Films minces à base de Si nanostructuré pour des cellules ...
Films minces à base de Si nanostructuré pour des cellules ...
Films minces à base de Si nanostructuré pour des cellules ...
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sample peak 1<br />
(eV)<br />
peak 2<br />
(eV)<br />
peak 3<br />
(eV)<br />
as grown 1.41 1.62 1.88<br />
1min 1.39 1.61 1.85<br />
16min 1.41 1.57 1.80<br />
31min 1.43 1.56 1.80<br />
61min 1.33 1.55 1.80<br />
Figure 4.29: PL spectra of 100(3.5/5) ML annealed at 700°C. The peak positions obtained<br />
after gaussian tting are indicated in the table.<br />
tel-00916300, version 1 - 10 Dec 2013<br />
and 1min annealed spectra. This redshift may be attributed to the formation of<br />
bigger <strong>Si</strong>-np. Following the Delerue law [Delerue 93], this shift is linked to a size<br />
variation of 0.3 nm. Consi<strong>de</strong>ring the maximum value of <strong>Si</strong> diusion coecient,<br />
D <strong>Si</strong> = 10 −18 cm 2 s −1 at this temperature [Nesbit 85], the maximum diusion length<br />
(l = D <strong>Si</strong> x t A ) after an annealing time of 16min is estimated to 0.3 nm. Consequently,<br />
this PL shift can be attributed to the <strong>Si</strong> diusion favouring the growth of <strong>Si</strong>-np. The<br />
quench of the PL intensity with further annealing time can be ascribed to this growth<br />
of the <strong>Si</strong>-np as well as the <strong>de</strong>trimental contribution of the SRSN sublayer.<br />
4.6.3 T A =900°C:<br />
Figure 4.30 shows the PL spectra and the peak positions of 100(3.5/5) ML annealed<br />
at 900°C.<br />
sample peak 1<br />
(eV)<br />
peak 2<br />
(eV)<br />
peak 3<br />
(eV)<br />
as grown 1.41 1.62 1.88<br />
1min 1.41 1.59 1.80<br />
Figure 4.30: PL spectra of 100(3.5/5) ML annealed at 900°C. The peak positions obtained<br />
after gaussian tting are indicated in the table.<br />
The highest emission intensity is obtained after 1min when annealed at 900 °C<br />
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