BOC Edwards Auto 306 E-beam Evaporator Operating Instructions
BOC Edwards Auto 306 E-beam Evaporator Operating Instructions
BOC Edwards Auto 306 E-beam Evaporator Operating Instructions
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Deposition Rate (nm/s)<br />
Figure 1 - Evaporation Behavior of Titanium at 4.5kV (8mm pole piece)<br />
0.08<br />
0.07<br />
0.06<br />
0.05<br />
0.04<br />
0.03<br />
0.02<br />
0.01<br />
0<br />
Data by Sean Essex<br />
-0.01<br />
0 10 20 30 40 50 60 70 80 90 100<br />
Beam Current (mA)<br />
Process Consumables<br />
• Liners (Graphite, Intermetallic): 4cc, Super Conductor Materials Inc.<br />
• Copper: Kurt J. Lesker, Pellets 1/8”x1/8”, 99.99%, EVMCU40EXEB or CERAC<br />
Inc., 3mmx3mm pellets, 99.99%, C-2073<br />
• Gold: Kurt J. Lesker,
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