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High Vacuum Experimentation Systems<br />

Special Units<br />

UNIVEX<br />

<strong>450</strong> C<br />

For special applications we can also<br />

supply cluster systems based on the<br />

UNIVEX concept. These clusters are<br />

equipped according to customers<br />

requirements and incorporate<br />

separate processing and load lock<br />

and transfer chambers.<br />

Test system with a 700 mm dia. chamber<br />

Test Systems with a Vacuum Chamber<br />

We can also supply vacuum<br />

chambers with custom pump<br />

systems for testing of various<br />

components.<br />

C19 28<br />

Leybold Vacuum Full Line Catalog 2005

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