Thermodynamics and Transport Model of Charge ... - IEEE Xplore

BOULAIS et al.: THERMODYNAMICS AND TRANSPORT MODEL OF CHARGE INJECTION IN SILICON 2735
devices under non-steady-state conditions,” Phys. Rev. B, Solid State,
vol. 8, no. 8, pp. 3865–3874, Oct. 15, 1973.
[17] P. Kireev, Semiconductor Physics. Moscow, Russia: MIR Publisher,
1975.
[18] R. Pierret, Advanced Semiconductor Fundamentals, 2nd ed. Englewood
Cliffs, NJ: Prentice-Hall, 2002.
[19] J.-Y. Degorce, J.-N. Gillet, F. Magny, and M. Meunier, “Threedimensional
transient temperature field model for laser annealing,”
J. Appl. Phys., vol. 97, no. 3, 033 520, Jan. 2005.
[20] E. Takasuka et al., “Emissivity of liquid silicon in visible and infrared
regions,” J. Appl. Phys., vol. 81, no. 9, p. 6384, May 1997.
[21] R. T. Williams, M. N. Kabler, J. P. Long et al., “Electron energy distribution
during pulsed laser annealing and damage of silicon,” Laser and
Electron-Beam Interaction With Solid, pp. 97–102, 1982.
[22] V. M. Glazov and V. B. Koltsov, “Changes in the effective mass and
mobility of electrons as a result of melting of germanium and silicon,”
Sov. Phys. Semicond., vol. 18, no. 10, pp. 1153–1156, 1984.
[23] S. Chen et al., “Melting and surface deformation in pulsed laser surface
micromodification of Ni-P disks,” J. Heat Transf., vol. 122, no. 1, pp. 107–
112, Feb. 2000.
[24] T. Schwarz-Selinger et al., “Micron-scale modifications of Si surface
morphology by pulsed-laser texturing,” Phys. Rev. B, Condens. Matter,
vol. 64, no. 15, p. 155 323, Oct. 2001.
Jean-Yves Degorce received the M.A.Sc. degree in
solid state physics from the University of Paris VI,
Paris, France, in 1989 and the Ph.D. degree in laser
matter interaction from the École Polytechnique de
Montréal, Montreal, QC, Canada, and the Université
de Bordeaux, Bordeaux, France, in 2000.
From 2000 to 2005, he was a Lecturer and
Associate Researcher in laser processing with the
Laser Processing Laboratory, Engineering Physics
Department, École Polytechnique de Montréal. He
is currently a Professor in classe préparatoire aux
grandes écoles with the Université de Bordeaux. His current research interests
include micro- and nanothermal modeling.
Guillaume Wild received the Diploma degree in
electrical engineering from the Ecole Superieure
d’Electricite, Gif Sur Yvette, France, in 2002 and
the M.A.Sc. degree from the École Polytechnique de
Montréal, Montreal, QC, Canada, in 2005, under the
supervision of Profs. Y. Savaria and M. Meunier.
He is currently with Siemens, Amberg, Germany.
Étienne Boulais received the B.Ing. degree in engineering
physics from the École Polytechnique de
Montréal, Montreal, QC, Canada, in 2007, where
he has been working toward the Ph.D. degree
in the Laser Processing Laboratory, Engineering
Physics Department, under the supervision of
Prof.M.Meunier.
His research topic is in the field of the simulation
of laser–matter interaction.
Yvon Savaria (S’77–M’86–SM’97–F’08) received
the B.Ing. and M.A.Sc. degrees in electrical engineering
from the École Polytechnique de Montréal,
Montreal, QC, Canada, in 1980 and 1982, respectively,
and the Ph.D. degree in electrical engineering
from McGill University, Montreal, in 1985.
Since 1985, he has been with the École Polytechnique
de Montréal, where he is currently a Professor
and the Director of the microelectronics and
microsystems research group in the Electrical Engineering
Department. He has carried out work in
several areas related to microelectronic circuits and microsystems.
Vincent Binet received the Diploma degree in
electrical engineering from the Ecole Superieure
d’Electricite, Gif Sur Yvette, France, and the
M.A.Sc. degree in microelectronics from the École
Polytechnique de Montréal, Montreal, QC, Canada,
in 2007, under the supervision of Profs. Y. Savaria
and M. Meunier.
He is currently with STMicroelectronics,
Grenoble, France, in the IP advanced team in
audio R&D.
Michel Meunier received the B.Ing. and M.A.Sc.
degrees in engineering physics from the École Polytechnique
de Montréal, Montreal, QC, Canada, in
1978 and 1980, respectively, and the Ph.D. degree
from the Massachusetts Institute of Technology,
Cambridge, in 1984.
He is currently the Director of the Laser Processing
Laboratory, Engineering Physics Department,
École Polytechnique de Montréal. For close to
30 years, he has been involved in laser processing
of various materials and he has published over
260 papers in this field.
Dr. Meunier is a Canadian Research Chair in laser micro/nanoengineering of
materials.