Nr 1 - ITME

J. Borecki, J. Felba, A. Wymysłowski
The estimation of microvias quality was based on four criteria, which are described
below. The criterion 1 and 2 were defined on the base of dimensions of
microvias observed on cross-sections. The results of measurements of microvias
dimensions are presented in Tab. 3, accordingly with methodology presented in
Fig. 3. The measurements were made with precision ± 1 µm.
Table 3. Results of measurements of microvia dimensions.
Tabela 3. Wyniki pomiarów wymiarów geometrycznych mikrootworu.
No. of test
1
2
3
4
5
6
7
8
9
10
11
12
13
14
Series of tests
1 2 3
0 150 0 150 0 150
47 121 46 122 45 120
0 150 0 150 0 150
34 118 35 121 35 120
0 150 0 150 0 150
13 137 12 138 12 138
0 150 0 150 0 150
16 134 17 133 15 134
0 150 0 150 0 150
31 119 33 122 31 119
0 150 0 150 0 150
35 108 36 116 36 106
0 150 0 150 0 150
22 128 25 126 23 127
0 150 0 150 0 150
26 125 24 126 25 125
0 150 0 150 0 150
32 118 33 115 32 112
0 150 0 150 0 150
17 111 15 111 19 111
0 150 0 150 0 150
17 133 17 133 16 134
0 150 0 150 0 150
49 119 51 119 48 118
0 150 0 150 0 150
21 124 26 124 23 123
0 150 0 150 0 150
48 104 45 105 48 102
63