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OUTGASSING OF HYDROGEN M. Leisch

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Institute of Solid State Physics<br />

Thermal Desorption Spectroscopy<br />

Useful technique to provide insight on thermodynamics and kinetics of gas –<br />

surface reactions (surface states, sticking coefficient, activation energy)<br />

[J.-P. Bacher et al. JVST A21(2003)167]<br />

TDS study (up to 1200°C) on different SS types and treatments (vac<br />

firing, air bake, vac bake) gives reason for oxide-layer traps, lattice<br />

defects<br />

Professor Manfred <strong>Leisch</strong> Horst Cerjak, 19.12.2005 63rd IUVSTA Workshop Avila September 17, 2010<br />

14

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