Films minces à base de Si nanostructuré pour des cellules ...

tel-00916300, version 1 - 10 Dec 2013
4.24 HR-TEM image of CA 100(3.5/5) SRSO/SRSN ML. The arrows indicate
the possible exodiusion paths. . . . . . . . . . . . . . . . . . 113
4.25 PL spectra of as grown and 1h-1100°C (CA) 100(3.5/5) ML. . . . . . 114
4.26 Comparison of absorption coecient curves obtained from CA 100(3.5/5)
ML with other CA Si-based thin lms investigated in this thesis. The
reference absorption curves of c-Si and a-Si are also plotted for comparison
[Internet ta]. . . . . . . . . . . . . . . . . . . . . . . . . . . . 114
4.27 Pictorial representation of step by step annealing under N 2 ow. (Table)
Details of annealing time used for investigation and their notations.115
4.28 PL spectra of 100(3.5/5) ML annealed at 400°C. The peak positions
obtained after gaussian tting are indicated in the table. . . . . . . . 116
4.29 PL spectra of 100(3.5/5) ML annealed at 700°C. The peak positions
obtained after gaussian tting are indicated in the table. . . . . . . . 117
4.30 PL spectra of 100(3.5/5) ML annealed at 900°C. The peak positions
obtained after gaussian tting are indicated in the table. . . . . . . . 117
4.31 PL spectra of 100(3.5/5) ML annealed at 1000°C. The peak positions
obtained after gaussian tting are indicated in the table. . . . . . . . 118
4.32 Eect of time and temperature of annealing on the emission of 100(3.5/5)
ML. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 119
4.33 XRD spectra of SRSO/SRSN ML. . . . . . . . . . . . . . . . . . . . . 120
4.34 Microstructural investigations by (a) TEM, (b) HR-TEM and (c) EF-
TEM imaged with Si (17eV) plasmon and O (23eV) plasmon. . . . . 120
4.35 Eect of pattern number on the emission of STA SRSO/SRSN MLs. . 121
4.36 FTIR spectra of as-grown SRSO/SRSN MLs grown by reactive approach
as a function of SRSN sublayer thickness. . . . . . . . . . . . 123
4.37 PL spectra and the peak positions of STA (1min-1000°C) SRSO/SRSN
ML with varying t SRSN grown by reactive sputtering approach. Table
indicates the peak positions obtained after gaussian curve tting on
each of the PL spectra. . . . . . . . . . . . . . . . . . . . . . . . . . 123
4.38 Inuence of t SRSN on the PL spectra of SRSO/SRSN ML grown by
reactive sputtering approach, after CA (1h-1100°C). . . . . . . . . . . 124
4.39 (a) Eect of annealing time under forming gas on the PL spectra
of 50(3.5/5) SRSO/SRSN ML and, (b) PL peak maximum with regard
to time of annealing in SRSO/SRSN MLs with dierent t SRSN .
(Inset) Recalling the inuence of t SRSN on PL from STA (1min-
1000°C/N 2 ) samples. . . . . . . . . . . . . . . . . . . . . . . . . . . . 126
x