ICE Shared Construction Analysis SCA 9712-570 - Smithsonian ...

ICE Shared Construction Analysis SCA 9712-570 - Smithsonian ... ICE Shared Construction Analysis SCA 9712-570 - Smithsonian ...

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14.08.2013 Views

National LM2672 Mag. 1000x Mag. 3100x Figure 8. SEM views illustrating passivation coverage. 60°. Integrated Circuit Engineering Corporation

National LM2672 METAL 1 POLY N+ PRE-METAL GLASS PASSIVATION 2 PASSIVATION 1 LOCOS PASSIVATION METAL 2 Figure 8a. SEM section views illustrating general construction. PASSIVATION 2 PASSIVATION 1 METAL 2 IMD PRE-METAL GLASS LOCOS IMD METAL 1 P-WELL GATE OXIDE Figure 9. SEM section view of a metal 2 line profile. Mag. 10,000x. Si METAL 2 POLY Integrated Circuit Engineering Corporation Mag. 3000x Mag. 8000x

National LM2672<br />

METAL 1<br />

POLY<br />

N+<br />

PRE-METAL GLASS<br />

PASSIVATION 2<br />

PASSIVATION 1<br />

LOCOS<br />

PASSIVATION<br />

METAL 2<br />

Figure 8a. SEM section views illustrating general construction.<br />

PASSIVATION 2<br />

PASSIVATION 1<br />

METAL 2<br />

IMD<br />

PRE-METAL GLASS<br />

LOCOS<br />

IMD<br />

METAL 1<br />

P-WELL<br />

GATE OXIDE<br />

Figure 9. SEM section view of a metal 2 line profile. Mag. 10,000x.<br />

Si<br />

METAL 2<br />

POLY<br />

Integrated Circuit Engineering Corporation<br />

Mag. 3000x<br />

Mag. 8000x

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