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184.01.02<br />
Excerpt from the<br />
Leybold Vacuum Full Line Catalog 2005<br />
Product Section C19<br />
Edition May 2005<br />
C19<br />
UNIVEX<br />
High Vacuum<br />
Experimentation Systems<br />
UNIVEX 300, UNIVEX <strong>450</strong><br />
UNIVEX 350, UNIVEX <strong>450</strong> B<br />
Special plants<br />
vacuum
High Vacuum Experimentation Systems<br />
Contents<br />
General<br />
General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C19.02<br />
Applications and Accessories / Process Components . . . . . . . . . . . C19.03<br />
Products<br />
Bell Jar System<br />
UNIVEX 300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C19.04<br />
UNIVEX <strong>450</strong> . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C19.08<br />
Door System<br />
UNIVEX 350 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C19.12<br />
Accessories<br />
Standard Accessories for UNIVEX 300, 350, <strong>450</strong> and <strong>450</strong> B . . . . . . .C19.16<br />
Components<br />
for Glow Discharge Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . .C19.18<br />
for Thermal Evaporation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C19.20<br />
for Electron-Beam Evaporation . . . . . . . . . . . . . . . . . . . . . . . . . . .C19.23<br />
for High Rate Sputtering . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .C19.24<br />
for Film Thickness Measurements . . . . . . . . . . . . . . . . . . . . . . . . .C19.25<br />
Miscellaneous<br />
Special Units<br />
UNIVEX <strong>450</strong> B (Chamber Systems) . . . . . . . . . . . . . . . . . . . . . . .C19.26<br />
UNIVEX <strong>450</strong> for Daktyloscopy . . . . . . . . . . . . . . . . . . . . . . . . . . .C19.27<br />
UNIVEX <strong>450</strong> C, Test Systems with a Vacuum Chamber . . . . . . . .C19.28<br />
General<br />
The UNIVEX multi-purpose<br />
experimentation systems were<br />
developed by Leybold for<br />
applications in research and<br />
development, as well as for setting<br />
up pilot production systems.<br />
The range of applications for these<br />
systems covers primarily vacuum<br />
coating as well as experiments in<br />
vacuum process engineering.<br />
The multi-purpose experimentation<br />
systems from Leybold are based on<br />
a modern modular concept. The high<br />
vacuum pumps are installed horizontally<br />
at the level of the base plate or<br />
the vacuum chamber.<br />
Special Accessories for<br />
UNIVEX 300, 350, <strong>450</strong><br />
and <strong>450</strong> B<br />
Besides standard process<br />
components we can also supply<br />
installations according to customers<br />
requirements, for example for:<br />
■ Vacuum soldering experiments<br />
■ Metallurgical experiments<br />
■ Thermal conduction experiments<br />
■ Diffusion experiments<br />
■ Dactyloscopy<br />
Automatic Pressure<br />
Control<br />
Various processes require a constant<br />
pressure in the UNIVEX vacuum<br />
chamber. For this purpose Leybold<br />
offers a wide range of different<br />
pressure or flow control systems.<br />
Special designs which are<br />
manufactured according to<br />
customer’s specifications are<br />
available upon request.<br />
C19 2<br />
Leybold Vacuum Full Line Catalog 2005
General<br />
High Vacuum Experimentation Systems<br />
Substrate Heater<br />
For the purpose of heating<br />
substrates, Leybold offers a variety of<br />
heating facilities (radiation<br />
heaters, heaters with quartz lamps,<br />
for example). These systems may be<br />
combined with different temperature<br />
controllers.<br />
Special designs which are<br />
manufactured according to<br />
customer’s specifications are<br />
available upon request.<br />
Cooling and<br />
Heating Systems<br />
Special experiments require that the<br />
temperature of the samples be<br />
maintained constant within a wide<br />
temperature range for the setpoint.<br />
For this Leybold delivers upon<br />
request cooling/ heating facilities with<br />
LN 2 as the refrigerant and an electric<br />
heater, complete with temperature<br />
controller.<br />
Special designs which are<br />
manufactured according to<br />
customer’s specifications are also<br />
available upon request.<br />
Substrate Holders<br />
Upon request Leybold is able to supply<br />
substrate holders according to<br />
customer’s specifications.<br />
Substrate holders with planetary gear<br />
for the UNIVEX <strong>450</strong> and UNIVEX<br />
<strong>450</strong> B are available upon request.<br />
Application and Accessories<br />
UNIVEX 300<br />
UNIVEX <strong>450</strong><br />
UNIVEX 350<br />
UNIVEX <strong>450</strong> B<br />
Special plants<br />
Applications Bell jar system Door system<br />
Passive components<br />
Sensor technology<br />
Opto-electronics<br />
Tribology<br />
Soldering<br />
Dactyloscopy<br />
Glove box applications<br />
Special applications<br />
Thermal conduction experiments<br />
Accessories / Process Components<br />
■ ■ ■ ■<br />
■ ■ ■ ■<br />
■ ■ ■ ■<br />
■ ■ ■ ■<br />
■ ■ ■ ■<br />
■<br />
■ ■ ■ ■<br />
■ ■ ■ ■<br />
■<br />
■<br />
Standard accessories<br />
Base plate and bell jar<br />
Vacuum chamber with door<br />
Auxiliary operation<br />
Substrate holder<br />
Substrate heater<br />
Gas admission<br />
Process equipment<br />
Shutters<br />
Thin film measurement<br />
Sources<br />
Custom installations<br />
Glow discharge cleaning<br />
Thermal evaporation<br />
Electron-beam evaporation<br />
DC high rate sputtering<br />
RF high rate sputtering<br />
Page<br />
C19.06 + 10<br />
C19.14 + 26<br />
C19.03<br />
C19.03<br />
C19.02<br />
C19.21<br />
C19.25<br />
C19.02<br />
C19.18<br />
C19.20<br />
C19.23<br />
C19.24<br />
C19.24<br />
■<br />
■<br />
■ ■ ■ ■<br />
■ ■ ■ ■<br />
■ ■ ■ ■<br />
■ ■ ■ ■<br />
■ ■ ■ ■<br />
■ ■ ■ ■<br />
■ ■ ■ ■<br />
■ ■ ■ ■<br />
■ ■ ■ ■<br />
■ ■ ■ ■<br />
■<br />
■<br />
■<br />
■<br />
Leybold Vacuum Full Line Catalog 2005<br />
3<br />
C19
High Vacuum Experimentation Systems<br />
Bell Jar System<br />
UNIVEX 300<br />
UNIVEX 300, typical arrangement with stainless steel bell jar and process components<br />
C19 4<br />
Table-Top System with<br />
300 mm dia. Vacuum<br />
Chamber<br />
Advantages to the User<br />
■ Modular system design<br />
■ Any kind of process component<br />
may be installed<br />
■ Process components may be<br />
retrofitted without problems<br />
■ Freely accessible vacuum<br />
chamber<br />
