Nr 1 - ITME
Nr 1 - ITME
Nr 1 - ITME
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J. Borecki, J. Felba, A. Wymysłowski<br />
The estimation of microvias quality was based on four criteria, which are described<br />
below. The criterion 1 and 2 were defined on the base of dimensions of<br />
microvias observed on cross-sections. The results of measurements of microvias<br />
dimensions are presented in Tab. 3, accordingly with methodology presented in<br />
Fig. 3. The measurements were made with precision ± 1 µm.<br />
Table 3. Results of measurements of microvia dimensions.<br />
Tabela 3. Wyniki pomiarów wymiarów geometrycznych mikrootworu.<br />
No. of test<br />
1<br />
2<br />
3<br />
4<br />
5<br />
6<br />
7<br />
8<br />
9<br />
10<br />
11<br />
12<br />
13<br />
14<br />
Series of tests<br />
1 2 3<br />
0 150 0 150 0 150<br />
47 121 46 122 45 120<br />
0 150 0 150 0 150<br />
34 118 35 121 35 120<br />
0 150 0 150 0 150<br />
13 137 12 138 12 138<br />
0 150 0 150 0 150<br />
16 134 17 133 15 134<br />
0 150 0 150 0 150<br />
31 119 33 122 31 119<br />
0 150 0 150 0 150<br />
35 108 36 116 36 106<br />
0 150 0 150 0 150<br />
22 128 25 126 23 127<br />
0 150 0 150 0 150<br />
26 125 24 126 25 125<br />
0 150 0 150 0 150<br />
32 118 33 115 32 112<br />
0 150 0 150 0 150<br />
17 111 15 111 19 111<br />
0 150 0 150 0 150<br />
17 133 17 133 16 134<br />
0 150 0 150 0 150<br />
49 119 51 119 48 118<br />
0 150 0 150 0 150<br />
21 124 26 124 23 123<br />
0 150 0 150 0 150<br />
48 104 45 105 48 102<br />
63