ICE Shared Construction Analysis SCA 9712-570 - Smithsonian ...
ICE Shared Construction Analysis SCA 9712-570 - Smithsonian ...
ICE Shared Construction Analysis SCA 9712-570 - Smithsonian ...
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National LM2672<br />
POLY<br />
Figure 11a. Detailed SEM view of a metal 2-to-metal 1 via. Mag. 5000x, 60°.<br />
METAL 1<br />
PASSIVATION 1<br />
Si<br />
PASSIVATION 2<br />
METAL 2<br />
METAL 1<br />
METAL 2<br />
Figure 11b. SEM section view of a metal 2-to-metal 1 via. Mag. 10,000x.<br />
Integrated Circuit Engineering Corporation
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