Wüest M. 51 Wykes M. 82 Yamaguchi M. 17 Ybarra G. 129 Yubero F ...
Wüest M. 51 Wykes M. 82 Yamaguchi M. 17 Ybarra G. 129 Yubero F ...
Wüest M. 51 Wykes M. 82 Yamaguchi M. 17 Ybarra G. 129 Yubero F ...
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JUNE 28 WEDNESDAY MORNING<br />
RIVA-SS-WeM-OR.2 PLANAR MAGNETRON DISCHARGE. AN EXPERIMENTAL<br />
PROFILE ANALYSIS OF THE TARGET EROSION BASED ON A TWO-DIMENSIONAL<br />
FLUID MODEL IN THE STEADY STATE. M. L. Escrivão, P. J. S. Pereira*, M. R.<br />
Teixeira and M. J. P. Maneira. CeFITec, Departa-mento de Física, Faculdade de Ciências e Tecnologia<br />
da Universidade Nova de Lisboa, Quin-ta da Torre, 2<strong>82</strong>9-<strong>51</strong>6, Caparica, Portugal. * Also in<br />
Área Científica da Matemática, Instituto Superior de Engenharia de Lisboa, Rua Conselheiro<br />
Emídio Navarro, 1949-014 Lisboa, Portugal<br />
.<br />
In the present work the erosion depth is measured along a diameter of a circular magnetron target.<br />
The horizontal and vertical components of the magnetic induction are measured at points of the<br />
plasma that are vertically above this diameter and at different distances from the target.<br />
The experimental profile of the target erosion is analysed on the basis of the plasma density distribution<br />
near the target which is obtained using a two-dimensional fluid model in the steady state.<br />
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