Films minces à base de Si nanostructuré pour des cellules ...
Films minces à base de Si nanostructuré pour des cellules ... Films minces à base de Si nanostructuré pour des cellules ...
tel-00916300, version 1 - 10 Dec 2013 is interesting to note that doubling the number of patterns from 50 to 100 does not result in a doubling of PL intensity. Instead, the PL intensity shows a huge enhancement of about 7.4 times and suggests that besides the pattern number there might be other factors inuencing the emission. The possible reasons will be systematically analyzed in the forthcoming sections and in chapter 5. The 50 patterned ML also has three peaks (a, b & c) which are redshifted from peaks (1, 2 & 3) of the 100 patterned ML (Fig. 4.35b). The positions of peaks (b & c) fall within the range of peak (1) & peak (2) as seen in previous section and may be considered as a contribution of Si-np. The peak (3) disappears in 50 patterned sample, and a new peak (a) appears at lower energy. It is complicated to reason out: - if peak (a) has a new origin and if the absence of peak (3) in 50 patterned sample might be due to a reduced volume of SRSN in the material. This is because peak (3) is assumed to be arising from Si:Si 3 N 4 interface and/or defect states and even in 100 patterned ML (more SRSN sublayers than 50(3.5/5)), this peak intensity is too low. - if these three curves in 50 patterned ML are only the redshifted (1, 2 & 3) peaks observed in the 100 patterned sample. 4.8 Eect of SRSN sublayer thickness on structural and optical properties The inuence of SRSN sublayer thicknesses (t SRSN ) on the structural and optical properties were investigated by growing 50(t SRSO /t SRSN ) MLs, where t SRSO = 3 nm and t SRSN ranges between 1.5 to 10 nm. Figure 4.36a shows the as-grown FTIR spectra of these set of samples recorded in Brewster incidence and normalized to 100 nm thickness. A pronounced increase in the intensity of (LO and TO) Si−N modes can be seen when t SRSN varies from 1.5 nm - 8 nm which is attributed to an increase in number of Si-N bonds with sublayer thickness. Such a trend is also observed in the asymmetric stretching modes of Si-O but to a lower extent. It can be observed in all these vibrating modes, that with further increase of t SRSN (=10 nm) the peak intensities decrease. In the spectra recorded with normal incidence (Fig. 4.36b), the Si-O bonds are more pronounced for lower t SRSN , due to lower amount of Si-N bonds in the material. With increasing t SRSN , the number of Si-N bonds in the material increases whereas the number of Si-O bonds remain constant. Therefore we notice an increase 122
(a) Brewster incidence. (b) Normal incidence. Figure 4.36: FTIR spectra of as-grown SRSO/SRSN MLs grown by reactive approach as a function of SRSN sublayer thickness. tel-00916300, version 1 - 10 Dec 2013 in the Si-N peak intensities with respect to those of Si-O ones (peak positions are marked in the upper axis of Fig. 4.36). Similar trend is observed for SRSO/SRSN MLs with SRSN grown by the co-sputtering method on varying the sublayer thicknesses. The eect on the emission behaviour of STA SRSO/SRSN by varying t SRSN is shown in gure 4.37. t SRSN peak (a) (eV) peak (b) (eV) peak (c) (eV) 1.5 nm 1.25 - - 3 nm 1.21 1.48 1.72 5 nm 1.24 1.44 1.63 8 nm 1.43 1.59 1.85 10 nm 1.45 1.59 1.85 Figure 4.37: PL spectra and the peak positions of STA (1min-1000°C) SRSO/SRSN ML with varying t SRSN grown by reactive sputtering approach. Table indicates the peak positions obtained after gaussian curve tting on each of the PL spectra. The PL intensity shows a non monotonous trend with increasing SRSN sublayer thickness. The intensity increases with increasing t SRSN , reaching the highest at 8 nm and decreases for t SRSN =10 nm. The table reports the values of the three peak maxima in all the samples under investigation. The results of gaussian curve tting 123
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tel-00916300, version 1 - 10 Dec 2013<br />
is interesting to note that doubling the number of patterns from 50 to 100 does not<br />
result in a doubling of PL intensity. Instead, the PL intensity shows a huge enhancement<br />
of about 7.4 times and suggests that besi<strong>de</strong>s the pattern number there might<br />
be other factors inuencing the emission. The possible reasons will be systematically<br />
analyzed in the forthcoming sections and in chapter 5.<br />
The 50 patterned ML also has three peaks (a, b & c) which are redshifted from<br />
peaks (1, 2 & 3) of the 100 patterned ML (Fig. 4.35b). The positions of peaks (b &<br />
c) fall within the range of peak (1) & peak (2) as seen in previous section and may<br />
be consi<strong>de</strong>red as a contribution of <strong>Si</strong>-np. The peak (3) disappears in 50 patterned<br />
sample, and a new peak (a) appears at lower energy. It is complicated to reason<br />
out:<br />
- if peak (a) has a new origin and if the absence of peak (3) in 50 patterned<br />
sample might be due to a reduced volume of SRSN in the material. This is because<br />
peak (3) is assumed to be arising from <strong>Si</strong>:<strong>Si</strong> 3 N 4 interface and/or <strong>de</strong>fect states and<br />
even in 100 patterned ML (more SRSN sublayers than 50(3.5/5)), this peak intensity<br />
is too low.<br />
- if these three curves in 50 patterned ML are only the redshifted (1, 2 & 3)<br />
peaks observed in the 100 patterned sample.<br />
4.8 Eect of SRSN sublayer thickness on structural<br />
and optical properties<br />
The inuence of SRSN sublayer thicknesses (t SRSN ) on the structural and optical<br />
properties were investigated by growing 50(t SRSO /t SRSN ) MLs, where t SRSO = 3 nm<br />
and t SRSN ranges between 1.5 to 10 nm.<br />
Figure 4.36a shows the as-grown FTIR spectra of these set of samples recor<strong>de</strong>d<br />
in Brewster inci<strong>de</strong>nce and normalized to 100 nm thickness.<br />
A pronounced increase in the intensity of (LO and TO) <strong>Si</strong>−N mo<strong>de</strong>s can be seen<br />
when t SRSN varies from 1.5 nm - 8 nm which is attributed to an increase in number of<br />
<strong>Si</strong>-N bonds with sublayer thickness. Such a trend is also observed in the asymmetric<br />
stretching mo<strong>de</strong>s of <strong>Si</strong>-O but to a lower extent. It can be observed in all these<br />
vibrating mo<strong>de</strong>s, that with further increase of t SRSN (=10 nm) the peak intensities<br />
<strong>de</strong>crease. In the spectra recor<strong>de</strong>d with normal inci<strong>de</strong>nce (Fig. 4.36b), the <strong>Si</strong>-O<br />
bonds are more pronounced for lower t SRSN , due to lower amount of <strong>Si</strong>-N bonds in<br />
the material.<br />
With increasing t SRSN , the number of <strong>Si</strong>-N bonds in the material increases<br />
whereas the number of <strong>Si</strong>-O bonds remain constant. Therefore we notice an increase<br />
122