ICE Shared Construction Analysis SCA 9712-570 - Smithsonian ...
ICE Shared Construction Analysis SCA 9712-570 - Smithsonian ...
ICE Shared Construction Analysis SCA 9712-570 - Smithsonian ...
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National LM2672<br />
LOCOS<br />
LOCOS<br />
METAL 1<br />
POLY<br />
BIRDSBEAK<br />
DIFFUSION<br />
Integrated Circuit Engineering Corporation<br />
OXIDE<br />
GATE<br />
OXIDE<br />
Figure 21. SEM section views of local oxide birdbeak profiles. Mag. 16,000x.