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OUTGASSING OF HYDROGEN M. Leisch

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Institute of Solid State Physics<br />

Air bakeout<br />

Such processing is reported to decrease hydrogen diffusion<br />

rate by 10 3 times (D.G. Bills, JVST 6(1969)166)<br />

Air bakeout 38h@450° C and in-situ bakeout 168h@150°C<br />

(Bernardini et al.) results in:<br />

Question arises is benefit of treatment due to hydrogen<br />

depletion or not?<br />

TDS on air baked samples show H peak shift<br />

Hydrogen trapped by oxide layer<br />

Extraction measurements gives reason for H depletion<br />

Professor Manfred <strong>Leisch</strong> Horst Cerjak, 19.12.2005 63rd IUVSTA Workshop Avila September 17, 2010<br />

54

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