■ Freely accessible base plate<br />
■ Very simple to operate and use<br />
■ Pump system adapted to the<br />
individual process<br />
Typical Applications<br />
■ Vacuum coating in research and<br />
development<br />
■ Special experiments<br />
Basic Unit<br />
■ The pump system and the<br />
electrical supply system are<br />
housed in a 19" rack cabinet<br />
■ Moreover, the 19" cabinet provides<br />
space (max. 6 height units) for a<br />
vacuum gauge and a thickness<br />
measuring instrument as well as<br />
power supply units for the process<br />
components<br />
■ The basic unit may be placed on a<br />
bench top<br />
Vacuum Chamber<br />
■ The base plate is attached to the<br />
lateral intake port of the basic unit<br />
■ Either a vacuum chamber made of<br />
stainless steel or glass may be<br />
placed on the base plate<br />
Pump System<br />
■ The standard pumping equipment<br />
comprises a TRIVAC D 8 B<br />
two-stage rotary vane pump and a<br />
TURBOVAC 151 turbomolecular<br />
pump<br />
■ For processes which develop<br />
increased quantities of gas or<br />
which require low operating<br />
pressures, the TURBOVAC 361<br />
may be built-in<br />
■ For processes which involve<br />
pumping of aggressive media, a<br />
barrier gas version of the<br />
turbomolecular pump and a rotary<br />
vane pump with a filling of special<br />
oil may be supplied<br />
■ For especially sensitive processes<br />
also a dry compressing vacuum<br />
pump like the EcoDry M may be<br />
used as the backing pump<br />
Vacuum Measurement<br />
■ Depending on the type of<br />
application, a combination vacuum<br />
gauge operating according to<br />
the cold cathode or hot cathode<br />
principle may be installed<br />
Leybold Vacuum Full Line Catalog 2005
LEYBOLD<br />
Bell Jar System<br />
High Vacuum Experimentation Systems<br />
High vacuum pump<br />
Technical Data UNIVEX 300<br />
Standard<br />
Special<br />
TURBOVAC 151 TURBOVAC 361<br />
Pumping speed for N 2 l x s -1<br />
Backing pump / nominal pumping speed<br />
Supply unit for high vacuum pump<br />
145 345<br />
TRIVAC D 8 B / 9.7 m 3 x h -1 TRIVAC D 8 B / 9.7 m 3 x h -1<br />
TURBOTRONIK NT 20 TURBOTRONIK NT 20<br />
Control<br />
Power supply with main switch plug-in<br />
Power supply with main switch plug-in<br />
High vacuum connection flange<br />
Electrical connection<br />
Cooling water connection;<br />
DN 10 hose<br />
DN<br />
bar<br />
100 ISO-F, lateral 100 ISO-F, lateral<br />
230 V, 50 Hz, max. 16 A 1) 230 V, 50 Hz, max. 16 A 1)<br />
4 to 7 4 to 7<br />
Cooling water consumption l x h -1<br />
50 50<br />
Weight<br />
Basic unit<br />
kg<br />
130 130<br />
Ordering Information UNIVEX 300<br />
Standard<br />
1) Other voltages and frequencies upon request<br />
Part No. 030 60<br />
Special<br />
upon request<br />
1040<br />
486 = 19"<br />
Ø 300<br />
UNIVEX 300<br />
61<br />
398<br />
803<br />
= 18 HE<br />
928<br />
462<br />
620<br />
304<br />
566<br />
280<br />
269<br />
Dimensional drawing for the UNIVEX 300 with base plate and bell jar<br />
Leybold Vacuum Full Line Catalog 2005<br />
5<br />
C19
High Vacuum Experimentation Systems<br />
Bell Jar System<br />
Special Accessories for UNIVEX 300<br />
Stainless Steel Base Plate<br />
Technical Data<br />
Base Plate<br />
30° 15° DN 40 KF<br />
DN 10 KF<br />
Lateral high vacuum<br />
connection flange<br />
DN<br />
100 ISO-K<br />
120<br />
230<br />
Dimensions (H x dia.)<br />
mm<br />
60 x 350<br />
Height = 14<br />
170<br />
DN 100 ISO-K<br />
DN 10 KF<br />
Installation holes<br />
Lateral connections<br />
mm<br />
DN<br />
34.5 dia. (13 x)<br />
2 x 10 KF, 1 x 40 KF<br />
Dimensional drawing for the base plate on the<br />
UNIVEX 300<br />
Weight<br />
Ordering Information<br />
Base plate, stainless steel<br />
kg<br />
19<br />
Base Plate<br />
Part No. 030 61<br />
Pyrex Glass Bell Jar (Vacuum Chamber)<br />
Technical Data<br />
Dimensions (H x dia.)<br />
mm<br />
Bell Jar<br />
350 x 300<br />
373<br />
350<br />
341 300<br />
Height, cylindrical section<br />
mm<br />
200<br />
Seal<br />
FPM<br />
Weight<br />
kg<br />
Ordering Information<br />
Bell jar, Pyrex glass Part No. 030 10 1)<br />
5.6<br />
Bell Jar<br />
Dimensional drawing for the glass bell jar with<br />
implosion protection<br />
1) With punched steel cover for implosion protection<br />
Stainless Steel Bell Jar (Vacuum Chamber)<br />
Technical Data<br />
Bell Jar<br />
10<br />
Dimensions (H x dia.)<br />
mm<br />
380 x 300<br />
380<br />
Drawn offset<br />
by 90°<br />
Height, cylindrical section<br />
Seal<br />
mm<br />
300<br />
FPM<br />
160<br />
190<br />
321<br />
Weight<br />
kg<br />
Ordering Information<br />
Bell jar, stainless steel Part No. 030 12 1)<br />
9.6<br />
Bell Jar<br />
Dimensional drawing for the stainless steel bell jar<br />
1) With DN 100 viewing window and 2 carrying handles; hole at the top (34.5 mm dia.)<br />
C19 6<br />
Leybold Vacuum Full Line Catalog 2005
Bell Jar System<br />
High Vacuum Experimentation Systems<br />
Notes<br />
Leybold Vacuum Full Line Catalog 2005<br />
7<br />
C19
High Vacuum Experimentation Systems<br />
Bell Jar System<br />
UNIVEX <strong>450</strong><br />
UNIVEX <strong>450</strong>, with turbomolecular pump system and various installations<br />
C19 8<br />
Cabinet Housed System<br />
with <strong>450</strong> mm dia. Vacuum<br />
Chamber<br />
Advantages to the User<br />
■ Modular system design<br />
■ Any kind of process component<br />
may be installed<br />
■ Process components may be<br />
retrofitted without problems<br />
■ Freely accessible vacuum<br />
chamber<br />
■ Freely accessible base plate<br />
■ Very simple to operate and use<br />
■ Pump system adapted to the<br />
individual process<br />
Typical Applications<br />
■ Vacuum coating in research and<br />
development<br />
■ Pre-production trials<br />
■ Dactyloscopy<br />
■ Special experiments<br />
Basic Unit<br />
■ The pump system and the<br />
electrical supply system are<br />
housed in the UNIVEX <strong>450</strong> cabinet<br />
■ Moreover, the 19" cabinet provides<br />
space (max. 20 height units) for a<br />
vacuum gauge and a thickness<br />
measuring instrument as well as<br />
power supply units for the process<br />
components<br />
Vacuum Chamber<br />
■ The base plate is attached to the<br />
lateral intake port of the basic unit<br />
■ A vacuum chamber made of<br />
stainless steel may be placed on<br />
this base plate<br />
