CLEAN ROOM USE AGREEMENT - The University of Texas at Dallas

UT DALLAS
CLEAN ROOM USE AGREEMENT
FOR UT SYSTEM USERS
This Clean Room Use Agreement (“Agreement”) is made effective as of ______
________, ______, between the Board of Regents of The University of Texas
System for the use and benefit of The University of Texas _________
(“Customer”) and the Board of Regents of The University of Texas System for the
use and benefit of The University of Texas at Dallas (“University”).
Whereas, Customer desires to use the Clean Room Lab (“CRL”) facilities and
equipment on the terms and conditions set forth herein, and
Whereas, the University desires to make its CRL facilities and equipment available
on the terms and conditions set forth herein, and
Whereas, University has appointed a CRL Director and staff (“CRL
Management”) to operate and maintain the CRL in the best interests of University.
Therefore, for good and valuable consideration the University and Customer agree
as follows:
1. Description of Facilities and Equipment Available for Customer Use.
2. Fees.
a. Customer may use those CRL facilities and equipment according to the
fees set forth on the attached CRL Facilities and Equipment Fee
Schedule (“Fee Schedule”), a copy of which is attached hereto as
Appendix B and made a part hereof, and incorporated herein.
University through CRL Management reserves the right to modify the
fees set forth in the Fee Schedule on September 1 of each year or upon
30 days’ notice to Customer.
b. CRL Management has the sole authority to schedule and reschedule
access to CRL facilities and equipment for all users as needed to
accommodate existing research contracts and grants.
c. Customer understands that funded research contracts and grants
officially recognized by University’s Office of Sponsored Projects and
performed by University faculty will have priority in CRL access.
See Fee Schedule for associated fees.
a. Customer agrees to fill out a daily log stating the equipment used and
duration of usage and provide this usage information to CRL
Management upon leaving the CRL each day.
Clean Room Use Agreement for UT System Users 1

. Customer agrees to provide payment within 30 days upon receipt of
invoice.
c. Customer utilization of or consultation with CRL staff must be preapproved
by CRL Management on a case-by-case basis and in
accordance with the Fee Schedule.
3. Compliance with all Rules and Regulations.
Customer agrees to abide by all CRL rules and regulations pertaining to the
facilities and equipment. In this regard, Customer acknowledges that it has read
and understood the CRL Safety Manual and Operating Procedures (“Safety
Manual”) and the CRL Rules (“Rules”); and has read, understood, and signed the
Agreement to Follow Laboratory Safety Procedures and Release of Liability
(“Release”). A copy of the Safety Manual, Rules, and Release are attached as a
separate document to this Agreement, incorporated herein, and made a part hereof.
Customer understands that Safety Manual and Rules may be updated or modified
periodically by CRL Management. Customer will be given copies of any updated
Safety Manual and/or Rules. Customer acknowledges that upon receipt of these
updated versions, the revised Safety Manual and/or Rules will supersede any
previous versions and that Customer will have the same duties, obligations and
responsibilities in regards to this updated version as to the version attached to this
Agreement.
Customer also agrees to the following:
a. Customer agrees to attend a safety training tour of the CRL before
beginning use of the lab.
b. Customer agrees to attend any additional safety training required by
CRL Management.
c. All equipment, facilities, supplies, consumables, chemicals, gasses, or
other items provided by Customer must first be reviewed and approved
by CRL Management on a case-by-case basis.
d. Any modification of CRL equipment or facilities must first be
reviewed and approved by CRL Management on a case-by-case basis.
e. Customer agrees to follow CRL equipment utilization protocols and
housekeeping rules.
f. Customer agrees to leave equipment in a condition ready for the next
user, in accordance with CRL protocols.
4. Authorized Uses of Facilities.
CRL facilities may only be used for research and development activities. In no
case may Customer offer for sale any device or product manufactured utilizing
CRL facilities. If University discovers that Customer has sold, offered for sale, or
plans to sell any device or product manufactured utilizing CRL facilities,
Clean Room Use Agreement for UT System Users 2

