Films minces à base de Si nanostructuré pour des cellules ...

tel-00916300, version 1 - 10 Dec 2013
4.10 FTIR spectra of SiN x monolayers recorded in Brewster incidence.
The table of sub-gure (a) shows the peak positions of LO Si−N and
TO Si−N modes obtained by gaussian curve tting. . . . . . . . . . . . 101
4.11 Eect of annealing on the structural properties as investigated by
Brewster and normal incidence FTIR spectra on (a) Si 3 N 4 and (b)
SRSN. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
4.12 Raman spectra obtained with dierent laser power densities from
1min-1000°C and 1h-1100°C annealed Si 3 N 4 layers. The inset contains
the corresponding PL spectra [laser power density = 1.4 MW/cm 2 and
λ excitation =532 nm (2.33 eV)] in the Raman set-up. . . . . . . . . . . . 102
4.13 Raman spectra obtained with dierent laser power densities from
1min-1000°C and 1h-1100°C annealed SRSN layers. The inset contains
the corresponding PL spectra [laser power density = 1.4 MW/cm 2
, λ excitation =532 nm (2.33 eV)] in the Raman set-up. . . . . . . . . . . 103
4.14 Eect of annealing on photoluminescence of Si 3 N 4 and SRSN layers.
(λ excitation =488 nm and laser power density= 10 W/cm 2 ). . . . . . . . 104
4.15 Absorption coecient spectra of Si 3 N 4 and SRSN samples. . . . . . . 105
4.16 As-grown 100(3.5/5) ML. (a)Fitting of the ellipsometric functions (Is
& Ic as a function of photon energy). The circles relate to experimental
spectra and the lines to the tting, and (b) The dispersion
curves, n eV & k eV of the real and imaginary parts of refractive indices
respectively; n 1.95 eV = 2.137 is highlighted in the gure. . . . . 107
4.17 1h-1100°C annealed (CA) 100(3.5/5) ML. (a)Fitting of the ellipsometric
functions (Is & Ic as a function of photon energy). The circles
relate to experimental spectra and the lines to the tting, and (b)
The dispersion curves, n eV & k eV of the real and imaginary parts of
refractive indices respectively; n 1.95 eV = 2.343 is highlighted in the
gure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 108
4.18 XRR spectrum of 100(3.5/5) ML. . . . . . . . . . . . . . . . . . . . . 108
4.19 FTIR spectra (thick line) of as grown 100(3.5/5) ML. The spectra
is decomposed into six gaussians and four gaussians in the Brewtser
incidence and normal incidence spectra respectively. . . . . . . . . . 109
4.20 FTIR spectra of as-grown and CA 100(3.5/5) ML. . . . . . . . . . . 110
4.21 Surface microstructure of as-grown and 1h-1100°C annealed (CA)
100(3.5/5) ML. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111
4.22 XRD spectra of as-grown and CA 100(3.5/5) ML. . . . . . . . . . . . 111
4.23 TEM images of CA 100(3.5/5) ML. . . . . . . . . . . . . . . . . . . . 112
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