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INSTITUTE OF PHYSICS PUBLISHING NANOTECHNOLOGY<br />

Nanotechnology 16 (2005) 779–784 doi:10.1088/0957-4484/16/6/027<br />

<strong>Fabrication</strong> <strong>and</strong> <strong>sint</strong>ering effect on the<br />

morphologies <strong>and</strong> conductivity of nano-Ag<br />

particle films by the spin coating method<br />

Kan-Sen Chou 1 ,Kuo-Cheng Huang <strong>and</strong> Hsien-Hsuen Lee<br />

Department of Chemical Engineering, National Tsing Hua University, Hsinchu 30013,<br />

Taiwan<br />

E-mail: kschou@che.nthu.edu.tw<br />

Received 12 November 2004, in final form 3 March 2005<br />

Published 5 April 2005<br />

Online at stacks.iop.org/Nano/16/779<br />

Abstract<br />

By adjusting the rotating speed <strong>and</strong> colloidal concentration in the spin<br />

coating of silver nanoparticles onto a glass substrate, the coating density<br />

could be varied from 1.5 × 10 −6 to 1.1 × 10 −4 gcm −2 ,orinotherwords<br />

from a dispersed distribution to multi-layered close packed films. The<br />

coating density was found to be proportional to the volume fraction of silver<br />

colloids <strong>and</strong> inversely to the rotating speed to the 0.442 power. The<br />

multi-layered films were further investigated for <strong>sint</strong>ering behaviour. Our<br />

results indicated that the film started to exhibit a noticeable <strong>sint</strong>ering effect<br />

at about 100 ◦ C, <strong>and</strong> at the same time it became electrically conductive. As<br />

the treatment temperature increased further, the film resistivity reached a<br />

minimum value at 250 ◦ C<strong>and</strong> finally became insulating again when the<br />

temperature was over 400 ◦ C due to silver coalescence into large particles<br />

<strong>and</strong>breaking up of the conductive paths. Smaller silver nanoparticles,<br />

however, would exhibit a similar phenomenon but at lower temperatures.<br />

1. Introduction<br />

In recent years, nanotechnology has risen in importance in<br />

various fields due to the special characteristics of nanomaterials<br />

or nanostructures. For example, metal nanoparticles can<br />

be used as the catalysts to grow nanowires. Transitionmetal<br />

nanoparticles are also useful in fabricating highdensity<br />

magnetic recording media [1]. Besides, nanoparticles<br />

possessing surface plasma resonance can also be used as<br />

biosensors [2]. In the application of nanoparticles, one of<br />

the fundamental issues is how to distribute nanoparticles<br />

uniformly on the substrate with precise control of density [1].<br />

For carbon nanotube growth, nickel nanoparticles are used as<br />

the catalysts <strong>and</strong> a certain distance is needed to prevent the<br />

shielding effect between these grown carbon nanotubes [3]<br />

while maintaining sufficient density. However, in other<br />

applications such as high-density magnetic recording media,<br />

close packing or even a multi-layered structure is required [4].<br />

There are several methods proposed for dispersing<br />

nanoparticles on a substrate. In many studies, the self-<br />

1 Author to whom any correspondence should be addressed.<br />

assembly technique was employed utilizing the chemical<br />

interaction between nanoparticles <strong>and</strong> the substrate surface.<br />

For example, organic molecules containing thiol (–SH) or<br />

amine (–NH2) can be adsorbed on the gold surface <strong>and</strong><br />

form a well organized self-assembly monolayer on the<br />

substrate [5]. Another popular method is lithography, which<br />

is able to produce a well ordered pattern <strong>and</strong> accurately<br />

controlled density. However, this method requires a lot<br />

of processing procedures <strong>and</strong> is relatively complicated <strong>and</strong><br />

expensive. Therefore, a simpler <strong>and</strong> cheaper method by the<br />

traditional spin coating has recently been proposed [1, 4–<br />

7] as an alternative. By this technique, different coating<br />

densities could be achieved by controlling the rotating speed<br />

<strong>and</strong> colloidal concentration. Nevertheless, in the literature<br />

very few systematic studies on the effects of the processing<br />

(coating) parameters of nanoparticles had been reported. In<br />

this work, due to our ability to obtain well dispersed nano-silver<br />

colloids in high concentrations,thecoating behaviour of nanosilver<br />

particles are therefore investigated over an extensive<br />

range of Ag concentrations <strong>and</strong> rotating speeds to obtain Ag<br />