■ A water-cooled vacuum chamber<br />
can also be supplied<br />
■ The vacuum chamber is moved by<br />
the hoist attached to the basic unit<br />
Pump System<br />
■ The standard pumping equipment<br />
comprises a TRIVAC D 40 B<br />
two-stage rotary vane pump and a<br />
TURBOVAC 1000 turbomolecular<br />
pump<br />
■ For processes which develop<br />
increased quantities of gas or<br />
which require low operating<br />
pressures, the UNIVEX <strong>450</strong> can<br />
also be equipped with cryo pumps<br />
■ For processes which involve<br />
pumping of aggressive media, a<br />
barrier gas version of the<br />
turbomolecular pump and a rotary<br />
vane pump with a filling of special<br />
oil may be supplied<br />
■ For especially sensitive processes<br />
also a dry compressing vacuum<br />
pump like the EcoDry M may be<br />
used as the backing pump<br />
Vacuum Measurement<br />
■ Depending on the type of<br />
application, a combination vacuum<br />
gauge operating according to<br />
the cold cathode or hot cathode<br />
principle may be installed<br />
Leybold Vacuum Full Line Catalog 2005
Bell Jar System<br />
High Vacuum Experimentation Systems<br />
High vacuum pump<br />
Technical Data UNIVEX <strong>450</strong><br />
Standard<br />
TURBOVAC 1100<br />
Special<br />
COOLVAC 1500 CL<br />
Pumping speed for N 2 l x s -1<br />
Backing pump / nominal pumping speed<br />
1150 1500<br />
TRIVAC D 40 B / 46 m 3 x h -1 TRIVAC D 40 B / 46 m 3 x h -1<br />
Supply unit for high vacuum pump<br />
Control<br />
TURBOTRONIK NT 20<br />
Power supply<br />
Compressor unit<br />
Power supply with automatic<br />
pump system control<br />
Built-in electropneumatic valves<br />
High vacuum connection flange<br />
Electrical connection<br />
Cooling water connection;<br />
DN 10 hose<br />
DN<br />
bar<br />
– Push gate valve DN 250 ISO-F,<br />
2 angled valves DN 40 KF<br />
250 ISO-F, lateral 250 ISO-F, lateral<br />
400 V, 3-phase + N, 50 Hz, max. 32 A 1) 400 V, 3-phase + N, 50 Hz, max. 32 A 1)<br />
4 to 7 4 to 7<br />
Cooling water consumption l x h -1<br />
100 140<br />
Compressed air connection, DN 10<br />
bar<br />
– 6 to 10<br />
Weight<br />
Basic unit<br />
kg<br />
225 350<br />
Ordering Information UNIVEX <strong>450</strong><br />
Standard<br />
1) Other voltages and frequencies upon request<br />
Part No. 030 70<br />
Special<br />
upon request<br />
404<br />
486<br />
500<br />
2058<br />
1606<br />
1040<br />
454 870<br />
1690<br />
1835<br />
1260<br />
60°<br />
Dimensional drawing for the UNIVEX <strong>450</strong>; with base plate, bell jar and hoist<br />
Leybold Vacuum Full Line Catalog 2005<br />
9<br />
C19
High Vacuum Experimentation Systems<br />
Bell Jar System<br />
Specific Accessories for UNIVEX <strong>450</strong><br />
Stainless Steel Base Plate<br />
Technical Data<br />
Base Plate<br />
DN 16 KF<br />
Height Höhe = 15<br />
DN 40 KF<br />
Lateral high vacuum<br />
connection flange<br />
DN<br />
250 ISO-K<br />
20°<br />
340 280 220<br />
20,5° 15°<br />
20,5°<br />
DN 250 ISO-K<br />
DN 16 KF<br />
Dimensions (H x dia.)<br />
Installation holes<br />
Lateral connections<br />
mm<br />
mm<br />
DN<br />
115 x 475<br />
34.5 dia. (19 x)<br />
2 x 16 KF, 2 x 40 KF<br />
Dimensional drawing for the base plate for<br />
UNIVEX <strong>450</strong><br />
Weight<br />
kg<br />
27<br />
Ordering Information<br />
Base Plate<br />
Base plate, stainless steel Part No. 030 71<br />
Stainless Steel Bell Jar (Vacuum Chamber)<br />
Technical Data<br />
Bell Jar<br />
10<br />
Dimensions (H x dia.)<br />
mm<br />
500 x <strong>450</strong><br />
Height, cylindrical section<br />
mm<br />
400<br />
500<br />
Seal<br />
FPM<br />
255<br />
265<br />
468<br />
Weight<br />
kg<br />
23<br />
Ordering Information<br />
Bell Jar<br />
Bell jar, stainless steel Part No. 030 16 1)<br />
Dimensional drawing for the stainless steel bell jar<br />
for UNIVEX <strong>450</strong><br />
1) With DN 100 viewing window; hole at the top fitted with a blank flange.<br />
Upon request the stainless steel bell jar may be supplied with a coiled cooling or heating pipe<br />
C19 10<br />
Leybold Vacuum Full Line Catalog 2005
Bell Jar System<br />
High Vacuum Experimentation Systems<br />
Notes<br />
Leybold Vacuum Full Line Catalog 2005<br />
11<br />
C19
LEYBOLD<br />
High Vacuum Experimentation Systems<br />
Door System<br />
UNIVEX 350<br />
486<br />
486 = 19"<br />
UNIVEX 350<br />
1742<br />
1652<br />
1472<br />
= 33 HE<br />
1233<br />
100<br />
566 566<br />
1132<br />
894<br />
840<br />
380<br />
370<br />
UNIVEX 350<br />
Dimensional drawing for the UNIVEX 350<br />
Door System with 350 mm<br />
dia. Vacuum Chamber<br />
Advantages to the User<br />
■ Modular system design<br />
■ Any kind of process component<br />
may be installed<br />
■ Process components may be<br />
retrofitted without problems<br />
■ Vacuum chamber with a door<br />
■ Freely accessible base plate<br />
■ Very simple to operate and use via<br />
programmable control<br />
■ For installation into clean-room<br />
walls<br />
■ For RF sputtering<br />
■ Pump system adapted to the<br />
individual process<br />
Typical Applications<br />
■ Vacuum coating in research and<br />
development<br />
■ Pre-production trials<br />
■ Special experiments<br />
Basic Unit<br />
■ The UNIVEX 350 consists of two<br />
separable 19" rack mount cabinets<br />
■ The process chamber and the<br />
pump system are accommodated<br />
in one cabinet<br />
■ The electric power supply with the<br />
pump system controller based on<br />
a PLC with display and operating<br />
unit is accommodated in the<br />
second cabinet. This cabinet also<br />
houses the vacuum gauge as well<br />
as the power supply units for the<br />
process components<br />
Vacuum Chamber<br />
■ The base plate is attached to the<br />
base frame<br />
■ The door is equipped with a<br />
viewing window<br />
■ Bottom plate and lid are provided<br />
with installation holes<br />
■ Additional lateral flanges for<br />
installing process components<br />
■ A water-cooled vacuum chamber<br />
can also be supplied<br />
■ Evaporation protection plates<br />
which may be easily disassembled<br />
are available<br />
C19 12<br />
Leybold Vacuum Full Line Catalog 2005
Door System<br />
High Vacuum Experimentation Systems<br />
Pump System<br />
■ The standard pumping equipment<br />
comprises a TRIVAC D 16 B<br />
two-stage rotary vane pump and a<br />
TURBOVAC TW 701<br />
