PT Turbomolecular Pump Systems Calibration Systems - Granzow
PT Turbomolecular Pump Systems Calibration Systems - Granzow
PT Turbomolecular Pump Systems Calibration Systems - Granzow
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Technical Data<br />
<strong>PT</strong>-FLEX<br />
<strong>Turbomolecular</strong> pump<br />
High vacuum connection<br />
Backing pumps<br />
Cooling<br />
Max. current requirements<br />
(dependent on forepump)<br />
Controller<br />
DN<br />
V AC<br />
Phase<br />
Hz<br />
A<br />
TURBOVAC TW 70 TURBOVAC TW 250 S TURBOVAC TW 300<br />
63 ISO-K 100 ISO-K 100 ISO-K<br />
63 CF 100 CF 100 CF<br />
160 ISO-K<br />
SCROLLVAC SC 5 D SCROLLVAC SC 5 D SCROLLVAC SC 5 D<br />
SCROLLVAC SC 15 D SCROLLVAC SC 15 D<br />
Air Air (water option) Air (water option)<br />
115 115 115<br />
1 1 1<br />
50/60 50/60 50/60<br />
15 15 15<br />
TSC Turbo System Controller<br />
AUTO operation with gauge selection or Manual<br />
TW monitoring status<br />
Gauge sensor display with smart gauge selection<br />
Accessory Control<br />
Inlet, foreline and roughing valve<br />
Vent/purge valve<br />
Flange heater (CF flange only)<br />
Ion sensor degas<br />
Basic System Controller<br />
Manual Start/Stop operation<br />
Accessory Control<br />
Vacuum valve<br />
Vent valve<br />
Flange heater (CF flange only)<br />
Ion sensor degas<br />
Column height adjustment (option)<br />
Dimensional drawing for the <strong>PT</strong>-Flex (manual post)<br />
Dimensional drawing (front view) for the <strong>PT</strong>-Flex<br />
(powered support)<br />
Oerlikon Leybold Vacuum Full Line Catalog<br />
31 C10
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