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71st IUVSTA Workshop Monte Carlo simulation of supersurface electron scattering effects Mihaly Novak Institute for Nuclear Research, Hungarian Academy of Sciences H-4026 Debrecen, Bem tér 18/c, Hungary *mihaly.novak@gmail.com Supersurface electron scattering, i.e. electron energy losses and associated deflections in vacuum above the surface, was investigated by Monte Carlo simulation in reflection electron energy-loss (REELS) setup. These theoretical calculations predicted a strong structure in the detected supersurface inelastic scattering probability that was proven by experiments in case of Au sample leading to the unambiguous identification of the vacuum side electron scattering in reflection experiments [1]. These deflections, in vacuum side surface plasmon excitations, can establish a link between the detected vacuum side surface loss intensities and the differential elastic scattering cross section (DECS) resulting in the observable structure. The details and consequences of this supersurface electron scattering will be presented together with a Monte Carlo simulation study on the energy, geometry and material dependence of these complex phenomena. References [1] W. S. M. Werner, M. Novak, F. Salvat-Pujol, J. Zemek, P. Jiricek, Phy. Rev. Letters 110 (2013) 086110 21
Nanostructure Characterisation by Electron Beam Techniques Monte Carlo simulation of secondary electron emission in the low-energy domain. Application to the microelectronics. !"#$%&%'()"*'$( !"#$%&'()'*+'",%-./,01%,#1%-.21%.314*5#,#'1",+.6)'$")$.7/!6389. . :;
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