ICE Shared Construction Analysis SCA 9712-570 - Smithsonian ...
ICE Shared Construction Analysis SCA 9712-570 - Smithsonian ...
ICE Shared Construction Analysis SCA 9712-570 - Smithsonian ...
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National LM2672<br />
STEP<br />
N+<br />
POLY<br />
GATE OXIDE<br />
GATE OXIDE<br />
STEP<br />
PASSIVATION<br />
IMD<br />
POLY<br />
N+ EXTENSION<br />
METAL 1<br />
N+ S/D<br />
Integrated Circuit Engineering Corporation<br />
N+ S/D<br />
Mag. 12,000x<br />
Mag. 26,000x<br />
Mag. 26,000x<br />
Figure 20. Detailed SEM section views of extended shallow source transistor structure.<br />
POLY<br />
GATE OXIDE