coatings having different densities. Subsequently, an empirical<br />

equation was determined to correlate coating density with Ag<br />

0957-4484/05/060779+06$30.00 © 2005 IOP Publishing Ltd Printed in the UK 779


K-S Chou et al<br />

concentration <strong>and</strong> rotating speed. In addition, the <strong>sint</strong>ering<br />

of coated Ag colloids <strong>and</strong> its electrical resistivity are also<br />

investigated as a function of heating temperature.<br />

2. Experimental details<br />

2.1. Synthesis of Ag nanoparticles<br />

Ag nanoparticles were synthesized by the chemical reduction<br />

method; silver ion was reduced by formaldehyde under the<br />

presence of protecting agent, polyvinyl pyrrolidone (PVP;<br />

MW = 50 000, Acros Organics, USA) [8, 9]. The silver<br />

colloid was then washed to remove excess protecting agent<br />

<strong>and</strong> then re-dispersed in de-ionized water to obtain the working<br />

suspension. Details of experimental procedure can be found<br />

elsewhere [8]. The actual silver content in the suspension<br />

was determined by first dissolving it with nitric acid <strong>and</strong><br />

then by atomic absorption spectroscopy (AAS; SpectraAA-30,<br />

Varian, USA) after appropriate dilution. Quantities of residual<br />

PVP were estimated from results of thermal gravimetric<br />

analysis <strong>and</strong> morphology of silver colloids was observed by<br />

transmission electron microscopy (TEM, TECNAI 20, Philips,<br />

The Netherl<strong>and</strong>s).<br />

2.2. Spin coating process<br />

Aglassslide (cut to 3 cm × 3cm,thickness 1–1.2 mm,<br />

FEA company, Taiwan) was first immersed in HNO3 solution<br />

(0.01 N, EP grade, Union Chemical, Taiwan) <strong>and</strong> then moved<br />

into acetone (EP grade, Union Chemical, Taiwan) in order to<br />

remove the particles <strong>and</strong> organic contaminants on the surface.<br />

After cleaning, the slide was air-dried at room temperature.<br />

In the coating process, 0.15 ml Ag colloid of a chosen<br />

concentration was placed on the slide <strong>and</strong> dispersed uniformly<br />

to the whole surface by a tip. Then the slide was rotated by the<br />

spinner (PM-490, Synrex, Taiwan) at different speeds for 30 s.<br />

The coated slide was dried in the air at room temperature. By<br />

adjusting the Ag colloid concentration, the Ag deposition on<br />

theslidecould be controlled from a monolayer well dispersed<br />

state, to monolayer close packing <strong>and</strong> finally to multi-layered<br />

structures.<br />

2.3. Coating density analysis<br />

Twomethods were utilized to determine the coating density<br />

of silver, namely the AAS method <strong>and</strong> image analysis of<br />

microscopic photos. For the AAS method, Ag nanoparticles<br />

deposited on the glass slide were dissolved by HNO3 solution<br />

(0.1 N, 10 ml) <strong>and</strong> subsequently analysed by atomic absorption<br />

spectroscopy (AAS) to determine the Ag quantity. The coating<br />

density could then be calculated by dividing the Ag quantity by<br />

the slide area. This number represented an overall average. As<br />

for the image analysis method, software (Image J, NIH, USA)<br />

was used to determine the number <strong>and</strong> diameter distribution<br />

of coated Ag nanoparticles within a few selected areas, <strong>and</strong><br />

thus coating density could be directly estimated from the SEM<br />

photograph. This number on the other h<strong>and</strong> represented a very<br />

small local region <strong>and</strong> was applied to dispersed distributions<br />

only. Results from both methods were compared to confirm<br />

the validity of the data <strong>and</strong> also to express the uniformity of<br />

the coating.<br />

780<br />

Figure 1. TEM image of silver nanoparticles.<br />

The thickness of multi-layered Ag coating was also<br />

measured by the microscopy (SEM, S-4700I, Hitachi, Japan).<br />

The roughness of the surface was determined by scanning<br />

probe microscopy (SPM, NanoScope E, Digital Instruments,<br />

USA).<br />

2.4. Sintering <strong>and</strong> resistivity measurements<br />

Ag coated glass slides (as a film of 82 nm thickness), using<br />

Ag suspension at 2.42 vol% (20.7 wt%) <strong>and</strong> rotating speed of<br />

