Films minces à base de Si nanostructuré pour des cellules ...

tel-00916300, version 1 - 10 Dec 2013
(a) .
Figure 4.17: 1h-1100°C annealed (CA) 100(3.5/5) ML. (a)Fitting of the ellipsometric
functions (Is & Ic as a function of photon energy). The circles relate to experimental
spectra and the lines to the tting, and (b) The dispersion curves, n eV & k eV of the real
and imaginary parts of refractive indices respectively; n 1.95 eV = 2.343 is highlighted in the
gure.
4.5.2 X-Ray Reectivity
(b)
Figure 4.18: XRR spectrum of 100(3.5/5) ML.
The XRR technique was used to estimate the pattern thickness of the MLs.
Figure 4.18 shows the spectrum obtained from CA sample which is similar to the
one recorded from the as-grown sample (not shown). This gure clearly shows
the repetitive peaks relating to the alternated SRSO and SRSN patterns in our
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