University has the right to immediately bar Customer access to the CRL facilities
and terminate this Agreement per the provisions of Section 6.b.
5. List of Persons Authorized by Customer to Use the Facilities.
Customer agrees to furnish CRL Management, upon execution of the Agreement, a
list of Customer’s officers, agents or employees authorized to use CRL facilities
and equipment on Customer’s behalf (“Customer Users”). Customer understands
that persons not on such list will not be permitted to use CRL facilities or
equipment on behalf of Customer unless Customer provides written authorization
and an updated list reflecting Customer’s authorization of such person(s). All
persons authorized to use CRL facilities or equipment on behalf of Customer shall
be required to read and comply with the Safety Manual and Rules and shall also be
required to read and sign a separate Release before using CRL facilities or
equipment. In addition:
6. Termination.
a. Access to the CRL is restricted electronically and the Customer Users
using the Lab must obtain a UTD “Comet Card” ID to activate the
lock. This lock will record the entry of all users as a method of
keeping track of Lab use.
b. At the conclusion of the Customer’s association with UTD, the “Comet
Card” must be terminated and released back to the University.
c. All Customer Users agree to be photographed or monitored remotely
by video or other electronic means when present in the CRL or the
CRL vicinity.
d. Customer Users must follow all parking permit regulations.
e. Customer shall require all its officers, agents or employees authorized
to use CRL facilities and equipment on Customer’s behalf to sign a
Release and Indemnification Agreement, attached hereto as Appendix
A (“Release”).
a. Either party shall have the right to terminate this Agreement on thirty
(30) days’ notice to the other.
b. University through CRL Management shall have the right to
immediately terminate this Agreement and suspend Customer’s use of
CRL facilities and equipment in the event:
i. Customer’s account is more than 30 days past due; or
ii. Customer fails to comply with any of the conditions or rules
contained in the CRL Safety Manual, Rules, or Release; or
iii. Customer fails to comply with the terms of this Agreement; or
iv. Customer fails to follow the restrictions on use of the facility
described in Section 4; or
Clean Room Use Agreement for UT System Users 3

v. Customer fails to comply with relevant University policies,
rules or procedures.
Such determination shall be in the sole discretion of CRL Management.
c. The term of this Agreement is for one (1) year from the date set forth
in the first paragraph. The parties may, upon mutual written agreement,
extend the term of this Agreement by executing an amendment to this
Agreement.
7. Care and Maintenance of Equipment and Facilities.
Customer agrees that in the event it damages any CRL facilities or equipment,
Customer will bear the sole financial responsibility for such damage.
Determination of damage and repair costs will be established by CRL
Management on a case-by-case basis and communicated to Customer in a timely
manner. Customer agrees to make payment to University to cover damages and/or
repairs within fourteen (14) days of receiving cost estimate from CRL
Management.
8. Liability.
To the extent authorized by the laws and Constitution of the State of Texas,
Customer shall be fully responsible and liable for any and all demands, claims,
suits, damages, losses, liabilities, costs and expenses of any nature whatsoever
(including, but not limited to, property damage and loss, bodily injuries, sickness,
disease or death), directly or indirectly arising out of or in connection with the use
of the CRL. Notwithstanding anything in this Agreement to the contrary,
University undertakes no obligation whatsoever for the safety or security of any
person, including, but not limited to, Customer, or any of the employees, students,
subcontractors, agents, representatives, participants or invitees of Customer.
9. Insurance.
To the extent authorized by the laws and Constitution of the State of Texas,
Customer shall procure and maintain, at Customer's sole cost and expense,
worker's compensation insurance and any and all other insurance coverage
required by law for Customer's use of the CRL. Notwithstanding the requirement
in the preceding sentence, Customer shall have the right, at its option, to selfinsure
against any risk that may be incurred by Customer as a result of its
operations under this Agreement. The insurance requirements imposed by this
Section 9 shall not in any way negate or otherwise limit Customer's obligations set
forth in Sections 8 and 10.
10. Indemnification.
Clean Room Use Agreement for UT System Users 4

