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General<br />

High Vacuum Experimentation Systems<br />

Substrate Heater<br />

For the purpose of heating<br />

substrates, Leybold offers a variety of<br />

heating facilities (radiation<br />

heaters, heaters with quartz lamps,<br />

for example). These systems may be<br />

combined with different temperature<br />

controllers.<br />

Special designs which are<br />

manufactured according to<br />

customer’s specifications are<br />

available upon request.<br />

Cooling and<br />

Heating Systems<br />

Special experiments require that the<br />

temperature of the samples be<br />

maintained constant within a wide<br />

temperature range for the setpoint.<br />

For this Leybold delivers upon<br />

request cooling/ heating facilities with<br />

LN 2 as the refrigerant and an electric<br />

heater, complete with temperature<br />

controller.<br />

Special designs which are<br />

manufactured according to<br />

customer’s specifications are also<br />

available upon request.<br />

Substrate Holders<br />

Upon request Leybold is able to supply<br />

substrate holders according to<br />

customer’s specifications.<br />

Substrate holders with planetary gear<br />

for the UNIVEX <strong>450</strong> and UNIVEX<br />

<strong>450</strong> B are available upon request.<br />

Application and Accessories<br />

UNIVEX 300<br />

UNIVEX <strong>450</strong><br />

UNIVEX 350<br />

UNIVEX <strong>450</strong> B<br />

Special plants<br />

Applications Bell jar system Door system<br />

Passive components<br />

Sensor technology<br />

Opto-electronics<br />

Tribology<br />

Soldering<br />

Dactyloscopy<br />

Glove box applications<br />

Special applications<br />

Thermal conduction experiments<br />

Accessories / Process Components<br />

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Standard accessories<br />

Base plate and bell jar<br />

Vacuum chamber with door<br />

Auxiliary operation<br />

Substrate holder<br />

Substrate heater<br />

Gas admission<br />

Process equipment<br />

Shutters<br />

Thin film measurement<br />

Sources<br />

Custom installations<br />

Glow discharge cleaning<br />

Thermal evaporation<br />

Electron-beam evaporation<br />

DC high rate sputtering<br />

RF high rate sputtering<br />

Page<br />

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Leybold Vacuum Full Line Catalog 2005<br />

3<br />

C19

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