY 14620 • 1-800-755-7558 • (585) 244-7220 • FAX (585) 244-6292 • E-mail: sales@rochester.mellesgriot.com 

Canada 2470 Don Reid Drive • Ottawa, ON K1H 1E1 • 1(800) 267-3497 • (613) 226-5880 • FAX (613) 226-5885 • E-mail: sales@canada.mellesgriot.com 

Europe St Thomas Place • Ely, Cambridgeshire CB7 4EX, UK • +44 (0)1353 654500 • FAX +44 (0)1353 654555 • E-mail: info.europe@mellesgriot.com 

Far East 3F Pine Building, 3-11-2 Shibuya • Shibuya-Ku, Tokyo 150-0002, Japan • +81 3-3407-3614 • FAX +81 3-3486-0923 • E-mail: sales@mgkk.com 

MELLES GRIOT ® is a registered trademark of Melles Griot Inc. in the United States and certain other countries. 

In France, Germany, Italy, Belgium, The Netherlands, and Luxembourg, MELLES GRIOT ® is a registered trademark of Melles Griot B.V. 

Melles Griot follows a policy of continuous product development. For this reason, specifications are subject to change without notice. 

PRINTED IN UK 

©2001 MELLES GRIOT 

MCE 1035 12/01

NanoFlex 

Single-axis compound-flexure translation stage 

17 TFC Series 

The NanoFlex single-axis compound-flexure stage provides ultrasmooth 

translation for optics and other component assemblies. 

Designed with compound linear flexures, the stage has no arcuate 

motion and provides highly stable, piezoelectric-controlled movement for 

interferometry, microscopy, biomedical, and other precision nanopositioning 

applications. 

The stability of the NanoFlex stage makes it suitable for stacking in x-x, and 

x-y configurations where precise planar movement is required. 

Features 

◗ 5-mm rectilinear manual travel 

◗ 20-mm piezoelectric travel 

◗ MicroLab compatible 

Âµ

Specifications: 

Construction 

Aluminum and steel athermalized design with 

silver satin finish; fully linearized compoundflexure 

construction 

Weight: 300 g (0.7 lb) 

Load Capacity: 1 kg (2.21 lb) 

Piezoelectric Pushing Force: 250 N maximum 

Travel (Rectilinear, Nonarcuate) 

Fine thread: 5 mm 

Differential: 300 mm 

Piezo actuator: 20 mm 

Resolution (Setting Sensitivity) 

Fine thread: 1 mm 

Differential: 50 nm 

Piezo actuator: 20 nm 

Piezo actuator with position feedback: 5nm 

Ordering Information 

Manual 

Drive 

UltraMike 

UltraMike 

UltraMike 

Piezo 

Actuator 

Yes 

Yes 

No 

Piezo 

Feedback 

No 

Yes 

No 

PRODUCT 

NUMBER 

17 TFC 001/MD 

17 TFC 003/MD 

17 TFC 011/MD 

Note: Controllers purchased separately. 17 TFC 001/MD compatible with 

17 PCS 001, 17 PCC 001, 17 PCW 001, and 17 PCW 011. 17 TFC 003/MD 

compatible with 17 PCZ 001. 

4 holes M3 for 

SMC 

connector 34 

4 holes 

M4 ! 10 deep 

25 50 

2 holes 

M6!10 deep 

2!f11 

thru top 

30 

4!M4!5 deep both sides 

*75 

2!f7 thru base 

dimensions: millimeters 

17 TFC 003/MD NanoFlex single-axis 


Âµ 




Canada (613) 226-5880 France (01) 3012-0680 Germany (06251) 84060 Japan (03) 3407-3614 Netherlands (0316) 333041 Singapore 392-5368 Sweden (08) 544-4490 




PRINTED IN UK 


MCE 1036 02/02

vz 

Z 

Available in: 

✔ Production Quantities 

Y 

vy 

NanoBlock Four-, Five-, 

and Six-Axis Waveguide 

Manipulators 

These multiaxis positioning units are designed for the ultraprecise 

orientation of integrated optical and optoelectronic devices. 

They provide four, five, or six degrees of freedom and are available 

with a wide range of differential and piezoelectric drive options. 

These manipulators are designed for use with NanoBlock and 

NanoMax-TS three-axis nanopositioners, assembled in end-fire 

and butt-coupled configurations. 