turbomolecular pump<br />
■ For processes which develop<br />
increased quantities of gas or<br />
which require low operating<br />
pressures, the UNIVEX 350 can<br />
also be equipped with a<br />
turbomolecular pump having a<br />
higher pumping speed<br />
(TURBOVAC 1000, for example) or<br />
with cryopumps<br />
■ For processes which involve<br />
pumping of aggressive media, a<br />
barrier gas version of the<br />
turbomolecular pump and a rotary<br />
vane pump with a filling of special<br />
oil may be supplied<br />
■ For especially sensitive processes<br />
also a dry compressing vacuum<br />
pump like the EcoDry M may be<br />
used as the backing pump<br />
Vacuum Measurement<br />
■ Depending on the type of<br />
application, a combination<br />
vacuum gauge operating<br />
according to the cold cathode or<br />
hot cathode principle may be<br />
installed<br />
High vacuum pump<br />
Technical Data UNIVEX 350<br />
Standard<br />
TURBOVAC TW 701<br />
Special<br />
COOLVAC 1500 CL<br />
Pumping speed for N 2 l x s -1<br />
Backing pump / nominal pumping speed<br />
680 1500<br />
TRIVAC D 16 B / 18.9 m 3 x h -1 TRIVAC D 25 B / 29.5 m 3 x h -1<br />
Supply unit for high vacuum pump<br />
Control<br />
OEM power supply 59 V DC<br />
Power supply with programmable control<br />
Compressor unit<br />
Power supply with programmable control<br />
Built-in electro-pneumatic valves<br />
High vacuum connection flange<br />
Electrical connection<br />
Cooling water connection;<br />
DN 10 hose<br />
DN<br />
bar<br />
1 x DN 16 KF 1 x gate valve DN 160 ISO-K,<br />
2 x right-angle valve DN 25 KF, 1 x DN 16 KF<br />
160 ISO-K 160 ISO-K<br />
400 V, 3-phase + N, 50/60 Hz 1) 400 V, 3-phase + N, 50/60 Hz 1)<br />
4 to 7 4 to 7<br />
Cooling water consumption l x h -1<br />
25 140<br />
Compressed air connection, DN 10<br />
bar<br />
– 6 to 10<br />
Weight<br />
Basic unit<br />
kg<br />
350 425<br />
Ordering Information UNIVEX 350<br />
Standard<br />
1) Other voltages and frequencies upon request<br />
upon request<br />
Special<br />
upon request<br />
Leybold Vacuum Full Line Catalog 2005<br />
13<br />
C19
High Vacuum Experimentation Systems<br />
Door System<br />
Vacuum Chamber<br />
484<br />
440<br />
Material<br />
Technical Data<br />
Vacuum Chamber<br />
for UNIVEX 350<br />
Stainless steel<br />
500<br />
580<br />
Dimensions<br />
Inside width<br />
Inside depth<br />
Inside height<br />
mm<br />
mm<br />
mm<br />
370<br />
380<br />
500<br />
370<br />
220 220<br />
Connections<br />
Front side<br />
Bottom plate<br />
Lid<br />
Rear<br />
Left side<br />
Right side<br />
DN<br />
DN<br />
DN<br />
Door with window<br />
15 installation holes, 34.5 mm dia.<br />
7 installation holes, 34.5 mm dia.<br />
160 ISO-K, 2 x 10 KF, 2 x 40 KF<br />
160 ISO-K, further flanges optional<br />
160 ISO-K, further flanges optional<br />
195<br />
380<br />
Weight<br />
Ordering Information<br />
kg<br />
55<br />
Vacuum Chamber<br />
for UNIVEX 350<br />
Vacuum chamber Is included with the UNIVEX 350<br />
The position, number and size of the flanges<br />
and the installation holes may be varied<br />
almost freely according to requirements!<br />
Dimensional drawing for the vacuum camber<br />
C19 14<br />
Leybold Vacuum Full Line Catalog 2005
Door System<br />
High Vacuum Experimentation Systems<br />
Notes<br />
Leybold Vacuum Full Line Catalog 2005<br />
15<br />
C19
High Vacuum Experimentation Systems<br />
Accessories<br />
Standard Accessories for<br />
UNIVEX 300, 350, <strong>450</strong> and <strong>450</strong> B<br />
Blank-Off Screw Fitting<br />
For 34.5 mm dia. hole.<br />
Material<br />
Technical Data<br />
Blank-Off Screw Fitting<br />
Stainless steel<br />
Gasket<br />
FPM<br />
Weight<br />
kg<br />
0.1<br />
Ordering Information Blank-Off Screw Fitting<br />
Blank-off screw fitting Part No. 030 40<br />
Blank-off screw fitting<br />
Rotary Feedthrough<br />
With mount for substrate holder; for<br />
all common bell jar sizes; suitable for<br />
34.5 mm dia. holes.<br />
Technical Data<br />
Total length<br />
Shaft dia.; atmosphere/vacuum<br />
mm<br />
mm<br />
Rotary Feedthrough<br />
400<br />
8/10<br />
Max. rotational speed<br />
rpm<br />
150<br />
Permissible torque<br />
Nm<br />
2<br />
Weight<br />
kg<br />
2<br />
Ordering Information Rotary Feedthrough<br />
Rotary feedthrough Part No. 030 63<br />
Rotary feedthrough with attached drive motor and<br />
control cable<br />
C19 16<br />
Leybold Vacuum Full Line Catalog 2005
Accessories<br />
High Vacuum Experimentation Systems<br />
Motor Drive for<br />
Rotary Feedthrough<br />
With connection flange and coupling;<br />
is electrically operated through the<br />
VS 024 supply unit.<br />
Technical Data<br />
Motor Drive<br />
Dimensions<br />
mm<br />
70 dia., 300 long<br />
Speed<br />
rpm 0 to 150, load dependent control<br />
Electrical power supply<br />
V DC<br />
24<br />
Weight<br />
kg<br />
2<br />
Ordering Information<br />
Motor Drive<br />
Motor drive Part No. 030 64<br />
Control Cable, 6-Way<br />
Used to connect the motor to the<br />
power supply, complete with plugs.<br />
Technical Data<br />
Control Cable<br />
Lenght<br />
m<br />
3<br />
Weight<br />
kg<br />
0.2<br />
Ordering Information<br />
Control Cable<br />
Control cable Part No. 030 56<br />
Supply Unit VS 024<br />
For driving the motor.<br />
Cabinet<br />
Technical Data<br />
Supply Unit<br />
1/2 19" rack module, 3 HU<br />
Output<br />
Connection<br />
V DC<br />
V / Hz<br />
24, load dependent control<br />
via potentiometer<br />
230, 50/60<br />
Weight<br />
kg<br />
3<br />
Ordering Information<br />
Supply Unit<br />
Supply unit Part No. 200 02 466<br />
Leybold Vacuum Full Line Catalog 2005<br />
17<br />
C19
High Vacuum Experimentation Systems<br />
Accessories<br />
Components for Glow Discharge Cleaning<br />
Glow Discharge Assembly<br />
Technical Data<br />
Glow Discharge Assembly<br />
With glow discharge electrode, high<br />
voltage feedthrough for 34.5 mm dia.<br />
hole and connection cable for fitting<br />
to the central rotary feedthrough.<br />
Electrode material<br />
Insulation<br />
Max. ratings<br />
V<br />
mA<br />
Aluminum<br />
Ceramics<br />
2000<br />
65<br />
Sealing material of the high<br />
voltage feedthrough<br />
FPM<br />
Length of the connection cable<br />
m<br />
2<br />
Weight<br />
kg<br />
1<br />
Ordering Information<br />
Glow Discharge Assembly<br />
Glow discharge assembly with high voltage feedthrough<br />