6000 rpm, were heat-treated in air at various temperatures. The<br />

sample was heated to the desired temperature in 30 min <strong>and</strong><br />

kept at that temperature for another 30 min. Then the slide was<br />

naturally cooled in the oven until the temperature was below<br />

50 ◦ C. The surface morphology of the slide was observed<br />

by SEM <strong>and</strong> the resistivity was estimated by the four-probe<br />

method (C4S-54/5S, Cascade Microtech, USA).<br />

3. Results <strong>and</strong> discussion<br />

3.1. Ag nanoparticles characteristics<br />

The Ag nanoparticles used for the coating study were shown<br />

in figure 1. The average size was about 46 nm, but it also<br />

contained a few large particles of about 100 nm. The silver<br />

suspension exhibited yellow colour <strong>and</strong> showed a UV–vis<br />

absorption peak at 410 nm. The residual PVP quantity was<br />

estimated around 0.05 g/g Agforthis batch of sample.<br />

3.2. Coating morphology<br />

Figure 2 shows the Ag deposition from dispersed distribution<br />

to multi-layered close packing obtained by varying Ag colloid<br />

concentration at a constant rotating speed (6000 rpm). At<br />

low Agcolloid concentrations, the nanoparticles were well<br />

dispersed <strong>and</strong> separated. When the concentration was<br />

increased, the nanoparticles became gradually aggregated in<br />

the micro-scale but still remained roughly uniform on the<br />

macro-scale. Conceivably, under this situation, the liquid film<br />

might break into small droplets during the evaporation stage


<strong>Fabrication</strong> <strong>and</strong> <strong>sint</strong>ering effect on the morphologies <strong>and</strong> conductivity of nano-Ag particle films by the spin coating method<br />

0.15 vol.% 0.52 vol.%<br />

0.70 vol.% 1.33 vol.%<br />

1.85 vol.% 2.42 vol.%<br />

Figure 2. SEM photographs of Ag nanoparticle coating of different concentrations at 6000 rpm for 30 s.<br />

<strong>and</strong> hence caused the aggregation of particles within that small<br />

region. Finally, when the concentration increased further, the<br />

nano-silver particles packed to a multi-layered structure with<br />

ashiny surface, suggesting a relatively smooth surface. A<br />

representative SPM image is shown in figure 3(a), <strong>and</strong> the<br />

statistical mean roughness of the surface is about 5.5 nm, while<br />

the maximum height within this area is about 47.5 nm. This<br />

result is consistent with the SEM observations. For a multilayered<br />

coating, its coating density could also be determined<br />

from the thickness data by assuming close packing of particles,<br />

which was in general agreement with results from the AAS<br />

method.<br />

3.3. Parameters affecting the coating density<br />

Next shown in figure 4 is the comparison of results from<br />

both AAS <strong>and</strong> image analysis for low-coating-density cases,<br />

showingreasonable agreement. It therefore suggested that the<br />

coating obtained in thiswork was uniform. As a result, the<br />

data from the micro-scale (image analysis) agreed well with<br />

those from the macro-scale (AAS method).<br />

Shown in figure 5 are the correlations between coating<br />

density <strong>and</strong> Ag colloid concentration at different rotating<br />

speeds. In theory, the coating density is proportional to the<br />

Ag colloid concentration <strong>and</strong> the thickness of the Ag colloid<br />

liquid film during the spinning procedure. As for the film<br />

thickness, it is mainly decided by two factors: liquid viscosity<br />

<strong>and</strong> rotating speed. In our case, the viscosity did not change<br />

much with silver concentration <strong>and</strong> hence could be taken as<br />

constant. Therefore, the coating density could be controlled<br />

by varying Ag colloid concentration <strong>and</strong> rotating speed in our<br />

experiments, as indicated in figure 5.<br />

Because the coating density was mainly affected by the Ag<br />

colloid concentration <strong>and</strong> the rotating speed, the relationship<br />

781


K-S Chou et al<br />

Figure 3. (a) SPM image of the surface of Ag coating. The mean<br />

roughness of the surface is 5.5 nm. (b) Side-view of Ag coating<br />

(coating condition: Ag concentration 2.42 vol% <strong>and</strong> rotating speed<br />