These waveguide manipulators have flexure hinges for all motions 

except those along the x- and y-axes, which utilize bearing stages 

for longer travel. This design is effective for the applications for 

which these waveguide manipulators have been produced, but these 

manipulators are not optimized for dynamic operation. Consequently, 

although they are compatible with the NanoTrak 

autoalignment system, they do not provide performance comparable 

to a NanoMax – NanoTrak combination. It is recommended 

that for characterizing or pigtailing, NanoTrak control units should 

be used to servo-control the vertical and horizontal axes of the 

NanoBlock or NanoMax — controlling the input and output 

fiber— while vy (pitch) and vz (yaw) adjustments are made to the 

device mounted on the waveguide manipulator. 

These waveguide manipulators, all with a nominal 112.5-mm 

platform height above the tabletop, are designed to mount the wide 

range of component holders at an optical-axis height of 125 mm. 

When testing or fabricating integrated optical devices with 

multiple inputs and outputs using fiber arrays mounted in silicon 

V-grooves, vx (roll) must be added to the input and output fiber 

arrays. Alignment of the arrays is often achieved by precisely aligning 

one of the outermost fibers and then rolling the fiber array until 

the other outermost fiber is properly aligned. At this point, all 

fibers between the two outer fibers should be in alignment. In this 

type of system, it is common to configure two six-axis positioners 

to orient the fiber arrays with a simple y-z manipulator between them 

to orient the integrated optical device. 

EXTENSIVE RANGE OF OPTIONS 

The four-axis waveguide manipulator has four degrees of 

freedom, — y, z, vy, vz — with an unrestricted top-mounting surface, 

permitting large waveguide devices to be mounted and oriented. 

The vy (pitch) and vz (yaw) axes do not intersect; consequently, 

adjustments made about these axes must usually be 

accompanied by optimization of y and z. A manual or piezoelectric 

iterative procedure is required, or a NanoTrak can be used in 

combination with the accompanying NanoBlock to eliminate this 

problem. The five-axis waveguide manipulator has an additional 

degree of freedom along the optical axis (x). 

The six-axis waveguide manipulator has a special version of the 

MicroRoll mounted to the five-axis waveguide manipulator to 

add rotation about the optical axis (vx). It has two mounting 

surfaces: the standard top plate with five degrees of freedom (x, y, 

z, vy, vz) and the MicroRoll top plate with the addition of vx to 

give six degrees of freedom. The vy, vz, and vx axes do not intersect. 

A NanoBlock–NanoTrak combination is recommended to compensate 

automatically for the interactions between the axes. 

The waveguide manipulators have precision UltraMike 

differential micrometers with thumbscrew locking. They are available 

with or without piezoelectric actuators on all axes. In addition, 

piezoelectric actuators with feedback control and positional readout 

are available on the x-, y-, and z-axes. 

SPECIFICATIONS: 

NanoBlock FOUR-,FIVE-, AND 

SIX-AXIS WAVEGUIDE MANIPULATORS 

Construction: Aluminum and steel with black finish 

Weight: 1500 g (3.3 lb) 

Load Capacity: 500 g (1.1 lb) 

Piezoelectric Pushing Force: 250 N maximum 

Travel: 

Fine thread: 13 mm (x, y), 6 mm (z), 8 degrees (vx, vy, vz) 

Differential: 300 mm (x, y, z), 

10 arc minutes (vx, vz), 30 arc minutes (vy) 

Piezo actuator: 20 mm (x, y, z), 

45 arc seconds (vx, vz), 2 arc minutes (vy) 

Piezo actuator with feedback: 20 mm (x, y, z) 

Resolution (setting sensitivity): 

Fine thread: 1 mm (x, y, z), 

10 arc seconds (vx, vy, vz) 

Differential: 50 nm (x, y, z), 

1 arc seconds (vx, vy, vz) 

Piezo actuator: 40 nm (x, y, z), 

0.3 arc seconds (vx, vy, vz) 

Piezo actuator with feedback: 20 nm (x, y, z)

7.5 

20 

60 20 45 

9 

70 

61 

vz yaw 

rotational center 

14 holes threaded 

M3 x 4 deep 

135 

max 

70 

50.4 

NanoBlock Four-, Five-, and Six-Axis 

Waveguide Manipulators 

Number of 

Axes 

4 

4 

4 

5 

5 

5 

6 

6 

6 

Piezoelectric 

Actuators 

y, z, vy, vz 

“ 

None 

x, y, z, vy, vz 

“ 

None 

x, y, z, vx, vy, vz 

“ 

None 

Piezoelectric 

Feedback 

N.A. 

y, z only 

N.A. 