and connection cable<br />
Glow discharge assembly<br />
for UNIVEX 300 and 350<br />
for UNIVEX <strong>450</strong> and <strong>450</strong> B<br />
Part No. 030 34<br />
Part No. 030 35<br />
C 2000 High Voltage<br />
Power Supply Unit<br />
Cabinet<br />
Technical Data<br />
High Voltage Power Supply Unit<br />
19" rack module, 3 HU<br />
For supplying the glow discharge<br />
assembly; with selector switch, meter<br />
and timer.<br />
Output<br />
V<br />
mA<br />
2000, max.<br />
65<br />
continuously adjustable,<br />
selectable +/– and 50 Hz AC<br />
Timer<br />
h<br />
0 to 6 h max.<br />
Connection<br />
230 V, 50/60 Hz, 150 VA<br />
Remote control<br />
and locking input<br />
included<br />
Ordering Information<br />
High Voltage Power Supply Unit<br />
C 2000 high voltagepower supply unit Part No. 032 95<br />
C 2000 high voltage power supply unit<br />
C19 18<br />
Leybold Vacuum Full Line Catalog 2005
Accessories<br />
High Vacuum Experimentation Systems<br />
PS 113 A Safety Switch<br />
For safety interlock arrangements in<br />
connection with the UNIVEX system<br />
controller, respectively optionally<br />
connected power supply equipment<br />
(for sputtering, electron beam<br />
evaporation or vacuum etching, for<br />
example).<br />
PS 113 A Safety Switch<br />
Technical Data<br />
Switching pressure<br />
mbar (Torr)<br />
Return switching pressure mbar (Torr)<br />
Switching inaccuracy<br />
mbar (Torr)<br />
Max. permissible operating pressure (abs.)<br />
mbar (Torr)<br />
Storage temperature range °C<br />
Nominal temperature range °C<br />
Switching contact<br />
Contact life<br />
Switching capacity<br />
Electrical connection<br />
Safety Switch<br />
Approx. 6 (4.5) below atmospheric pressure<br />
3 (2.3) below atmospheric pressure<br />
2 (1.5)<br />
2000 (1500)<br />
-25 to +85<br />
0 to 85<br />
Changeover contacts, gold-plated,<br />
for prog. controls<br />
> 10 5 switching cycles<br />
100 mA / 24 V AC<br />
30 mA / 24 V DC<br />
6.3 mm flat plug<br />
Vacuum connection<br />
Materials in contact with the medium<br />
Protection class<br />
Ordering Information<br />
DN<br />
IP<br />
16 KF<br />
stainless steel 1.4305, 1.4310,<br />
stainless steel 1.4300 PTFE coated<br />
44<br />
Safety Switch<br />
Low Pressure Safety Switch<br />
PS 113 A, DN 16 KF;<br />
complete with 3 m long cable Part No. 160 14<br />
Variable Leak Valve with<br />
Isolation Valve<br />
Technical Data<br />
Gas admission rate q L mbar x l x s -1<br />
Variable Leak Valve<br />
5 x 10 -6 to 1 x 10 3<br />
Connection flange<br />
Ordering Information<br />
Variable leak valve with isolation valve<br />
(see also Product Section C14 “Vacuum Valves”)<br />
DN<br />
16 KF<br />
Variable Leak Valve<br />
Part No. 215 010<br />
Leybold Vacuum Full Line Catalog 2005<br />
19<br />
C19
High Vacuum Experimentation Systems<br />
Accessories<br />
Components for Thermal Evaporation<br />
Single Thermal Evaporator<br />
Technical Data<br />
Single Evaporator<br />
Consisting of two water-cooled high<br />
voltage feedthroughs with terminal<br />
blocks for 34.5 mm dia. holes.<br />
Rating per conductor<br />
Seals<br />
V<br />
A<br />
max. 100<br />
500<br />
FPM<br />
Water connection<br />
mm<br />
hose 4/6 dia.<br />
Weight<br />
kg<br />
2.5<br />
Ordering Information Single Evaporator<br />
Single thermal evaporator Part No. 030 20<br />
Single thermal evaporator<br />
Dual Thermal Evaporator<br />
Technical Data<br />
Dual Evaporator<br />
Consisting of three water-cooled high<br />
voltage feedthroughs with terminal<br />
blocks for 34.5 mm dia. holes.<br />
Rating per conductor<br />
Seals<br />
V<br />
A<br />
max. 100<br />
500<br />
FPM<br />
Water connection<br />
mm<br />
hose 4/6 dia.<br />
Weight<br />
kg<br />
3.9<br />
Ordering Information Dual Evaporator<br />
Dual thermal evaporator Part No. 030 21<br />
Dual thermal evaporator<br />
Power Supply Cables<br />
Technical Data<br />
Power Supply Cable<br />
For single and dual thermal<br />
evaporators, equipped with terminals<br />
and clamping pieces.<br />
Length<br />
Rating<br />
m<br />
V<br />
A<br />
2<br />
max. 100<br />
500<br />
Cross section mm 2<br />
120<br />
Weight<br />
Ordering Information<br />
Power supply cables (set of 2)<br />
kg<br />
3.5<br />
Power Supply Cable<br />
Part No. 030 53 1)<br />
1) Two sets of power supply cables are needed for the dual thermal evaporator<br />
C19 20<br />
Leybold Vacuum Full Line Catalog 2005
Accessories<br />
High Vacuum Experimentation Systems<br />
Solenoid Actuated Vapor<br />
Source Shutter<br />
With rotary magnet and shutter<br />
screen; for installation to the rotary<br />
feedthrough<br />
Technical Data<br />
Vapor Source Shutter<br />
Connection for actuation<br />
24 V DC, 1 s pulse<br />
Dimensions of the shutter screen mm<br />
50 x 50<br />
Weight<br />
kg<br />
0.2<br />
Ordering Information Vapor Source Shutter<br />
Vapor source shutter Part No. 030 59<br />
Vapor source shutter, attached to the rotary<br />
feedthrough<br />
6-Way Measurement<br />
Feedthroughs<br />
For connection of the vapor source<br />
shutter; for 34.5 mm holes, plug-in<br />
soldered contact on the inside.<br />
Technical Data<br />
Measurement Feedthrough<br />
Rating per conductor<br />
V<br />
A<br />
max. 700<br />
16<br />
Seal<br />
Weight<br />
kg<br />
FPM<br />
0.3<br />
Ordering Information Measurement Feedthrough<br />
Measurement feedthrough Part No. 500 001 543<br />
6-way measurement feedthrough<br />
Control Cable, 6-Way<br />
For connection between<br />
measurement feedthrough and power<br />
supply unit for the vapor source<br />
shutter, complete with connection<br />
plugs.<br />
Technical Data<br />
Control Cable<br />
Length<br />
m<br />
3<br />
Weight<br />
kg<br />
0.2<br />
Ordering Information<br />
Control Cable<br />
6 way control cable Part No. 500 001 549<br />
Leybold Vacuum Full Line Catalog 2005<br />
21<br />
C19
High Vacuum Experimentation Systems<br />
Accessories<br />
AS 053 Power Supply Unit<br />
Technical Data<br />
Power Supply Unit<br />
For supplying thermal evaporators<br />
and one solenoid-actuated source<br />
shutter.<br />
With LCD display for current read<br />
out; with membrane key pad.<br />
Cabinet<br />
Outputs<br />
mm<br />
1/2 19" rack module, 3 HU,<br />
400 deep<br />
1 x evaporator output, 5 V, 400 A max.<br />
can be rewired to 10 V, 200 A max.<br />
1 x shutter output, 24 V DC, 1 s pulse<br />
Inputs<br />
