Films minces à base de Si nanostructuré pour des cellules ...
Films minces à base de Si nanostructuré pour des cellules ... Films minces à base de Si nanostructuré pour des cellules ...
structural rearrangement of the matrix, while the xed TO Si−N position indicates the quality of the stochiometric layer desposited, within the sensitivity of the instrument. In SRSN sample, annealing leads to an increase in the LO Si−N and TO Si−N peak intensities accompanied with a shift towards higher wavenumbers. This could be explained by the phase separation process in Si-rich material with annealing. From the FTIR analysis, it can be seen that the structural properties of SRSN samples depend only upon the composition (refractive index) and not on the deposition approach. (c) Raman spectroscopy tel-00916300, version 1 - 10 Dec 2013 The Raman spectroscopy was performed on Si 3 N 4 and SRSN samples after annealing: STA (1min-1000°C) and CA (1h-1100°C). The Raman spectra obtained on these samples at dierent laser power densities ranging between 0.14-0.7 MW/cm 2 are shown in gures 4.12 and 4.13. The PL intensity of both the layers after STA and CA annealing were also recorded in the Raman set-up at a higher laser power density (1.4 MW/cm 2 ) and are shown in the inset. As mentioned in chapter 2, the excitation wavelength is 532 nm (2.33 eV) corresponding to the green laser and Raman shift of 0 cm −1 corresponds to 2.33 eV. The Stokes shift in eV is calculated from the relative Raman shifts recorded, and is given in the upper scale of the gure. Figure 4.12: Raman spectra obtained with dierent laser power densities from 1min- 1000°C and 1h-1100°C annealed Si 3 N 4 layers. The inset contains the corresponding PL spectra [laser power density = 1.4 MW/cm 2 and λ excitation =532 nm (2.33 eV)] in the Raman set-up. 102
tel-00916300, version 1 - 10 Dec 2013 Figure 4.13: Raman spectra obtained with dierent laser power densities from 1min- 1000°C and 1h-1100°C annealed SRSN layers. The inset contains the corresponding PL spectra [laser power density = 1.4 MW/cm 2 , λ excitation =532 nm (2.33 eV)] in the Raman set-up. The absence of broad a-Si TA and TO peaks around 150 and 480 cm −1 and sharp c-Si peak around 510 cm −1 in gure 4.12 conrms the stochiometry of this sample as indicated by ellipsometry measurements. An overall increase of the Raman curves is noticed in this gure, which can be related to the shoulder of the PL band. This argument is supported by the PL spectra obtained at a higher photon ux (laser power density = 1.4 MW/cm 2 ) in the Raman set-up, that shows emission centered around 2 eV (Inset of Fig. 4.12). Moreover, a larger shift of the Raman curve is noticed corresponding to a more intense emission in the CA sample than the STA layer. The two peaks around 150 and 480 cm −1 of a-Si is evidently seen in SRSN sample attesting the presence of excess Si (Fig. 4.13). The absence of sharp c-Si peak indicates that the material is only composed of amorphous clusters. This conrms that refractive index alone rules the material properties and not the deposition approach, since according to our previous arguments with n 1.95eV = 2.32, we are below the threshold of forming nanocrystals. 103
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tel-00916300, version 1 - 10 Dec 2013<br />
Figure 4.13: Raman spectra obtained with dierent laser power <strong>de</strong>nsities from 1min-<br />
1000°C and 1h-1100°C annealed SRSN layers. The inset contains the corresponding PL<br />
spectra [laser power <strong>de</strong>nsity = 1.4 MW/cm 2 , λ excitation =532 nm (2.33 eV)] in the Raman<br />
set-up.<br />
The absence of broad a-<strong>Si</strong> TA and TO peaks around 150 and 480 cm −1 and sharp<br />
c-<strong>Si</strong> peak around 510 cm −1 in gure 4.12 conrms the stochiometry of this sample as<br />
indicated by ellipsometry measurements. An overall increase of the Raman curves<br />
is noticed in this gure, which can be related to the shoul<strong>de</strong>r of the PL band. This<br />
argument is supported by the PL spectra obtained at a higher photon ux (laser<br />
power <strong>de</strong>nsity = 1.4 MW/cm 2 ) in the Raman set-up, that shows emission centered<br />
around 2 eV (Inset of Fig. 4.12). Moreover, a larger shift of the Raman curve is<br />
noticed corresponding to a more intense emission in the CA sample than the STA<br />
layer.<br />
The two peaks around 150 and 480 cm −1 of a-<strong>Si</strong> is evi<strong>de</strong>ntly seen in SRSN sample<br />
attesting the presence of excess <strong>Si</strong> (Fig. 4.13). The absence of sharp c-<strong>Si</strong> peak<br />
indicates that the material is only composed of amorphous clusters. This conrms<br />
that refractive in<strong>de</strong>x alone rules the material properties and not the <strong>de</strong>position<br />
approach, since according to our previous arguments with n 1.95eV = 2.32, we are<br />
below the threshold of forming nanocrystals.<br />
103