N.A. 

x, y, z only 

N.A. 

N.A. 

x, y, z only 

N.A. 

PRODUCT 

NUMBER 

17 ANF 001/MD 

17 ANF 003/MD 

17 ANF 005/MD 

17 ANG 001/MD 

17 ANG 003/MD 

17 ANG 005/MD 

17 ANH 001/MD 

17 ANH 003/MD 

17 ANH 005/MD 

35 

40 

48 

60 

12 (vy pitch 

rotational 

center) 


M3 x 4 deep on 

15 centers 

Six-Axis Waveguide 

Manipulator 

17 ANH series 

vx roll 

rotational center 

3W x 1.5D 

location slot 50 

$ x, y, z, vx, vy, vz 

alignment 

$ 25-nm resolution 

$ 0.2-arc-seconds 

resolution 

12.5 

23 

(vy pitch 

rotational 

center) 112.5 3 

159 

max 

25 3 

126 

142 

190 max 

17 ANF 005MD 

17 ANG 005MD 

17 ANH 005MD 

dimensions in mm

four-axis device manipulators 

17 AMT 001/D 

17 AMU 001/D 

MicroBlock 

MicroBlock four-axis device manipulators are compact and cost-effective, 

four-axis positioners designed for precise orientation of photonics and 

other planar devices. 

The four independent degrees of freedom — y, z, vy (pitch), and vz (yaw) — 

make them ideal for end-fire and butt-coupling applications where relatively 

large translations are required. A common point of rotation is located at the 

system optical-axis height of 75 mm, 12.5 mm above the platform surface. 

A component can then be translated in the y-z plane followed by precise 

control of the rotational adjustment about a point in the plane. 

These four-axis manipulators are equipped with UltraFine differential 

drives on all axes. The long transverse range allows easy adjustment 

across the full width of most devices, and the low profile 17 AMU 001/D is 

especially useful for large devices. 

Âµ


Construction: Aluminum and steel with black finish 

Weight: 700–750 g (1.5–1.7 lb) 

Load Capacity: 500 g (1.1 lb) 


Fine Thread 

Differential 

Axis Travel Resolution Travel Resolution PRODUCT NUMBER 

y 13 mm 1 mm 300 mm 50 nm 

z 6 mm 1 mm 300 mm 50 nm 

vy 10 deg 10 arc sec 30 arc min 1 arc sec 

vz 10 deg 10 arc sec 30 arc min 1 arc sec 

y 13 mm 1 mm 300 mm 50 nm 

z 6 mm 1 mm 300 mm 50 nm 

vy 10 deg 10 arc sec 30 arc min 1 arc sec 

vz 10 deg 10 arc sec 12 arc min 1 arc sec 

17 AMT 001/D 

17 AMU 001/D 


M3!5 deep 

15 

6.5 

15 

50.4 

4 holes f7 thru 

140 

max 

28.5 

165 maximum 

15 50.4 

1586 

91 

20 

45 

75.6 

60 

90 

10 

20 

75.6 

20 

7.5 

2 holes 

threaded 

M4!10 deep 

16 (vy pitch 

rotational 

center) 

11 

62.5 

83 


40 

61 

70 

164 max 

3 wide!1.5 deep 

location slot 

20 50 

75 

12 (vy pitch 

rotational 

center) 

4.5 

30 (vz yaw 

rotational 

center) 

17 AMU 001/D 

90 

maximum 

145 

maximum 

4 holes 

f7 thru 

62.5 

83 

6 

40 

75 

57 

vy pitch 

and vz yaw 

rotational 

center 


location slot 

17 AMT 001/D 

75 

MicroBlock four-axis device manipulators 

Âµ 








PRINTED IN UK 


MCE 1045 02/02

x-y-z flexure stage 

17 AMB 003 

MicroBlock 

The MicroBlock is a versatile, low-cost, independent, three-axis 

nanopositioning stage developed to meet the stringent requirements 

needed for aligning fiber optics. The stage features a nominal working 

platform height of 62.5 mm and provides a common optical-axis height of 

75 mm with a wide range of accessories. 

The MicroBlock is ideal for aligning single-mode fibers and can be 

mounted directly on an optical table, breadboard, or other surface with a 

25-mm/1-inch or 50-mm/2-inch hole matrix. 

The top-mounting platform may be rotated through 90 degrees so that the 

user can arrange two MicroBlocks with respect to one another (or other 

positioners), locating the x-y-z drives to give the most convenient access. 

