Films minces à base de Si nanostructuré pour des cellules ...
Films minces à base de Si nanostructuré pour des cellules ... Films minces à base de Si nanostructuré pour des cellules ...
tel-00916300, version 1 - 10 Dec 2013 Si:Si 3 N 4 interfaces [Maria 75] and/or to various defect states in silicon nitride. However, these possibilities of dierent origins of emission will be analysed and conrmed in the forthcoming sections. After subjecting to CA, the emission from SRSO/SRSN ML is quenched whereas in section 3.7.2 of chapter 3 it was seen that CA process enhances emission in SRSO/SiO 2 MLs. Since it was seen from XRD and HR-TEM that the average size of the nanocrystals in CA SRSO/SRSN MLs are about 3.8-4 Figure 4.25: PL spectra of as grown and 1h-1100°C (CA) 100(3.5/5) ML. nm, this quenching of PL cannot be attributed to the overgrowth of crystals. These results indicates that SRSN sublayers when annealed at high temperature show a detrimental eect on the emission from SRSN as well as SRSO sublayers. (b) Absorption coecient, (α) The absorption behaviour of the CA 100(3.5/5) MLs were investigated by comparing α values of other Si-based layers investigated in this thesis (Fig. 4.26). The absorption coecient curves of reference a-Si and c-Si are also presented by using the data from [Internet ta] to facilitate comparison between the absorption behaviours of the thin lms. The absorption coecient curves are similar in SRSN monolayer and SRSO/SRSN ML, from energies higher than 2 eV. It is interesting to note that the absorption coecient values are about 10 times higher in SRSO/SRSN Figure 4.26: Comparison of absorption coecient curves obtained from CA 100(3.5/5) MLs as compared to the SRSO/SiO 2 ML with other CA Si-based thin lms investigated in this thesis. The reference absorption ML, at energies greater than 2.5eV. Besides, in the range of emission energies also (typically 1.4-1.7 eV), the curves of c-Si and a-Si are also plotted for comparison [Internet ta]. SRSO/SRSN MLs have a higher absorp- 114
tion but within a dierence of one order of magnitude. It can also be seen that at high energies, the level of absorption in SRSO/SRSN ML approaches that of Si. This shows that the replacement of SiO 2 by SRSN sublayers in ML favours absorption. Despite a higher pump absorption in CA SRSO/SRSN ML, in comparison to SRSO/SiO 2 ML, there is a quenching of PL from the former. This implies that CA SRSO/SRSN ML favours absorption but has a detrimental eect on emission. 4.6 Eect of annealing treatment under N 2 ow tel-00916300, version 1 - 10 Dec 2013 It was seen in the previous sections that the SRSO/SRSN samples contain nanocrystals as SRSO/SiO 2 MLs, but the presence of SRSN sublayers create a detrimental eect on the PL emission after CA. However, both the as grown (not shown) and CA SRSO/SRSN MLs have high α values. These results indicate the possibility of intermediate annealing treatments that might favour PL emission. A detailed investigation on the eect of annealing treatments (temperature and time) was made to optimize the PL emission. Annealing steps 1min 1+15min 1+15+15min 1+15+15+30min 1h continuous annealing Denoted as 1min (1min 1000°C-STA) 16min 31min 61min LTA (1h-1100°C-CA) Figure 4.27: Pictorial representation of step by step annealing under N 2 ow. (Table) Details of annealing time used for investigation and their notations. The 100(3.5/5) ML was annealed at various temperatures (T A ) between 400°- 1100°C while the time of annealing (t A ) was varied between 1 minute to 61 minutes in steps as can be seen in the pictorial representation of gure 4.27. Continuous Long Time Annealing (LTA) of 1 hour at various temperatures were also performed. The emission obtained from LTA MLs were compared with MLs annealed for 61 minutes in steps. Table of gure 4.27 details the various annealing steps employed for these investigations and the way they are denoted in the forthcoming parts. The eect of T A and t A on the emission intensities of SRSO/SRSN ML are discussed below. (All the graphs in the discussions that follow in this section are comparable). 115
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tel-00916300, version 1 - 10 Dec 2013<br />
<strong>Si</strong>:<strong>Si</strong> 3 N 4 interfaces [Maria 75] and/or to various <strong>de</strong>fect states in silicon nitri<strong>de</strong>.<br />
However, these possibilities of dierent<br />
origins of emission will be analysed<br />
and conrmed in the forthcoming sections.<br />
After subjecting to CA, the emission<br />
from SRSO/SRSN ML is quenched<br />
whereas in section 3.7.2 of chapter 3<br />
it was seen that CA process enhances<br />
emission in SRSO/<strong>Si</strong>O 2 MLs. <strong>Si</strong>nce it<br />
was seen from XRD and HR-TEM that<br />
the average size of the nanocrystals in<br />
CA SRSO/SRSN MLs are about 3.8-4<br />
Figure 4.25: PL spectra of as grown and<br />
1h-1100°C (CA) 100(3.5/5) ML.<br />
nm, this quenching of PL cannot be attributed<br />
to the overgrowth of crystals.<br />
These results indicates that SRSN sublayers when annealed at high temperature<br />
show a <strong>de</strong>trimental eect on the emission from SRSN as well as SRSO sublayers.<br />
(b) Absorption coecient, (α)<br />
The absorption behaviour of the CA 100(3.5/5) MLs were investigated by comparing<br />
α values of other <strong>Si</strong>-<strong>base</strong>d layers investigated in this thesis (Fig. 4.26).<br />
The absorption coecient curves of reference<br />
a-<strong>Si</strong> and c-<strong>Si</strong> are also presented<br />
by using the data from [Internet ta] to<br />
facilitate comparison between the absorption<br />
behaviours of the thin lms.<br />
The absorption coecient curves<br />
are similar in SRSN monolayer and<br />
SRSO/SRSN ML, from energies higher<br />
than 2 eV. It is interesting to note<br />
that the absorption coecient values are<br />
about 10 times higher in SRSO/SRSN<br />
Figure 4.26: Comparison of absorption coecient<br />
curves obtained from CA 100(3.5/5) MLs as compared to the SRSO/<strong>Si</strong>O 2<br />
ML with other CA <strong>Si</strong>-<strong>base</strong>d thin lms investigated<br />
in this thesis. The reference absorption<br />
ML, at energies greater than 2.5eV.<br />
Besi<strong>de</strong>s, in the range of emission energies<br />
also (typically 1.4-1.7 eV), the<br />
curves of c-<strong>Si</strong> and a-<strong>Si</strong> are also plotted for<br />
comparison [Internet ta].<br />
SRSO/SRSN MLs have a higher absorp-<br />
114