Remote control unit for controlling the<br />
evaporation power (0 to 10 V)<br />
Remote control for the shutter<br />
Main power supply<br />
230 V, 50/60 Hz, 10 A<br />
AS 053 power supply unit<br />
Weigth<br />
kg<br />
15<br />
Ordering Information<br />
Power Supply Unit<br />
AS 053 power supply unit Part No. 200 23 209<br />
AS 053-2 Power Supply<br />
Unit<br />
For supplying power to two thermal<br />
evaporators with vapor source<br />
shutters.<br />
With LCD display for current read<br />
out; with membrane key pad.<br />
Cabinet<br />
Outputs<br />
Inputs<br />
Technical Data<br />
mm<br />
Power Supply Unit<br />
19" rack module, 3 HU<br />
400 deep<br />
2 x evaporator output, 5 V, 400 A max.<br />
can be rewired to 10 V, 200 A max.<br />
2 x shutter output, 24 V DC, 1 s pulse<br />
Remote control unit for controlling the<br />
evaporation power (0 to 10 V)<br />
Remote control for the shutter<br />
Switchover evaporator 1 / 2<br />
Main power supply<br />
230 V, 50/60 Hz, 10 A<br />
Weigth<br />
Ordering Information<br />
kg<br />
30<br />
Power Supply Unit<br />
AS 053-2 power supply unit Part No. 200 02 461<br />
C19 22<br />
Leybold Vacuum Full Line Catalog 2005
Accessories<br />
High Vacuum Experimentation Systems<br />
Components for Electron-Beam Evaporation<br />
Various models of electron-beam<br />
evaporators and power supplies are<br />
available for installation in the UNIVEX<br />
systems.<br />
Electron-beam evaporator<br />
The selection of a suitable<br />
electron-beam evaporator depends<br />
mostly on the space available, the<br />
demanded evaporation rates as well<br />
as the number and type materials<br />
which need to be evaporated.<br />
Power supplies<br />
The selection of the power supply<br />
unit for the individual electron-beam<br />
evaporator depends on the<br />
demanded maximum evaporation<br />
power as well as the demanded<br />
properties for X/Y beam deflection.<br />
Models with output power ratings<br />
ranging from 3 kW to 10 kW are<br />
available.<br />
As a rule, the maximum output power<br />
of the power supply may not exceed<br />
the maximum permissible power<br />
specified for the evaporator.<br />
Further information upon request.<br />
Safety regulations<br />
When installing electron-beam<br />
evaporators in the UNIVEX 300 the<br />
stainless steel ball jar must be used.<br />
Moreover, a safety interlocking<br />
arrangments is required. For the<br />
UNIVEX 300 and <strong>450</strong> a separate<br />
interlocking kit is available; in the<br />
case of the UNIVEX 350 and <strong>450</strong> B<br />
this kit is already included.<br />
As further safety means a water flow<br />
monitor is required for each<br />
electron-beam evaporation unit so as<br />
to ensure intensive cooling of the<br />
electron-beam evaporator.<br />
This water flow monitor is included<br />
with each electron-beam evaporator.<br />
Ordering Information<br />
Interlocking kit for<br />
UNIVEX 300<br />
UNIVEX <strong>450</strong><br />
UNIVEX 350<br />
UNIVEX <strong>450</strong> B<br />
Interlocking Kit<br />
Part No. 030 84<br />
Part No. 030 85<br />
Included<br />
Included<br />
Leybold Vacuum Full Line Catalog 2005<br />
23<br />
C19
High Vacuum Experimentation Systems<br />
Accessories<br />
Components for High Rate Sputtering<br />
DC Sputtering<br />
Various DC sputtering sources may<br />
be built into the UNIVEX units. The<br />
selection depends on the size of the<br />
substrate, the required target material<br />
and the available installation space.<br />
DC sputtering sources from 50 mm to<br />
200 mm as well as corresponding DC<br />
sputtering power supply units from<br />
500 W to 3000 W are available. The<br />
power supply units may be built into<br />
the basic units.<br />
DC sputtering sources are suited for<br />
all UNIVEX systems.<br />
Further information upon request.<br />
RF Sputtering<br />
Various RF sputtering sources may<br />
be built into the UNIVEX 350 and<br />
UNIVEX <strong>450</strong> B. The selection<br />
depends on the size of the substrate,<br />
the required target material and the<br />
available installation space. RF<br />
sputtering sources from 50 mm to<br />
200 mm as well as corresponding RF<br />
sputtering power supply units from<br />
150 W to 1000 W are available. The<br />
power supply units may be built into<br />
the basic units.<br />
RF sputtering sources are only suited<br />
for the UNIVEX 350 and<br />
UNIVEX <strong>450</strong> B.<br />
Further information upon request.<br />
Gas Inlet<br />
Sputtering sources can only be<br />
operated with gas admission. For<br />
this, manually operated variable leak<br />
valves up to automatically controlled<br />
mass flow controllers are available.<br />
Further information upon request.<br />
Safety regulations<br />
When installing electron beam<br />
evaporators in the UNIVEX 300 the<br />
stainless steel ball jar must be used.<br />
Moreover, a safety interlocking<br />
arrangement is required. For the<br />
UNIVEX 300 and <strong>450</strong> a separate<br />
interlocking kit is available; in the<br />
case of the UNIVEX 350 and <strong>450</strong> B<br />
this kit is already included.<br />
As further safety means a water flow<br />
monitor is required for each<br />
electron-beam evaporation unit so as<br />
to ensure intensive cooling of the<br />
electron-beam evaporator.<br />
Ordering Information<br />
Interlocking kit for<br />
UNIVEX 300<br />
UNIVEX <strong>450</strong><br />
UNIVEX 350<br />
UNIVEX <strong>450</strong> B<br />
Interlocking Kit<br />
Part No. 030 84<br />
Part No. 030 85<br />
Included<br />
Included<br />
C19 24<br />
Leybold Vacuum Full Line Catalog 2005
Accessories<br />
High Vacuum Experimentation Systems<br />
Components for Film Thickness<br />
Measurements<br />
Various thin film thickness measuring<br />
instruments may be installed in the<br />
UNIVEX units.<br />
The selection depends on the<br />
demanded measurements tasks and<br />
the required degree of automation.<br />
We especially recommend the thin<br />
film thickness measuring instruments<br />
which rely on quartz oscillators<br />
XTM/2 in the case of simple tasks,<br />
and the XTC/2 for complex control<br />
tasks.<br />
Further thin film measuring<br />
instruments which may be used to<br />
check complex multilayer films are<br />
available.<br />
Further information upon request.<br />
Leybold Vacuum Full Line Catalog 2005<br />
25<br />