Features 

◗ 75-mm optical axis height 

◗ No friction or stiction 

◗ Increased stability and stiffness 

◗ Minimal thermal drift 

Âµ


Travel: 

4 mm (mechanical) 

300 mm (differential) 

Load Capacity: 1 kg (2.2 lb) 

Vacuum Compatibility: >10 -4 Pa 

Arcuate Displacement: 85 mm 

Resolution: 

Thumbscrew: 1000 nm 

Differential micrometer: 50 nm 

Weight: 0.75 kg (1.65 lb) 

Platform: 60 mm ! 60 mm 

MicroBlock Fiber Launch Kit 

A popular configuration of the MicroBlock 

x-y-z flexure stage is the single-mode fiber 

launcher. For your convenience, this 

configuration can be ordered under one 

product number and simply requires the 

addition of an 04 OAS series microscope 

objective lens with the appropriate 

magnification and numerical aperture. 


MicroBlock with Thumbscrews 17 AMB 003/T 

MicroBlock with Differential 

Micrometers 

17 AMB 003/MD 

Fixed Platform Bracket (26-mm) 17 AMA 007 

Fixed Platform Bracket (56-mm) 17 AMA 009 

Moving World Bracket 17 AMA 011 

Spacer Block to Raise Optical- 

Axis Height to 125-mm 17 AMA 554 

MicroBlock Fiber Launch Kit 

With UltraMike 

X-Y-Z Adjusters 

17 AMB 003/MD/K 

System includes: X-Y-Z positioners (07 TMF 221), V-groove fiber 

holder (17 HFV 001), fixed work platform (17 AMA 009), and 

RMS threaded holder (17 HMO 001). 

top plate may be rotated 

through 90° by removing 

these four screws 

8 holes threaded M3!4 deep on 15 centers 

7 holes threaded M4 on 17 centers 

VIEW A 

117 

maximum 

) 60 

40 

) 75 

3 slots f7 thru 

4 holes threaded M2 

on 20 centers 


location slot 

50.4 

7 

62.5 

82.0 

46.5 

48 


M3!5 deep 

4 

50.4 

TOP VIEW 

7 

3 

51 6 

VIEW A 

6 

8.25 


MicroBlock 3-axis stage 

Âµ 








PRINTED IN UK 


MCE 1043 02/02

NanoRotator 

360-degree motorized rotation stage 

17 AMR 101 

The NanoRotator rotation stage provides 360 degrees of rotation and can 

be used in either a vertical or horizontal orientation. Powered by the same 

high-resolution stepper motor used in the NanoStep 1000 positioners, it is 

constructed with a thin-walled bearing design that provides highly accurate 

rotation with minimum wobble and eccentricity. A mechanical switch 

generates a reference signal for each complete rotation. 

The NanoRotator is particularly useful for rotating circular components, 

such as diode packages, under a laser welding station. It has a central 

50-mm-diameter access hole, which allows standard fiber connectors to be 

withdrawn following assembly operations. 

Adaptor plates can be attached to the mounting platform for mounting 

opto-mechanical or other nanopositioning accessories. 

The stepper motor can be controlled either with the master 17 MDU 001 

intelligent drive unit or the modular 17 MST 001 controller (sold separately). 

Âµ


Construction 

Aluminum body and platform with black finish 

Weight: 1.4 kg (3.1 lb) 

Load Capacity: 50 kg (110 lb) 