To the extent authorized by the Constitution and the laws of the State of Texas,
Customer hereby indemnifies and holds University, harmless against all claims,
demands, damages, liabilities, and costs to University that directly or indirectly
result from, or arise in connection with any negligence of willful misconduct of
Customer, its agents, or employees in performing Customer’s obligations
hereunder. To the same extent, University indemnifies and holds Customer
harmless against all claims, demands, liabilities, and costs to Customer that
directly or indirectly result from, or arise in connection with any negligence or
willful misconduct of University, its agents, or employees in performing
University’s obligations hereunder.
11. Personal Property.
Customer, not University, is responsible for loss, theft of, or damage to any
personal property of Customer or its authorized users, located within the CRL
facility or on University property.
12. Limitation on Warranties.
UNIVERSITY HEREBY EXPRESSLY DISCLAIMS AND EXCLUDES ALL
WARRANTIES CONCERNING CRL EQUIPMENT OR FACILITIES.
UNIVERSITY DOES NOT GUARANTEE THE ACCURACY OF ANY TEST
RESULTS CUSTOMER MAY OBTAIN FROM USING CRL EQUIPMENT OR
FACILITIES. UNIVERSITY DOES NOT GUARANTEE THE PROCESSES,
MATERIALS, OR OTHER COMPONENTS CUSTOMER MAY UTILIZE.
UNIVERSITY DOES NOT GUARANTEE THAT EQUIPMENT WILL BE
FUNCTIONAL AT ALL TIMES. UNIVERSITY DOES NOT GUARANTEE
THAT STAFF WILL BE AVAILABLE AT ALL TIMES.
13. General Provisions.
a. Assignment. This Agreement may not be assigned by Customer
without the prior written consent of University.
b. Force Majeure. University shall not be responsible for any delays or
failure to provide access the facilities and equipment due to acts of
God, strikes, or other disturbances, war, insurrection, embargoes,
governmental restrictions, acts of governments or governmental
authorities, or other causes of any kind beyond the control of
University.
c. Governing Law. This Agreement shall be governed by the laws of the
state of Texas.
d. Entire Agreement. This Agreement represents the entire understanding
of the parties and may not be modified except by written agreement of
the parties and supersedes all prior written and/or oral agreements.
Clean Room Use Agreement for UT System Users 5

e. Severability. If any provision of this Agreement is declared void or
unenforceable, such provision shall be deemed severed from this
Agreement, which shall otherwise remain in full force and effect.
f. Notices. Each notice, request, approval, or demand given or required
to be given or obtained pursuant to this Agreement shall be in writing
and shall be deemed sufficiently given if deposited in the United States
mail, first class, postage prepaid, and addressed to the address of the
intended recipient set forth below or to such other address as such party
may designate by notice given pursuant to this section:
If to the University:
For technical matters:
Attention: Wallace Martin
The University of Texas at Dallas
800 W. Campbell Rd., RL 10
Richardson, Texas 75080-3021
For contractual matters:
Attention: Dr. Calvin Jamison
Vice President for Business Affairs
The University of Texas at Dallas
800 W. Campbell Rd., AD24
Richardson, Texas 75080-3021
If to the Customer:
_________________________
_________________________
_________________________
Attention: _________________
g. Authority. The person(s) signing this Agreement on behalf of
Customer represents and warrants to University that he/she/they have
the legal authority to sign this Agreement on behalf of Customer and to
bind Customer to the covenants and conditions of this Agreement. If
the individual/s is/are not so authorized, he/she/they shall be personally
liable for Customer’s performance of its obligations under this
Agreement.
h. Customer Officers, Agents, and Employees. Customer’s officers,
agents and employees shall be bound by the same duties, obligations
and responsibilities set forth in this Agreement as Customer.
Clean Room Use Agreement for UT System Users 6

