EE 410 / Saraswat Handout #3 - Stanford Nanofabrication Facility
EE 410 / Saraswat Handout #3 - Stanford Nanofabrication Facility
EE 410 / Saraswat Handout #3 - Stanford Nanofabrication Facility
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<strong>EE</strong><strong>410</strong> CMOS Process Run Sheet Lot ID:____________<br />
STEP<br />
Visual<br />
6.180<br />
microscope<br />
- INSPECTION<br />
inspection. Check for<br />
defects and<br />
alignment/exposure quality.<br />
Wafers inspected ____ ____ ____ ____ ____<br />
Date _________ Time _________ Operator _________<br />
Comments ____________________________________<br />
STEP 6.190 - POSTBAKE<br />
Bake in the 110 C postbake oven for 30 minutes.<br />
Date _________ Time _________ Operator<br />
_________<br />
Comments_____________________________________<br />
REWORK DONE? yes no<br />
Wafers reworked: _______________________________<br />
If yes, attach REWORK sheet here.<br />
W<strong>EE</strong>K #6: LAB SECTION<br />
23. Metal Etch<br />
STEP 6.200 - POSTBAKE<br />
Bake in the 110 C postbake oven for 30 minutes.<br />
Date _________ Time _________ Operator _________<br />
Comments_____________________________________<br />
STEP 6.210 - METAL ETCH<br />
p5000etch, Recipe CH A. METAL, ~120-150”<br />
Date_________ Time _________ Operator _________<br />
Comments_____________________________________<br />
STEP 6.220 - ETCH PASSIVATION wbmetal, dump-rinser for 6 cycles, spin rinse dry<br />
Date_________ Time _________ Operator _________<br />
Comments_____________________________________ Step 6.240 –STD METAL LAYER RESIST STRIP: ASH<br />
gasonics, program 013<br />
Date_________ Time _________ Operator _________<br />
Comments_____________________________________ W<strong>EE</strong>K # 6: FINAL I PREP PARATION<br />
24. 24 Anneal/Alloy<br />
nneal/Alloy<br />
STEP 6.260 – STD METAL LAYER PRE-FURNACE CLEAN<br />
Make sure the wafers are dry before putting into bath.<br />
wbmetal, PRS1000, @ 40°C, 10’, rinse, spin dry<br />
Date_________ Time _________ Operator<br />
_________<br />
Comments_____________________________________<br />
STEP 6.300 - ANNEAL AND ALLOY<br />
45’ forming gas (4% H2 in N2) @ 400°C<br />
tylanfga Program FGA400<br />
Date_________ Time _________ Operator _________<br />
Comments_____________________________________<br />
TEST!<br />
Use backside for additional comments. Make sure to annotate date, time & process step. Revised 1/11/07.<br />
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