Travel: 360 degrees of continuous rotation 

Resolution: 1 arc second 

4 holes 7.5 thru counterbored f11.5!f7.5 deep 

50.0 

114.0 

50.0 50.0 

32.0 

closed 

top plate 10.0 

13.0 50.0 4 holes M4 on 

26.0 100.0 

a f59.0 circle 

f50.0 clear aperture through center 

rotation platform 

34.5 

f98.0 

table 

adaptor 10.0 50.0 

2 holes M6 

on 3 sides 


197.0 

17 AMR 101 NanoRotator 360-degree 

motorized rotation stage 

NanoRotator Accessories 

Optical Table Mounting Adaptor 17 AMA 043 

Adaptor Plate (inch pitch) 17 AMA 041 

Adaptor Plate (M6 pitch) 17 AMA 541 

Tongue-in-Groove Accessory 

Adaptor Plate 17 AMA 042 

Mounting Plate for NanoBlock 17 AMA 040 

Adaptor Plate for Horizontal 

Mounting to NanoStep Stage 17 AMA 037 

Âµ 

0°–360° in 

1° divisions 

42.2 

graduated knob 

5.5 

113.0 

7.5 

7.5 

6 holes fA thru 

50.4 34.0 

plate 

10.0 thick 

7 holes M6 thru 

11.9 

25.2 

12.5 

50.4 

4 holes 

f8.0 thru 

6.5 

50.0 

100.0 

25.0 

25.2 

f98.0 

mounting holes 

to nanorotator 

3.080.05 

wide!1.70 

30.0 

30.0 

45 

° 

17 AMA 040 

17 AMA 041/541 

4 holes M4 thru 

hole M16!1 

optional thru 

at center 

mounting holes 

to nanorotator 

17 AMA 042 

20.0 

20.0 

33.0 

50.4 37.1 8.0 

12.5 5.5 

9.5 

4 holes 

113.0 

f4.50 thru 

counterbored f7.80!5.0 deep 

equally spaced on 59 centers 

114.0 

101.0 

17 AMA 043 

10.0 

plate 13.25!3 13.25!3 

5.0 thick 

NanoRotator mounting and adaptor plates 


NanoRotator mounting and adaptor plates 


NanoRotator 360-Degree 

Motorized Rotation Stage 17 AMR 101 








PRINTED IN UK 


MCE 1041 02/02

NanoRoll 

Flexure rotation stages 

17 AMR Series 

The 17 AMR series ultrasmooth flexure rotation stages are ideally suited for 

precision roll movements about the longitudinal axis of a fiber. They can be 

used as stand-alone angular positioners, goniometers, or combined with 

three-axis translators to create four-axis, X-Y-Z-vx, stages. 

The 12 degrees of movement can be controlled manually with the UltraMike 

differential micrometer drive with 1-arc-second resolution, or automatically 

by stepper motors with less than 1-arc-second resolution, or piezoelectric 

actuators with 0.1-arc-second resolution. 

The stepper motor is controlled by either a 17 MDU 001 benchtop driver or 

a 17 MST 001 modular driver (sold separately). The piezoelectric actuator is 

controlled by any Melles Griot piezoelectric controller. 

Features 

◗ Differential and piezoelectric drives 

◗ Ideal for aligning polarization-preserving fibers 

◗ Standard 75-mm optical axis height 

Âµ


Travel: 

Fine Thread: 12 degrees 

Motor: 8 degrees 

Differential: 10 arc minutes 

Piezo: 45 arc seconds 

Resolution: 

Fine Thread: 10 arc seconds 

Motor:

Pneumatic Linear Precision Stage 

17 PST Series 

The 17 PST series pneumatic linear precision stage provides fast, hassle-free 

movement of loads up to 50 kg. It is designed specifically for process 

automation applications in the manufacturing industry. 

With highly repeatable, easy-to-adjust end stops, this stage is perfectly 

suited for load/unload positioning and for driving accessories like glue 

dispensers and uv-curing equipment into the working space of precision 

positioning and alignment systems. 

Features 

◗ 75-mm maximum travel (40-mm minimum) 

◗ Precision adjustable end stops 

◗ 2-mm repeatability of end positions 

◗ Low-maintenance design 

Âµ


Construction: Aluminum cross-roller stage 

Travel Range: 40–75 mm 

Repeatability: 2 mm RMS 

End-Stop Setting Sensitivity: 1 mm 

Weight: 2.5 kg 

Load Capacity: 

Mounted horizontally: 50 kg 

Mounted vertically: 5 kg 

Speed: 100 mm/second (maximum) 

Settling Time: < 3 seconds 

Air Line Pressure: 40 psi 

35 150 

35 

120 

35 

200 

f34 

27 

50 


17 PST 101 pneumatic linear precision stage 


Pneumatic Linear Precision Stage 17 PST 001 

Pneumatic Linear Precision Stage 

with Solenoid Valve 17 PST 101 

Âµ 








PRINTED IN UK 


MCE 1039 02/02

Linear Long-Travel Translation Stage 

17 LNR 001 

The 17 LNR 001 stage is an extremely versatile single-axis translation stage 

that provides high precision, high load-carrying capacity, and long travel. 

Stages can be bolted together to form x-y and x-y-z configurations. In 

addition, there is a wide range of drive options that simply bolt onto the 

side of the stage. Manual, stepper motor, and piezoelectric actuators can 

all be selected, and mounted in combinations of any two opposing drive 

options. The unique combination of long-travel actuators and high-precision 

piezoelectric elements is ideal for difficult applications such as assembly 

and laser welding of photonics products and microscopy of large samples. 

