Films minces à base de Si nanostructuré pour des cellules ...
Films minces à base de Si nanostructuré pour des cellules ... Films minces à base de Si nanostructuré pour des cellules ...
Reactive method: Si cathode is sputtered while introducing nitrogen into the Ar plasma to obtain Si-rich silicon nitride (SRSN). A sample of N-rich silicon nitride (NRSN) was obtained by sputtering a Si 3 N 4 target in N-rich plasma. Co-sputtering method: this approach involves the simultaneous co-sputtering of Si 3 N 4 and Si cathodes. The power density on Si 3 N 4 was xed at 7.4 W/cm 2 and that on Si cathode was varied between 0-2.96 W/cm 2 in order to see the eect of excess Si incorporation. Silicon dioxide (SiO 2 ) Silicon dioxide layer was deposited by sputtering SiO 2 cathode under pure Ar plasma. As in the previous cases, the RF power density on the SiO 2 cathode was maintained at 7.4 W/cm 2 . tel-00916300, version 1 - 10 Dec 2013 The single layers and the multilayers of SiO 2 , SRSO and SiN x were synthesized using the growth methods described above. The composition of the layers were varied using appropriate deposition conditions such as temperature, pressure, RF power density monitored using a computer software provided by AJA International. To deposit at a desired temperature a ramp time was fed in the program to reach the temperature and a dwell time of 1 hour was xed for stabilization (to reach a uniform temperature over the substrate) before the deposition takes place. The substrate was kept under rotation with a speed of 20 revolutions/minute to ensure homogeneous deposition and the substrate-target distance was xed at 38 cm. 2.1.3 Thermal treatment All the deposited layers were subjected to thermal treatments in order to favour phase-separation, crystallization and passivation of the defects (vacancy, dangling bonds, etc.) in the material. All the samples were annealed under the nitrogen atmosphere and the temperatures of annealing was varied between 400-1100 °C depending on the requirement. A couple of multilayers were also subjected to annealing under the forming gas atmosphere between 380°C-500°C. The eect of the annealing time and temperatures of dierent kinds of layers were analyzed. 2.2 Structural and Optical Characterization The samples in this thesis have been analyzed structurally and optically using one or many of the following techniques: Fourier Transform Infrared Spectroscopy, X- 34
Ray Diraction, X-Ray Reectivity, Electron Microscopy, Raman spectroscopy, ellipsometry, photoluminescence spectroscopy. An insight on the structural and compositional details of the as-deposited and the annealed lms can be extracted from microscopic images, characteristic vibrational frequencies of specic elements in the lm, refractive indices, the material's absorption and emission behaviours etc., resulting from the above mentioned characterization techniques. 2.2.1 Fourier Transform Infrared Spectroscopy (FTIR) Principle tel-00916300, version 1 - 10 Dec 2013 FTIR spectroscopy is a powerful tool to investigate the chemical bonds present in a molecule. Molecular bonds vibrate at specic frequencies depending on the elements and the types of bond they possess. When the incident IR light interacts with the molecules, they absorb light at these specic frequencies that are characteristic of their structure. The molecules can vibrate in any of the following ways: symmetrical and asymmetrical stretching, scissoring, rocking, wagging and twisting as indicated in gure 2.3. The resulting absorption spectrum yields both qualitative as well as quantitative information on the chemical bonds and their concentration in the material, respectively. Figure 2.3: Dierent types of molecular vibrations. Experimental set-up and working FTIR measurements were performed using Thermo Nicolet Nexus 750-II. The spectra were recorded in wavelength ranging between 400 to 4000 cm −1 with a resolution of 2 cm −1 at room temperature. The apparatus has two light sources: He-Ne monochromator (633 nm) and a lamp with tungsten lament that generates light 35
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Ray Diraction, X-Ray Reectivity, Electron Microscopy, Raman spectroscopy, ellipsometry,<br />
photoluminescence spectroscopy. An insight on the structural and compositional<br />
<strong>de</strong>tails of the as-<strong>de</strong>posited and the annealed lms can be extracted from<br />
microscopic images, characteristic vibrational frequencies of specic elements in the<br />
lm, refractive indices, the material's absorption and emission behaviours etc., resulting<br />
from the above mentioned characterization techniques.<br />
2.2.1 Fourier Transform Infrared Spectroscopy (FTIR)<br />
Principle<br />
tel-00916300, version 1 - 10 Dec 2013<br />
FTIR spectroscopy is a powerful tool to investigate the chemical bonds present in a<br />
molecule. Molecular bonds vibrate at specic frequencies <strong>de</strong>pending on the elements<br />
and the types of bond they possess. When the inci<strong>de</strong>nt IR light interacts with the<br />
molecules, they absorb light at these specic frequencies that are characteristic of<br />
their structure. The molecules can vibrate in any of the following ways: symmetrical<br />
and asymmetrical stretching, scissoring, rocking, wagging and twisting as indicated<br />
in gure 2.3. The resulting absorption spectrum yields both qualitative as well<br />
as quantitative information on the chemical bonds and their concentration in the<br />
material, respectively.<br />
Figure 2.3: Dierent types of molecular vibrations.<br />
Experimental set-up and working<br />
FTIR measurements were performed using Thermo Nicolet Nexus 750-II. The spectra<br />
were recor<strong>de</strong>d in wavelength ranging between 400 to 4000 cm −1 with a resolution<br />
of 2 cm −1 at room temperature. The apparatus has two light sources: He-Ne<br />
monochromator (633 nm) and a lamp with tungsten lament that generates light<br />
35