univex 450
univex 450
univex 450
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LEYBOLD<br />
High Vacuum Experimentation Systems<br />
Door System<br />
UNIVEX 350<br />
486<br />
486 = 19"<br />
UNIVEX 350<br />
1742<br />
1652<br />
1472<br />
= 33 HE<br />
1233<br />
100<br />
566 566<br />
1132<br />
894<br />
840<br />
380<br />
370<br />
UNIVEX 350<br />
Dimensional drawing for the UNIVEX 350<br />
Door System with 350 mm<br />
dia. Vacuum Chamber<br />
Advantages to the User<br />
■ Modular system design<br />
■ Any kind of process component<br />
may be installed<br />
■ Process components may be<br />
retrofitted without problems<br />
■ Vacuum chamber with a door<br />
■ Freely accessible base plate<br />
■ Very simple to operate and use via<br />
programmable control<br />
■ For installation into clean-room<br />
walls<br />
■ For RF sputtering<br />
■ Pump system adapted to the<br />
individual process<br />
Typical Applications<br />
■ Vacuum coating in research and<br />
development<br />
■ Pre-production trials<br />
■ Special experiments<br />
Basic Unit<br />
■ The UNIVEX 350 consists of two<br />
separable 19" rack mount cabinets<br />
■ The process chamber and the<br />
pump system are accommodated<br />
in one cabinet<br />
■ The electric power supply with the<br />
pump system controller based on<br />
a PLC with display and operating<br />
unit is accommodated in the<br />
second cabinet. This cabinet also<br />
houses the vacuum gauge as well<br />
as the power supply units for the<br />
process components<br />
Vacuum Chamber<br />
■ The base plate is attached to the<br />
base frame<br />
■ The door is equipped with a<br />
viewing window<br />
■ Bottom plate and lid are provided<br />
with installation holes<br />
■ Additional lateral flanges for<br />
installing process components<br />
■ A water-cooled vacuum chamber<br />
can also be supplied<br />
■ Evaporation protection plates<br />
which may be easily disassembled<br />
are available<br />
C19 12<br />
Leybold Vacuum Full Line Catalog 2005