All drives must be specified and ordered separately to correspond with the 

intended application. Piezoelectric actuators can be selected from any of the 

17 PAS or 17 PAZ series of actuators. 

Features 

◗ Stable cross-roller-bearing design 

◗ Up to 50 mm of travel 

◗ Rapidly interchangeable drive modules 

◗ x-y-z configurations possible 

Âµ


Construction 

Steel with phosphorous-nickel satin finish 

Load Capacity: 10 kg (22 lb) 

Travel: 50 mm 

Positive Return Force: 30 N 

25 

25 


VIEW A 

Linear Long-Travel Stage 

(Drive not included) 17 LNR 001 

Accessories 

Table Mounting Plate 17 AMA 061 

25 

3 holes 

M6 

100 30.4 

Veritcal Mounting Bracket 17 AMA 062 

Spacer (to allow x-y mounting) 17 AMA 063 

Mounting Adaptor for 

NanoMax300 to LNR Stage 17 AMA 562 

10 mm Packing Plate 17 AMA 566 

Mounting Adaptor for LNR 

to NanoStep Stage 17 AMA 567 

Mounting Adaptor for LNR 

to NanoRotator Stage 17 AMA 570 

25 

2 clearance holes 

f7.5 for mounting 

38 38 

25 

25 

25 

38 

25 

38 

25 

13 holes M6 

VIEW A 


17 LNR 001 translation stage shown 

with stepper motor 

Modular Drives 

Travel Resolution PRODUCT 

(mm) (mm) NUMBER 

Micrometer Drive 25.0 1.0 17 DRV 010 

Micrometer Drive 50.0 1.0 17 DRV 011 

Micrometer Drive (Digital) 25.0 1.0 17 DRV 012 

Differential Drive 25.0 0.05 17 DRV 007 

Stepper Motor 25.0 0.05 17 DRV 013 or 113 

Stepper Motor 50.0 0.05 17 DRV 014 or 114 

Piezoelectric Actuators 0.001–0.1 0.01 17 PAS or PAZ 

Âµ 








PRINTED IN UK 


MCE 1037 02/02

NanoMax300-TS 

x-y-z parallel flexure stage 

17 MAX 300 

Series 

The NanoMax-TS three-axis stage offers an unmatched combination of 

high stability and resolution from a three-axis positioner, with major 

improvements in performance, functionality, and robustness achieved from 

the patented parallel flexure design. 

Modular actuators are easily and quickly fitted to the stage at ergonomically 

sited locations. Stepper motor, manual differential micrometer, manual 

differential, and thumbscrew drives are all available. Any combination of 

these drives can be used on any axis of the stage. 

Rapid, ultra-high precision motion can be achieved by combining long-travel 

actuators with either internal or external piezoelectric actuators. 

Features 

◗ 75-mm optical axis height 

◗ Open- and closed-loop piezoelectric actuators 

◗ Modular drives 

◗ No friction or stiction 

◗ Ultimate stability and stiffness 

Âµ


Travel: 

Fine thread: 4 mm (x, y, z) 

Piezo actuator: 20 mm (x, y, z) 

RMS repeatability: 15 nm 

Piezoelectric pushing force: 250 N maximum 

Load capacity: 1 kg 

Resonant frequency (f 0 : 8 10% Hz): 

No load: 375 Hz 

275 g: 200 Hz 

575 g: 150 Hz 

Total arcuate displacement: 80 mm 

Vacuum compatibility: >10 -4 Pa maximum 

Piezoelectric drive voltage: 0–75 Vdc 

Weight: 1 kg 

Platform size: 60 mm ! 60 mm 

Resolution: 

Fine thread: 1 mm (x,y,z) 

Differential: 50 nm (x,y,z) 

Piezo actuator: 20 nm (x,y,z) 

Piezo actuator with feedback: 5 nm (x,y,z) 