6000 rpm). The top view of this coating is shown in figure 2.<br />

Image analysis<br />

1e-5<br />

8e-6<br />

6e-6<br />

4e-6<br />

2e-6<br />

0<br />

Coating density correlation<br />

R 2 = 0.80<br />

0 1e-6 2e-6 3e-6<br />

AAS method<br />

4e-6 5e-6 6e-6<br />

Figure 4. Correlations between AAS method <strong>and</strong> image analysis for<br />

the determination of coating density (under low-coating-density<br />

conditions).<br />

could be represented as<br />

D = αC β ω γ<br />

where D (g cm −2 )isthecoating density, C is the Ag colloid<br />

concentration (expressed asavolumefraction), <strong>and</strong> ω (rpm)<br />

is the rotating speed, with α, β <strong>and</strong> γ being the empirical<br />

constants. Since our results in figure 5 exhibited a linear<br />

782<br />

(a)<br />

(b)<br />

(1)<br />

Coating density (g/cm 2 )<br />

1.4e-4<br />

1.2e-4<br />

1.0e-4<br />

8.0e-5<br />

6.0e-5<br />

4.0e-5<br />

2.0e-5<br />

0.0<br />

-2.0e-5<br />

6000 rpm R 2 = 0.98<br />

4500 rpm R 2 = 0.99<br />

3000 rpm R 2 = 0.99<br />

1500 rpm R 2 = 0.99<br />

0.0 0.5 1.0 1.5 2.0 2.5 3.0<br />

Ag colloid concentration (vol.%)<br />

Figure 5. Coating density as a function of Ag colloid concentration<br />

at different rotating speeds.<br />

relationship to Ag concentration, <strong>and</strong> hence β was taken as<br />

unity. The final result was as follows (with R 2 = 0.97):<br />

D = 0.1265 × Cω −0.442 . (2)<br />

From spin-coating theory, if not considering the effect<br />

of evaporation, the thickness of liquid film is inversely<br />

proportional to the rotating speed, i.e., γ =−1[10]. However,<br />

when the evaporation is considered, the value of γ would be<br />

close to −0.5 depending on the volatility <strong>and</strong> concentration<br />

of solvent [11]. In this study, γ was approximately −0.44,<br />

suggesting that the evaporation must be important here.<br />

3.4. Sintering of the coated Ag nanoparticles<br />

The coated Ag nanoparticles (with a thickness of about 82 nm)<br />

were heated in an oven at different temperatures, <strong>and</strong> the<br />

resulting morphologies are shown in figure 6. It can be noted<br />

that Ag nanoparticles began to exhibit the <strong>sint</strong>ering effect at<br />

100 ◦ Corprobably even below this temperature, because the<br />

deposited particles started to exhibit conductivity after 70 ◦ C<br />

treatment. As the temperature increased, the Ag nanoparticles<br />

became coalesced together into a porous film due to the high<br />

mobility of silver atoms in these nanoparticles. When the<br />

temperature increased more, the voids of the porous film<br />

grew, <strong>and</strong> eventually, above 400 ◦ C, the silver film shrank<br />

into numerous large Ag particles <strong>and</strong> the conducting path was<br />

broken. Corresponding data for electrical resistivity are shown<br />

in figure 7.<br />

Before the heat treatment, the resistivity of deposited<br />

Ag particles was extremely large <strong>and</strong> could be considered<br />

as an insulated material. Presumably, at this stage, the Ag<br />

particles were still covered with a layer of the protective agent<br />

(PVP molecules) <strong>and</strong> were barely in contact with each other.<br />

When the heating temperature was 70 ◦ C, which might be<br />

sufficient for PVP molecules to move away from the particle<br />

surface to coalescence together <strong>and</strong> separate from the particles,<br />

the silver particles then touched each other <strong>and</strong> conducting<br />

electricity. Further heating would enlarge the contact area<br />

between particles <strong>and</strong> thus lower the resistivity. Due to the<br />

high activity of nanoparticles, the film resistivity reached a<br />

minimum value of 2.4 × 10 −5 cm after 250 ◦ Ctreatment as<br />

<strong>sint</strong>ering progressed. Further increase of heating temperature


<strong>Fabrication</strong> <strong>and</strong> <strong>sint</strong>ering effect on the morphologies <strong>and</strong> conductivity of nano-Ag particle films by the spin coating method<br />

(a) 100 o C (b) 200 o C<br />

(c) 250 o C (d) 300 o C<br />

(e) 350 o C (f) 400 o C<br />

Figure 6. SEM morphologies after heat treatment at different temperatures for 30 min: (a) 100 ◦ C; (b) 200 ◦ C; (c) 250 ◦ C; (d) 300 ◦ C;<br />

(e) 350 ◦ C; (f) 400 ◦ C.<br />

would continue the densification process of <strong>sint</strong>ering by<br />

decreasing the surface area <strong>and</strong> thus increasing particle size.<br />

At the same time, the voids within the film also combined<br />

into large pores. Consequently, the conductive silver networks<br />

were gradually broken, <strong>and</strong> the resistivity started to increase.<br />

