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Analysis of blind microvias forming process... Table 2. Orthogonal array L18 type. Tabela 2. Tablica ortogonalna typu L18. Test No. A B C D E F G H 1 1 1 1 1 1 1 1 1 2 1 1 2 2 2 2 2 2 3 1 1 3 3 3 3 3 3 4 1 2 1 1 2 2 3 3 5 1 2 2 2 3 3 1 1 6 1 2 3 3 1 1 2 2 7 1 3 1 2 1 3 2 3 8 1 3 2 3 2 1 3 1 9 1 3 3 1 3 2 1 2 10 2 1 1 3 3 2 2 1 11 2 1 2 1 1 3 3 2 12 2 1 3 2 2 1 1 3 13 2 2 1 2 3 1 3 2 14 2 2 2 3 1 2 1 3 15 2 2 3 1 2 3 2 1 16 2 3 1 3 2 3 1 2 17 2 3 2 1 3 1 2 3 18 2 3 3 2 1 2 3 1 (a) (b) (c) (d) Fig. 2. Examples of cross-sections of 150 µm microvias formed in experiment. Rys. 2. Przykłady zgładów metalograficznych mikrootworów o średnicy 150 µm formowanych podczas eksperymentu. 62
J. Borecki, J. Felba, A. Wymysłowski The estimation of microvias quality was based on four criteria, which are described below. The criterion 1 and 2 were defined on the base of dimensions of microvias observed on cross-sections. The results of measurements of microvias dimensions are presented in Tab. 3, accordingly with methodology presented in Fig. 3. The measurements were made with precision ± 1 µm. Table 3. Results of measurements of microvia dimensions. Tabela 3. Wyniki pomiarów wymiarów geometrycznych mikrootworu. No. of test 1 2 3 4 5 6 7 8 9 10 11 12 13 14 Series of tests 1 2 3 0 150 0 150 0 150 47 121 46 122 45 120 0 150 0 150 0 150 34 118 35 121 35 120 0 150 0 150 0 150 13 137 12 138 12 138 0 150 0 150 0 150 16 134 17 133 15 134 0 150 0 150 0 150 31 119 33 122 31 119 0 150 0 150 0 150 35 108 36 116 36 106 0 150 0 150 0 150 22 128 25 126 23 127 0 150 0 150 0 150 26 125 24 126 25 125 0 150 0 150 0 150 32 118 33 115 32 112 0 150 0 150 0 150 17 111 15 111 19 111 0 150 0 150 0 150 17 133 17 133 16 134 0 150 0 150 0 150 49 119 51 119 48 118 0 150 0 150 0 150 21 124 26 124 23 123 0 150 0 150 0 150 48 104 45 105 48 102 63
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INSTYTUT TECHNOLOGII MATERIAŁÓW E
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