Three-Axis Flexure Stage with 

Active Position Feedback 

on All Axes 17 MAX 301 

Three-Axis Flexure Stage without 

Position Feedback 17 MAX 302 

NanoMax 3-Axis Stage without 

Piezoelectric Actuators 17 MAX 303 

Stepper Motor Drive Module 17 DRV 001 

Differential Micrometer Drive 

Module 17 DRV 002 

Thumbscrew Drive Module 17 DRV 004 

Mounting Plate to Fix 

17 MAX 300 Series Stages to 

17 NST Series Long-Travel Stages 

(125-mm Optical Axis Height) 17 AMA 555 

Spacer Block to Raise Optical- 

Axis Height to 125-mm 17 AMA 554 

105.6 

top plate may be rotated 

through 90° by removing 

these four screws 

87.0 

40.0 

34.0 

20.0 

y 


M3!4 deep on 15 centers 

x 

z 

30.0 

42.6 

4 holes 

threaded M2 

on 20 centers 


M4 on 17 centers 

SMC connectors 

62.5 

6 holes f8 

through base 

4.8 

17.4 

93.0 

105.6 

8.0 

VIEW A 


VIEW A 

17 MAX 302 3-axis stage 

Âµ 








PRINTED IN UK 


MCE 1042 03/02

apt System Six-Axis 

 

Alignment Stage 

17 APT 600 

Melles Griot introduces a new class of nanopositioning alignment stage 

based on a novel, patent-pending mechanism for multiaxis positioning. The 

APT (advanced positioning technology) system stage provides superior 

performance with six axes of motion, modular and interchangeable 

actuators, small footprint, and multiple functional surfaces. 

The 17 APT 600 multiaxis stage provides the user with exceptional levels 

of precision and accuracy as a result of its innovative, proprietary design. 

All APT system stages incorporate new GALPin technology, developed 

using guided alignment linkage pins and parallel interaction with a single 

moving platform. This technology provides much longer travel range 

compared to other compact six-axis positioners. 

Fixtures, cameras, holders, probes, and accessories can be mounted directly 

onto any of the available sides of the APT stage. This simplifies system 

setup, eliminating the need for posts, pillars, and brackets, saving time, 

space, and money. 

Features 

◗ Slim and compact 

◗ All drives mounted on one side 

◗ Kinematic device mounts 

◗ Increased travel 

◗ Modular actuators 

Âµ


Load Capacity: 1000 g 

Travel: 

Fine thread: 

12 mm (x, y, z), 6 degrees (vx, vy, vz) 

Differential: 

150 mm (x, y, z), 9 arc minutes (vx, vy, vz) 

Piezoelectric actuator: 

30 mm (x, y, z), 1.2 arc minutes (vx, vy, vz) 

Fixed Points of Rotation: 2 (not common) 

Actuator Resolution: 

Fine thread: 

1 mm (x, y, z), 4 arc seconds (vx, vy, vz) 

Differential: 

100 nm (x, y, z), 0.6 arc seconds (vx, vy, vz) 

Piezoelectric actuator: 


Stepper motor: 


Resonant Frequency: >200 Hz 

100 g load: 220 Hz 

500 g load: 200 Hz 

Piezoelectric Pushing Force: 250 N minimum 

Thermal Stability (15–30°C): < 1 mm/ºC 

Vacuum Compatibility: 

> 10 –4 mbar maximum 

Piezoelectric Drive Voltage: 0–75 Vdc 

Weight: 7 kg 

Dimensions (W ! H ! D): 

Minimum: 60 ! 175 ! 150 mm 

(2.36 ! 6.9 ! 5.91 in.) 

Maximum: 60 ! 200 ! 300 mm 

(2.36 ! 7.88 ! 11.82 in.) 


APT System Six-Axis Stage 17 APT 600/* 

Left- or Right-Handed 1 

Piezoelectric Actuators 2 

Axis: x= y= z= vx= vy= vz= 

*Complete the product number using the following 

codes: 

1 Specify whether left- or right-handed stage is 

required by inserting the letter L or R. 

2 Specify piezoelectric actuator requirements on for 

each axis using the following codes: 

0 = no piezo 

1 = piezo 

2 = piezo with feedback 

For example: 17 APT 600/R222111 is a right-handed 

APT six-axis stage with piezoelectric actuators on all 

axes and feedback on x, y, and z axes. 

60 15 

135 


APT series six-axis stage 

150 

175 

This product has been designed, tested, and manufactured 

in compliance with applicable European electrical safety 

standards. 

Âµ 

alignment.mellesgriot.com 

USA 1-800-410-9141 Europe +44 (0) 1353 654500 Asia +81 (3) 3407-3614 • nanopositioning@mellesgriot.com 




PRINTED IN USA 


3207 REV B 12/03

apt System Stepper Motor 

 

Controller 

17 BSC 002 

The benchtop APT (advanced positioning technology) system stepper-motor 

controller uses the latest high-speed digital signal processing (DSP) 

technology and low-noise analog electronics to drive up to two axes of 

motion. Additional axes can be driven by connecting one or more units 

via a standard USB hub. 

