ICE Shared Construction Analysis SCA 9712-570 - Smithsonian ...

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PROCEDURE The devices were subjected to the following analysis procedures: External inspection X-ray Decapsulation Internal optical inspection SEM inspection of assembly features and passivation Wirepull test Passivation integrity test Passivation removal and inspect metal 2 Delayer to metal 1 and inspect Delayer to poly and inspect poly structures and die surface Die sectioning (90° for SEM) * Measure horizontal dimensions Measure vertical dimensions Material analysis * Delineation of cross-sections is by silicon etch unless otherwise indicated. - 8 -
OVERALL QUALITY EVALUATION: Overall Rating: Normal DETAIL OF EVALUATION Package integrity N Package markings G Die placement G Die attach quality G Wire spacing G Wirebond placement G Wirebond quality G Dicing quality N Wirebond method Thermosonic ball bonds using 1.3 mil gold wire. Dicing method: Sawn (full depth) Die attach: Silver-filled polyimide Die surface integrity: Tool marks (absence): NP (probe damage) Particles (absence): N Contamination (absence): N Process defects (absence): N General workmanship N Passivation integrity G Metal definition N Metal integrity NP (cracks at contact edges) Contact coverage G Contact registration N Contact defects NP (some significant silicon mound growth) G = Good, P = Poor, N = Normal, NP = Normal/Poor - 9 -
Page 1 and 2: Construction Analysis National Semi
Page 3 and 4: INTRODUCTION This report describes
Page 5 and 6: TECHNOLOGY DESCRIPTION (continued)
Page 7 and 8: Die Process and Design: Questionabl
Page 9: ANALYSIS RESULTS II (continued) •
Page 13 and 14: HORIZONTAL DIMENSIONS Die size: 1.8
Page 15 and 16: INDEX TO FIGURES PACKAGE ASSEMBLY F
Page 17 and 18: National LM2672 PIN 1 top side Figu
Page 19 and 20: INTERMETAL DIELECTRIC PRE-METAL DIE
Page 21 and 22: IMD LOCAL OXIDE PASSIVATION METAL 2
Page 23 and 24: National LM2672 Figure 5a. Detailed
Page 25 and 26: Mag. 400x Mag. 500x Figure 6. Die i
Page 27 and 28: Figure 7. Optical views of the die
Page 29 and 30: National LM2672 METAL 1 POLY N+ PRE
Page 31 and 32: National LM2672 METAL 2 Mag. 2000x
Page 33 and 34: National LM2672 PASSIVATION 2 METAL
Page 35 and 36: National LM2672 METAL 1 POLY POLY M
Page 37 and 38: National LM2672 Si PASSIVATION IMD
Page 39 and 40: National LM2672 Mag. 1300x DIFFUSIO
Page 41 and 42: National LM2672 GATE OXIDE PASSIVAT
Page 43 and 44: National LM2672 STEP N+ POLY GATE O
Page 45 and 46: National LM2672 METAL 1 LOCOS P- BO
Page 47 and 48: National LM2672 METAL 1 Si Si POLY
Page 49 and 50: N+ COLLECTOR PASSIVATION P+BASE N+
Page 51 and 52: National LM2672 P+ ISO P+ EMITTER N
Page 53 and 54: National LM2672 PROBE MARK Integrat

ICE Shared Construction Analysis SCA 9712-570 - Smithsonian ...

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