ATTACHMENTS TO BE INCLUDED:
Release and Indemnification Agreement (Appendix A)
CRL Facilities and Equipment Fee Schedule (Appendix B)
CRL Facilities and Equipment “Tool list”
CRL Safety Manual (attached as separate document)
Agreement to Follow Laboratory Safety Procedures and Release of Liability
(print out and sign last page (page 23) of safety manual
CUSTOMER TO FURNISH:
List of Customer’s officers, agents, or employees authorized to use CRL on
Customer’s behalf
Clean Room Use Agreement for UT System Users 7

EXECUTED to be effective as of the date specified in the introductory paragraph above.
BOARD OF REGENTS OF THE UNIVERSITY OF TEXAS SYSTEM
for the use and benefit of THE UNIVERSITY OF TEXAS AT DALLAS
________________________________________________________________________
Dr. Calvin Jamison Date
Vice President for Business Affairs
The University of Texas at Dallas
________________________________________________________________________
Wallace Martin Date
Associate Director, Clean Room Laboratory
The University of Texas at Dallas
CUSTOMER
Make Payment to:
The University of Texas at Dallas
ATTN: Wallace Martin
800 W. Campbell Rd., RL10,
Richardson, Texas 75080-3021
Telephone Number: 972-883-6638
Email Address: wmartin@utdallas.edu
________________________________________________________________________
Signature Date
Printed Name:
Title:
Address:
Telephone Number:
Email Address:
Clean Room Use Agreement for UT System Users 8

INSTITUTION:
APPENDIX A
Release and Indemnification Agreement
The University of Texas at Dallas
800 W. Campbell Rd.
Richardson, TX 75080
DESCRIPTION OF ACTIVITY:
PARTICIPANT:
Name: ________________________________
Access to and use of The University of Texas at Dallas Clean Room Lab
DATE(s): __________________________
Address: _______________________________
_______________________________
I, the above named participant, am eighteen years of age or older and have voluntarily
requested to participate/engage in the above Activity. I acknowledge that the nature of the
Activity may expose me to hazards or risks that may result in my illness, personal injury
or death, and I understand and appreciate the nature of such hazards and risks.
IN CONSIDERATION OF MY PARTICIPATION IN THE ACTIVITY, I
HEREBY ACCEPT ALL RISK TO MY HEALTH AND OF MY INJURY OR
DEATH THAT MAY RESULT FROM SUCH PARTICIPATION, AND I
HEREBY RELEASE THE ABOVE NAMED INSTITUTION, ITS GOVERNING
BOARD, OFFICERS, EMPLOYEES AND REPRESENTATIVES FROM ANY
LIABILITY TO ME, MY PERSONAL REPRESENTATIVES, ESTATE, HEIRS,
NEXT OF KIN, AND ASSIGNS FOR ANY AND ALL CLAIMS AND CAUSES OF
ACTION FOR LOSS OF OR DAMAGE TO MY PROPERTY AND FOR ANY
AND ALL ILLNESS OR INJURY TO MY PERSON, INCLUDING MY DEATH,
THAT MAY RESULT FROM OR OCCUR DURING MY PARTICIPATION IN
THE ACTIVITY, WHETHER CAUSED BY NEGLIGENCE OF THE
INSTITUTION, ITS GOVERNING BOARD, OFFICERS, EMPLOYEES, OR
REPRESENTATIVES, OR OTHERWISE. I further agree to indemnify and hold
harmless the Institution and its governing board, officers, employees, and representatives
from liability for the injury or death of any person(s) and damage to property that may
result from my negligent or intentional act or omission while participating in the
described Activity.
Release and Indemnification Appendix A - 1

I HAVE CAREFULLY READ THIS AGREEMENT AND UNDERSTAND IT TO
BE A RELEASE OF ALL CLAIMS AND CAUSES OF ACTION FOR MY
INJURY OR DEATH OR DAMAGE TO MY PROPERTY THAT OCCURS
WHILE PARTICIPATING IN THE DESCRIBED ACTIVITY AND IT
OBLIGATES ME TO INDEMNIFY THE PARTIES NAMED FOR ANY
LIABILITY FOR INJURY OR DEATH OF ANY PERSON AND DAMAGE TO
PROPERTY CAUSED BY MY NEGLIGENT OR INTENTIONAL ACT OR
OMISSION.
PARTICIPANT
Signature: _______________________________________ Date: _____________
Printed name: _______________________________________
WITNESS
Signature: _______________________________________ Date: _____________
Printed name: _______________________________________
Release and Indemnification Appendix A - 2

