Nr 1 - ITME

Analysis of blind microvias forming process...
No. of test
15
16
17
18
Series of tests
1 2 3
0 150 0 150 0 150
22 128 24 126 25 127
0 150 0 150 0 150
28 122 29 121 31 119
0 150 0 150 0 150
33 119 42 114 40 116
0 150 0 150 0 150
25 125 24 126 23 127
Fig. 3. Methodology of measurements of microvia dimensions
Rys. 3. Metodologia wykonywania pomiarów wymiarów geometrycznych mikrootworów
The performing of cross-section exactly in the diameter of microvia is very
difficult. The size of microvia diameter observed on cross-sections was in the range
of 147 – 151 µm (d W min
– d W max
) .
. It means that the plane of cross-section could be
64