OUTGASSING OF HYDROGEN M. Leisch

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Institute of Solid State Physics Passive barriers Deposited thin films (Al2O3, BN, TiN, ZrO etc.) should entirely block Hydrogen outgassing Experimental results have shown that only partial reduction of the flux is attained. Attributed to defects on the coating (pinholes) Pinhole gas throughput is strongly enhanced by lateral diffusion Professor Manfred <strong>Leisch</strong> Horst Cerjak, 19.12.2005 63rd IUVSTA Workshop Avila September 17, 2010 55
Institute of Solid State Physics Active barriers Active barriers absorb H exothermically (negative solution enthalpy). They should absorb the H atoms coming from the substrate. Application of non evaporable getter (NEG) layers e.g. sputter-deposited Ti-Zr-V alloys. Potentiality of active barriere is obtained only after surface activation (activation e.g. 24h@180°C). Professor Manfred <strong>Leisch</strong> Horst Cerjak, 19.12.2005 63rd IUVSTA Workshop Avila September 17, 2010 56
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OUTGASSING OF HYDROGEN M. Leisch

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