The 17 BSC 002 uses an intuitive graphical user interface which provides 

access to all motion controls and features, including velocity profiling, jog 

velocity and resolution, and self-diagnostics. Advanced software functions 

include both internal and external triggering, automatic positioning-error 

compensation, and programmable search and scan routines. All user inputs 

and outputs are digital and optically isolated for nongalvanic connection. 

A key feature of this controller is its open architecture, both in terms of its 

software and hardware. This means it can be upgraded in the future to meet 

changing requirements and that it can be used with encoded hardware. 

Features 

◗ Dual-channel bipolar synchronous control 

◗ Dynamic step-resolution control 

◗ 25,600 microsteps maximum per revolution 

◗ 25-W maximum average power 

◗ Optically isolated input/output 

Âµ


Input/Output: 

Motor output connectors: 

2! 26-pin female D-type connectors 

Command signal connector: 

25-pin female D-type 

Feedback: 0–10 V 

Analog inputs (2): 0–10 Vdc 

Galvanic isolated I/O: 5 Vdc TTL 

Stepping: 

Cardinal steps: 200 

Microsteps: 25,600 (max) 

Power (maximum): 

Average: 25 W 

Peak: 75 W 

General: 

Power Input: 

Voltage: 85–264 Vac 

Power: 200 W 

Fuse: 3 A 

Dimensions (W ! D ! H): 

245 ! 130 ! 330 mm (9.6 ! 5.1 ! 13 in.) 

Weight: 6 kg (13 lb) 

Computer Interface and Software: 

USB interface 

ActiveX ® function library 

ActiveX ® virtual panel control 


APT system stepper motor 

controller 17 BSC 002 

This product has been designed, tested, and manufactured 

in compliance with applicable European electrical safety 

standards. 

Rear panel configuration 

Âµ 

alignment.mellesgriot.com 

USA 1-800-410-9141 Europe +44 (0) 1353 654500 Asia +81 (3) 3407-3614 • nanopositioning@mellesgriot.com

apt System Piezoelectric 

 

Controller 

17 BPC 002 

The APT (advanced positioning technology) system benchtop 

piezoelectric controller incorporates the latest high-speed digital signal 

processing technology and low-noise analog electronics to provide two 

high-voltage (0–75 V) output channels. 

The 17 BPC 002 controller is designed for use in critical alignment 

applications where submicron motion is required. The system is operated 

via an intuitive graphical user interface using a computer with a USB port. 

All actuator movement is determined by software embedded in the 

controller itself. The software includes functions for internal and external 

triggering, asynchronous moves, and external inputs. 

A key feature of the 17 BPC 002 controller is its open architecture, both in 

terms of its software and hardware. This means that the controller can be 

upgraded in the future to meet changing requirements. 

Features 

◗ Two piezoactuator output channels 

◗ Intuitive virtual panel software 

◗ Plug-and-play installation 

◗ Rear-panel connections 

◗ Bidirectional triggering 

◗ USB communication port 

Âµ


Piezoelectric Output: 

Output connectors: 2! SMC male 

Voltage output: 0–75 Vdc/channel 

Voltage stability: 100 ppm over 24 hours 

Noise:

Available in: 

✔ Production Quantities 

Piezoelectric Drivers 

Piezoelectric Drivers 

The 17 PCS 001 driver allows simple yet precise hands-off 

adjustments to be made to piezoelectric actuators without active 

position feedback. Separate potentiometer knobs control three 

independent, low-noise outputs. Three BNC rear-panel inputs can 

be used to control the output voltage remotely. These limited-bandwidth 

inputs are effectively dc controls. The voltage on each output 

channel can be monitored on the liquid crystal display. The 

three SMC drive outputs are color coded red, yellow, and green. 

For dynamic, wide-bandwidth piezo controller and for position 

feedback options, please refer to pages 33.3 through 33.5. 

SPECIFICATIONS: PIEZOELECTRIC DRIVERS 

Output Voltage: 

3 channels, 0–75 Vdc, SMC screw connectors 

Internal control with 10-turn front-panel potentiometers or 

external control with 0–10 Vdc on 3 rear-panel BNC inputs 

Noise: < 3 mV 

Display: 3.5 digit LCD 

Power Input: 

Voltage: 100, 120, 220, and 240 V, 

rear-panel selector switch 

Frequency: 50–60 Hz 

Power:

NanoFlex™

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