Untitled - IAP/TU Wien - Technische Universität Wien
Untitled - IAP/TU Wien - Technische Universität Wien
Untitled - IAP/TU Wien - Technische Universität Wien
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71st IUVSTA Workshop<br />
A R XPS on Surface Pre-Treatments for LiNbO 3 SAW substrate<br />
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The analysis of surfaces/interfaces and thin films is vital for the improvement of surface acoustic wave<br />
(SAW) devices. Such modern devices are characterised by the trend to higher frequencies, power densities<br />
and new applications. Therefore, a shrinking of the dimensions is necessary but hardly possible to achieve<br />
with standard Al based metallisation due to increased stress-induced damaging (acoustomigration). Better<br />
results can be obtained by highly textured metallisations which were recently developed [1,2]. In this context<br />
an additional barrier interlayer is necessary and a pre-treatment of the substrate. Furthermore, a Variation of<br />
the deposition parameters ar an additional heat treatment might be of great interest.<br />
This work gives an overview about studies of the effect of surface preparation at LiNbO 3 for a Ta<br />
deposition used as barrier material. A radio-frequent plasma and a focused ion beam are applied for surface<br />
treatment; a dc-sputter process is used for the deposition of Ta. An e-beam evaporation system is used for the<br />
<br />
mainly by means of X-ray photoelectron spectroscopy (XPS) directly coupled to a preparation chamber<br />
(quasi in situ). Applying the angle-resolved XPS method (AR-XPS), in-depth information can be obtained<br />
without sputtering using an improved mathematical approach [3-5].<br />
Funding of the work by DFG (Grant No. .-#**:;#is acknowledged.<br />
References<br />
[1] H. Schmidt, S. Menzel, M. Weihnacht, R. Kunze, Ultrasonics Symposium 2001, IEEE (2001), vol. 1,<br />
97-100<br />
[2] M. Spindler, S.B. Menzel, C. Eggs, J. Thomas, T. Gemming, J. Eckert, Micro. Engn. 85 (2008),<br />
2055-2058<br />
[3] M. Kozlowska, R. Reiche, S. Oswald, H. Vinzelberg, R. Hübner, K. Wetzig, Surf. Interface Anal. 36/13<br />
(2004) 1600<br />
[4] P. J. Cumpson, J. Electron. Spectrosc. Relat. Phenom. 73/1 (1995) 25<br />
[5] S. Oswald, M. Zier, R. Reiche, K. Wetzig, Surf. Interface Anal. 38/4 (2006) 590<br />
43