C19
High Vacuum Experimentation Systems<br />
Special Units<br />
UNIVEX<br />
<strong>450</strong> B (Chamber Systems)<br />
Besides the standard UNIVEX<br />
systems we are also prepared to<br />
deliver modified systems for special<br />
applications.<br />
UNIVEX <strong>450</strong> B having a chamber diameter of 490 mm and with a 10-fold thermal evaporator<br />
Besides the standard chamber<br />
system UNIVEX 350 we can also<br />
supply UNIVEX systems with other<br />
chamber sizes. These are then so<br />
designed that the chamber<br />
containing the processing<br />
components and the pump system<br />
are mounted to a separate frame.<br />
The door flange of the chamber may<br />
then easily be integrated in the wall<br />
of a clean room. The electric power<br />
supply and the system controller are<br />
accommodated in a separate 19"<br />
electrical cabinet. This will simplify<br />
installation and subsequent<br />
operation.<br />
All processing components<br />
commonly used in thin-film<br />
processing may be installed in the<br />
chamber.<br />
The scope of the pump system used<br />
will in each case depend on the<br />
requirements of the desired<br />
processes to be run in the chamber.<br />
Design of the entire system in<br />
accordance with customer<br />
requirements will be undertaken<br />
upon request.<br />
UNIVEX <strong>450</strong> B having a chamber diameter of 490 mm and with RF sputter sources and dry compressing<br />
vacuum pump system; with EcoDry L pump<br />
666<br />
1415<br />
1645<br />
780<br />
1060<br />
173<br />
520<br />
500<br />
672<br />
The position, number and size of the flanges<br />
and the installation holes may be varied<br />
almost freely according to requirements!<br />
C19 26<br />
UNIVEX <strong>450</strong> B having a chamber diameter of 490 mm and with electron-beam evaporator<br />
with heatable and coolable chamber walls; with COOLVAC 3010 cryopump<br />
Dimensional drawing for the UNIVEX <strong>450</strong> B<br />
Leybold Vacuum Full Line Catalog 2005
Special Units<br />
High Vacuum Experimentation Systems<br />
UNIVEX <strong>450</strong> for Dactyloscopy<br />
Dactyloscopy is a term from the area<br />
of criminal investigation meaning:<br />
“Identification of a person through his<br />
fingerprints”. Depending on the<br />
material of the part which was<br />
touched, different methods are used<br />
to render the fingerprints visible.<br />
In the case of materials like plastic<br />
shopping bags, for example, foils,<br />
handlebars etc. evaporation methods<br />
have been found to be most useful.<br />
UNIVEX <strong>450</strong> for dactyloscopy<br />
Cluster system with lock, transfer chamber and with the possibility of adding up to six processing chambers<br />
The method itself utilises the effect<br />
well known from normal evaporation<br />
processes where the evaporated<br />
material will adhere better (and<br />
thicker) on the skin material (water,<br />
amino acids, fat and alike) deposited<br />
by the finger compared to the<br />
surrounding untouched material. An<br />
optimum contrast is attained by<br />
selecting a suitable evaporation<br />
material, usually gold or zinc.<br />
Benefits of this method:<br />
■ No “smearing” of existing traces<br />
compared to conventional<br />
methods<br />
■ Large surface areas (up to 80 x<br />
40 cm max.) carrying fingerprints<br />
can be checked completely in one<br />
pass<br />
■ The time needed for one pass is<br />
only about 10 minutes (depending<br />
on the material carrying the<br />
fingerprints)<br />
■ Good contrast also in the case of<br />
multicolour surfaces<br />
■ Fixation of the deposited material<br />
with the traces is easy – the results<br />
may be well documented (can be<br />
photographed)<br />
■ The carrier of the fingerprints is<br />
not destroyed.<br />
Leybold Vacuum Full Line Catalog 2005<br />
27<br />
C19
High Vacuum Experimentation Systems<br />
Special Units<br />
UNIVEX<br />
<strong>450</strong> C<br />
For special applications we can also<br />
supply cluster systems based on the<br />
UNIVEX concept. These clusters are<br />
equipped according to customers<br />
requirements and incorporate<br />
separate processing and load lock<br />
and transfer chambers.<br />
Test system with a 700 mm dia. chamber<br />
Test Systems with a Vacuum Chamber<br />
We can also supply vacuum<br />
chambers with custom pump<br />
systems for testing of various<br />
components.<br />
C19 28<br />
Leybold Vacuum Full Line Catalog 2005
High Vacuum Experimentation Systems<br />
Notes<br />
Leybold Vacuum Full Line Catalog 2005<br />
29<br />
C19
Sales and Service Net Worldwide<br />
Germany Europe Asia<br />
Leybold Vacuum GmbH<br />
Bonner Strasse 498<br />
D-50968 Cologne<br />
Phone: +49-221-347 1234<br />
Fax: +49-221-347 1245<br />
sales@leybold.com<br />
Leybold Vacuum GmbH<br />
Sales Area North/East<br />
Branch office Berlin<br />
Buschkrugallee 33<br />
1. Obergeschoss<br />
D-12359 Berlin<br />
Phone: +49-30-435 609 0<br />
Fax: +49-30-435 609 10<br />
sales.berlin@leybold.com<br />
Leybold Vacuum GmbH<br />
Sales Area South/Southwest<br />
Branch office Munic<br />
Karl-Hammerschmidt-Strasse 38<br />
D-85609 Aschheim/Dornach<br />
Phone: +49-89-357 33 90<br />
Fax: +49-89-357 33 933<br />
sales.muenchen@leybold.com<br />
service.muenchen@leybold.com<br />
Leybold Vacuum GmbH<br />
Sales Area West<br />
Branch office Cologne<br />
Emil-Hoffmann-Straße 43<br />
D-50996 Cologne-Suerth<br />
Phone: +49-221-347 1270<br />
Fax: +49-221-347 1291<br />
sales.koeln@leybold.com<br />
Leybold Vacuum GmbH<br />
Service Center<br />
Emil-Hoffmann-Straße 43<br />
D-50996 Cologne-Suerth<br />
Phone: +49-221-347 1439<br />
Fax: +49-221-347 1945<br />
service@leybold.com<br />
Leybold Vacuum GmbH<br />
Mobile after sales service<br />
Emil-Hoffmann-Straße 43<br />
D-50996 Cologne-Suerth<br />
Phone: +49-221-347 1765<br />
Fax: +49-221-347 1944<br />
kundendienst@leybold.com<br />
Leybold Vacuum<br />
Dresden GmbH<br />
Zur Wetterwarte 50, Haus 304<br />
D-01109 Dresden<br />
Service:<br />
Phone: +49-351-88 55 00<br />
Fax: +49-351-88 55 041<br />
info@leybold-dresden.de<br />
www.leybold-dresden.de<br />
Hotline<br />
Sales: +49-221-347 1234<br />
Service: +49-221-347 1765<br />
sales@leybold.com<br />
service@leybold.com<br />
Belgium<br />
Leybold Vacuum Nederland B.V.<br />
Belgisch bijkantoor<br />
Leuvensesteenweg 542-9A<br />
B-1930 Zaventem<br />
