ICE Shared Construction Analysis SCA 9712-570 - Smithsonian ...

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National LM2672 power HEXFET poly capacitor Figure 17a. Additional SEM views of poly structures. Mag. 1600x, 60°. Integrated Circuit Engineering Corporation POLY GATE POLY PLATE
National LM2672 GATE OXIDE PASSIVATION IMD POLY GATE OXIDE Mag. 10,000x PASSIVATION IMD POLY Mag. 12,000x Figure 18. SEM section views of typical MOS transistors. Integrated Circuit Engineering Corporation P+ S/D N+ S/D
Page 1 and 2: Construction Analysis National Semi
Page 3 and 4: INTRODUCTION This report describes
Page 5 and 6: TECHNOLOGY DESCRIPTION (continued)
Page 7 and 8: Die Process and Design: Questionabl
Page 9 and 10: ANALYSIS RESULTS II (continued) •
Page 11 and 12: OVERALL QUALITY EVALUATION: Overall
Page 13 and 14: HORIZONTAL DIMENSIONS Die size: 1.8
Page 15 and 16: INDEX TO FIGURES PACKAGE ASSEMBLY F
Page 17 and 18: National LM2672 PIN 1 top side Figu
Page 19 and 20: INTERMETAL DIELECTRIC PRE-METAL DIE
Page 21 and 22: IMD LOCAL OXIDE PASSIVATION METAL 2
Page 23 and 24: National LM2672 Figure 5a. Detailed
Page 25 and 26: Mag. 400x Mag. 500x Figure 6. Die i
Page 27 and 28: Figure 7. Optical views of the die
Page 29 and 30: National LM2672 METAL 1 POLY N+ PRE
Page 31 and 32: National LM2672 METAL 2 Mag. 2000x
Page 33 and 34: National LM2672 PASSIVATION 2 METAL
Page 35 and 36: National LM2672 METAL 1 POLY POLY M
Page 37 and 38: National LM2672 Si PASSIVATION IMD
Page 39: National LM2672 Mag. 1300x DIFFUSIO
Page 43 and 44: National LM2672 STEP N+ POLY GATE O
Page 45 and 46: National LM2672 METAL 1 LOCOS P- BO
Page 47 and 48: National LM2672 METAL 1 Si Si POLY
Page 49 and 50: N+ COLLECTOR PASSIVATION P+BASE N+
Page 51 and 52: National LM2672 P+ ISO P+ EMITTER N
Page 53 and 54: National LM2672 PROBE MARK Integrat

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