At last, all the silver particles <strong>sint</strong>ered into larger <strong>and</strong> separated<br />

ones, <strong>and</strong> the film became insulating again.<br />

Also included in figure 7 are the results from another batch<br />

of nano-silver particles for comparison. The average size of<br />

thesecond-batch particles is about 37 nm (versus 46 nm of the<br />

first batch); besides, the distribution is narrower in the second<br />

batch. As a result, the film reached a minimum resistivity after<br />

200 ◦ Cheat treatment <strong>and</strong> lost conductivity after 300 ◦ C. Both<br />

temperatures were lower than the previous case, indicating the<br />

size effect of these silver particles.<br />

In view of the very low resistivities developed in these<br />

films <strong>and</strong> easy h<strong>and</strong>ling of the suspension, there is a good<br />

chance to successfully apply the inkjet printing technique to<br />

these silver nanoparticles for the manufacture of conducting<br />

lines. Also, the low-temperature treatment would enable<br />

the use of alternative polymeric substrates. However, more<br />

research is needed for their development.<br />

4. Conclusions<br />

In this work, systematic studies on the effect of Ag colloid<br />

concentration <strong>and</strong> the rotating speed on the coating density<br />

were made. It varied from a dispersed distribution to a<br />

crowded distribution <strong>and</strong> then to multi-layered close packing<br />

structures. An empirical correlation was established as D =<br />

0.1265 Cω −0.442 .Onecould also estimate particle-to-particle<br />

distance utilizing this equation for dispersed distribution<br />

situations. By heating an 82 nm coated film to above 70 ◦ C,<br />

it started to exhibit electrical conductivity <strong>and</strong> reached a<br />

783


K-S Chou et al<br />

Resistivity (Ω-cm)<br />

2.8e-5<br />

2.6e-5<br />

2.4e-5<br />

2.2e-5<br />

2.0e-5<br />

1.8e-5<br />

1.6e-5<br />

1.4e-5<br />

1.2e-5<br />

1.0e-5<br />

8.0e-6<br />

46.2 nm<br />

36.8 nm<br />

Temperature ( o 6.0e-6<br />

50 100 150 200 250 300 350 400<br />

C)<br />

Figure 7. Electrical resistivity of the coated Ag films after heat<br />

treatment at different temperatures (two different batches of silver<br />

nanoparticles).<br />

minimum value of 2.4 × 10 −5 cm after 250 ◦ C, 30 min<br />

treatment. This film, however, would lose conductivity if the<br />

treatment temperature were over 400 ◦ C, due to the growth of<br />

both silver particles <strong>and</strong> pores <strong>and</strong> the eventual breaking up<br />

of conducting lines. A smaller size <strong>and</strong> narrower distribution<br />

of the starting colloids would shift these temperatures to even<br />

lower values.<br />

784<br />

Acknowledgment<br />

The authors wish to thank Chun-Shan Institute of Science<br />

<strong>and</strong> Technology for financial support via project number<br />

BD93020P.<br />

References<br />

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80 844<br />

[2] Green R J, Frazier R A, Shakesheff K M, Davies M C,<br />

Roberts C J <strong>and</strong> Tendler S J B 2000 Biomaterials 21 1823<br />

[3] Milne W I, Teo K B, Amaratunga G A, Legagneux P,<br />

Gangloff L, Schnell J P, Semet V, Binh V T <strong>and</strong><br />

Groening O 2004 J. Mater. Chem. 14 933<br />

[4] Kodama H, Momose S, Ihara N, Uzumaki T <strong>and</strong><br />

Tanaka A 2003 Appl. Phys. Lett. 83 5253<br />

[5] Liu F K, Chang Y C, Ko F H, Chu T C <strong>and</strong> Dai B T 2003<br />

Microelectron. Eng. 67/68 702<br />

[6] Cho Y S, Choi G S, Hong S Y <strong>and</strong> Kim D 2002 J. Cryst.<br />

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[7] Choi G S, Cho Y S, Son K H <strong>and</strong> Kim D J 2003<br />

Microelectron. Eng. 66 77<br />

[8] Chou K S <strong>and</strong> Ren C Y 2000 Mater. Chem. Phys. 64 241<br />

[9] Nersisyan H H, Lee J H, Son H T, Won C W <strong>and</strong> Maeng D Y<br />

2003 Mater. Res. Bull. 38 949<br />

[10] Emslie A G, Bonner F T <strong>and</strong> Peck L G 1958 J. Appl. Phys. 29<br />

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[11] Meyerhofer D 1978 J. Appl. Phys. 49 3993

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