Sales:<br />
Phone: +32-2-711 00 83<br />
Fax: +32-2-720 83 38<br />
sales.belgium@leybold.com<br />
Service:<br />
Phone: +32-2-711 00 82<br />
Fax: +32-2-720 83 38<br />
service.belgium@leybold.com<br />
France<br />
Leybold Vacuum France S.A.<br />
7, Avenue du Québec<br />
Z.A. de Courtaboeuf, B.P. 42<br />
F-91942 Courtaboeuf Cedex<br />
Sales and Service:<br />
Phone: +33-1-69 82 48 00<br />
Fax: +33-1-69 07 57 38<br />
sales.france@leybold.com<br />
Leybold Vacuum France S.A.<br />
Valence Factory<br />
640, Rue A. Bergès - B.P. 107<br />
F-26501 Bourg-lès-Valence Cedex<br />
Phone: +33-4-75 82 33 00<br />
Fax: +33-4-75 82 92 69<br />
marketing.valence@leybold.fr<br />
Great Britain<br />
Leybold Vacuum UK Ltd.<br />
Waterside Way, Plough Lane<br />
GB-London SW17 0HB<br />
Sales:<br />
Phone: +44-20-8971 7000<br />
Fax: +44-20-8971 7001<br />
sales@leybold.com<br />
Service:<br />
Phone: +44-20-8971 7030<br />
Fax: +44-20-8971 7003<br />
service@leybold.com<br />
Italy<br />
Leybold Vacuum Italia S.p.A.<br />
8, Via Trasimeno<br />
I-20128 Milano<br />
Sales:<br />
Phone: +39-02-27 22 31<br />
Fax: +39-02-27 20 96 41<br />
sales@leybold.it<br />
Service:<br />
Phone: +39-02-27 22 31<br />
Fax: +39-02-27 20 96 41<br />
service@leybold.it<br />
Field Service Base<br />
Z.I.Le Capanne<br />
I-05021 Acquasparta (TR)<br />
Phone: +39-0744-93 03 93<br />
Fax: +39-0744-94 42 87<br />
service@leybold.it<br />
Netherlands<br />
Leybold Vacuum Nederland B.V.<br />
Computerweg 7<br />
NL-3542 DP Utrecht<br />
Sales and Service:<br />
Phone: +31-346-58 39 99<br />
Fax: +31-346-58 39 90<br />
sales.netherlands@leybold.com<br />
service.netherlands@leybold.com<br />
Spain<br />
Leybold Vacuum España S.A.<br />
C/. Huelva, 7<br />
E-08940 Cornella de Llobregat<br />
(Barcelona)<br />
Sales:<br />
Phone: +34-93-666 46 16<br />
Fax: +34-93-666 43 70<br />
sales.spain@leybold.com<br />
Service:<br />
Phone: +34-93-666 49 51<br />
Fax: +34-93-685 40 10<br />
Sweden<br />
Leybold Vacuum Scandinavia AB<br />
Box 9084<br />
SE-40092 Göteborg<br />
Sales and Service:<br />
Phone: +46-31-68 84 70<br />
Fax: +46-31-68 39 39<br />
info@leybold.se<br />
Visiting/delivery address:<br />
Datavägen 57B<br />
SE-43632 Askim<br />
Switzerland<br />
Leybold Vacuum Schweiz AG<br />
Leutschenbachstrasse 55<br />
CH-8050 Zürich<br />
Sales:<br />
Phone: +41-1-308 40 50<br />
Fax: +41-1-302 43 73<br />
sales@leybold.ch<br />
Service:<br />
Phone: +41-1-308 40 62<br />
Fax: +41-1-308 40 60<br />
America<br />
USA<br />
Leybold Vacuum USA Inc.<br />
5700 Mellon Road<br />
Export, PA 15632<br />
info@leyboldvacuum.com<br />
Sales:<br />
Eastern & Central time zones<br />
Phone: +1-724-327-5700<br />
Fax: +1-724-733-1217<br />
Pacific, Mountain,<br />
Alaskan & Hawaiian time zones<br />
Phone: +1-480-752-9191<br />
Fax: +1-480-752-9494<br />
Service:<br />
Phone: +1-724-327-5700<br />
Fax: +1-724-733-3799<br />
P.R. China<br />
Japan<br />
Leybold Vacuum (Tianjin)<br />
International Trade Co., Ltd.<br />
Beichen Economic<br />
Development Area (BEDA),<br />
No. 8 Western Shuangchen Road<br />
Tianjin 300400, China<br />
Sales and Service:<br />
Phone: +86-22-2697 0808<br />
Fax: +86-22-2697 4061<br />
Fax: +86-22-2697 2017<br />
leybold@leybold.com.cn<br />
Leybold Vacuum (Tianjin)<br />
Equipment Manufacturing Co., Ltd.<br />
Beichen Economic<br />
Development Area (BEDA),<br />
No. 8 Western Shuangchen Road<br />
Tianjin 300400, China<br />
Phone: +86-22-2697 0808<br />
Fax: +86-22-2697 4061<br />
Fax: +86-22-2697 2017<br />
leybold@leybold.com.cn<br />
Leybold Vacuum (Tianjin)<br />
International Trade Co., Ltd.<br />
Beijing Branch:<br />
1-908, Beijing Landmark Towers<br />
8 North Dongsanhuan Road<br />
Chaoyang District<br />
Beijing 100004, China<br />
Sales and Service:<br />
Phone: +86-10-6590-7607<br />
Fax: +86-10-6590-7622<br />
Leybold Vacuum (Tianjin)<br />
International Trade Co., Ltd.<br />
Shanghai Branch:<br />
Add: No. 33, 76 Futedong San<br />
Rd., Waigaoqiao FTZ ,<br />
Shanghai 200131, China<br />
Sales and Service:<br />
Phone: +86-21-5064-4666<br />
Fax: +86-21-5064-4668<br />
leybold_sh@leybold.com.cn<br />
Leybold Vacuum (Tianjin)<br />
Guangzhou Branch:<br />
Add: G/F,#301 Building,<br />
110 Dongguangzhuang Rd.<br />
Tianhe District,<br />
Guangzhou 510610, China<br />
Sales:<br />
Phone: +86-20-8723-7873<br />
Phone: +86-20-8723-7597<br />
Fax: +86-20-8723-7875<br />
leybold_gz@leybold.com.cn<br />
India<br />
Leybold Vacuum India Pvt Ltd.<br />
A-215 Road No. 30<br />
MIDC Wagle Industrial Estate<br />
Thane(W) - 400 604 Maharashtra<br />
India<br />
Sales and Service:<br />
Phone: +91-22-2581 2929<br />
Fax: +91-22-2581 2626<br />
ivt2004@yahoo.com<br />
Leybold Vacuum<br />
Japan Co., Ltd.<br />
Head Office<br />
Tobu A.K. Bldg. 4th Floor<br />
23-3, Shin-Yokohama<br />
3-chome<br />
Kohoku-ku, Yokohama-shi<br />
Kanagawa-ken 222-0033<br />
Sales:<br />
Phone: +81-45-4713330<br />
Fax: +81-45-4713323<br />
Leybold Vacuum<br />
Japan Co., Ltd.<br />
Osaka Branch Office<br />
MURATA Bldg. 7F<br />
2-7-53, Nihi-Miyahara<br />
Yodogawa-ku<br />
Osaka-shi 532-0004<br />
Sales:<br />
Phone: +81-6-6393-5211<br />
Fax: +81-6-6393-5215<br />
Leybold Vacuum<br />
Japan Co., Ltd.<br />
Tsukuba Technical S.C.<br />
Tsukuba Minami Daiichi<br />
Kogyo Danchi<br />
21, Kasumi-no-Sato,<br />
Ami-machi, Inashiki-gun<br />
Ibaraki-ken, 300-0315<br />
Service:<br />
Phone: +81-298-89-2841<br />
Fax: +81-298-89-2838<br />
Korea<br />
Leybold Vacuum Korea Ltd.<br />
#761-4, Yulkeum-ri,<br />
SungHwan-eup, Cheonan-City<br />
Choongchung-Namdo,<br />
330-807, Korea<br />
Sales:<br />
Phone: +82-41-580-4420<br />
Fax: +82-41-588-3737<br />
Service:<br />
Phone: +82-41-580-4415<br />
Fax: +82-41-588-3737<br />
Singapore<br />
Leybold Vacuum<br />
Singapore Pte Ltd.<br />
No.1, International<br />
Business Park,<br />
B1-20B, The Synergy<br />
Singapore 609917<br />
Sales and Service:<br />
Phone: +65-66652910<br />
Fax: +65-65668202<br />
vacuum@leyboldvac.com.sg<br />
Taiwan<br />
Leybold Vacuum Taiwan Ltd.<br />
No 416-1, Sec. 3<br />
Chung-Hsin Rd., Chu-Tung<br />
Hsin-Chu, Taiwan, R.O.C.<br />
Sales and Service:<br />
Phone: +886-3-5833988<br />
Fax: +886-3-5833999<br />
LV_07326_2005 05.05<br />
Leybold Vacuum GmbH<br />
Bonner Strasse 498<br />
D-50968 Cologne<br />
Phone: +49-221 347- 0<br />
Fax: +49-221 347-1250<br />
info@leybold.com<br />
vacuum<br />
www.leybold.com
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