Films minces à base de Si nanostructuré pour des cellules ...

Figure 4.33: XRD spectra of SRSO/SRSN ML.
tel-00916300, version 1 - 10 Dec 2013
to conrm if replacing SiO 2 sublayer by SRSN ones could favour the formation of
nanocrystals in SRSO/SRSN MLs even after such short time annealing of 1min,
HR-TEM investigations were carried out. EF-TEM measurements were also done
on this sample to estimate the density of Si-np considering the amorphous particles
in SRSO sublayers and their possible presence in SRSN sublayers.
Figure 4.34 shows the microstructural investigations carried out on SRSO/SRSN
ML. The dark eld image taken under (111) reection reveals the presence of
nanocrystals indicating that STA treatment is sucient for the formation of nanocrystals
thus conrming the XRD results.
(a) Dark eld with Si (111) re-
ection.
(b) HR-TEM image.
(c) EF-TEM image.
Figure 4.34: Microstructural investigations by (a) TEM, (b) HR-TEM and (c) EF-TEM
imaged with Si (17eV) plasmon and O (23eV) plasmon.
The HR-TEM image evidences the presence of few nanocrystals in SRSO sublayer
(highlighted with white circles). The EFTEM image obtained by inserting
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