Appendix 1 C Safety Manual
APPENDIX B
UTD Clean Room Laboratory Equipment Fee Schedule – Internal UT System Academic Users
11/12/09
Minimum time unit: 1 hour
# Equipment/Service Unit
1 Access Fee
External
Customer
Unit Cost
Set up
Fee
Training
Fee
per
quarter/user $ 400.00 $ - $ -
2 Staff Technician - Consulting per hour $ 40.00 $ - $ -
3 Staff Technician - Processing per hour $ 40.00 $ - $ -
4 Staff Professional - Consulting per hour $ 40.00 $ - $ -
5 Staff Professional - Processing per hour
per
$ 80.00 $ - $ -
6 Leo Supra 40 SEM
hour/user
per
$ 50.00 $ 50 $ 250
7 Veeco AFM - SPM
hour/user
per
$ 50.00 $ 50 $ 250
8 Hourly fee - general tool use
hour/user
per
$ 40.00 $ - $ -
9 Laser Writer ***see notes below *** exposure *** $ 50 $ 100
10 LPCVD Deposition (Staff only) per run $ 150.00 $ 50 $ -
11 Tystar Atm Furnace per run
per
$ 150.00 $ 50 $ 50
12 RTA
hour/user
per
$ 50.00 $ 50 $ 100
13 Oerlikon ICP metal etcher
hour/user
per
$ 50.00 $ 50 $ 100
14 Oerlikon dielectric / DSE etcher hour/user $ 50.00 $ 50 $ 100
$2000 FEE CAP per user per
quarter
***Laser writer fees for:
20mm write head, 5µm resolution $ 100.00
10mm write head, 2.5µm resolution $ 150.00
4mm write head, 1µm resolution $ 200.00
2mm write head, .8µm resolution $ 500.00

Appendix 1 C Safety Manual
NSERL Cleanroom Research Lab
LEGEND:
TYPE
A =
SUB-GROUPS
ASSEMBLY B =BONDER
C = CLEAN O =OZONE : M =MASK : U =ULTRASONIC : W =WAFER : D =DRYER
D =
A =ANALYZER : C =CONTAMINATION : M =MICROSCOPE : P =PROBE : S
DIAGNOSTIC =STRESS : T =THICKNESS
E = ETCH A =ASH : R =REACTOR : W =WET
H = HOOD A =ACID : B =BASE : R =RCA : S =SOLVENT
L =
C =CONTACT : D =DEVELOPER : E =EBEAM : S =SPINNER : L=LASER : I
LITHOGRAPHY =IMPRINT : W =WET
M = METAL E =EVAPORATOR : S =SPUTTER
P = PLASMA D =DEPOSITION : E =ETCH : S =SPACE
S = STORAGE A =ACID : B =BASE : S =SOLVENT
A =ATM : H =HOTPLATE : L =LPCVD : O =OVEN : R =RTP : V =VACUUM : D
T = THERMAL =DEPOSITION : C =CVD : U =UV
Item #
Room # Tool ID Tool Description Owner
1 1.422
TL01-1 TYSTAR LPCVD Stack 4-Tube RIEKENA
2 1.422 TA01-1 THERMCO Minibrute Stack 4-Tube RIEKENA
3 1.422 TC01 Atomic Layer Deposition RIEKENA
4 1.422 TR01 JETFIRST jipelec RTA DUENES
5 1.422 TA02-1 Atmospheric Furnace Stack 4-Tube DUENES
6 1.422 TLBB01 CDO Burn Box for Thermal Bay BRADSHAW
7 1.422 TR02 Modular Process Technology RTP-600S DUENES
8 1.422 TR03 Modular Process Technology RTP-600S DUENES
9 1.422 TD03 Special Coating Systems Parylene Labcoter DUENES
Misc.
Information
10 1.432
LL01 Heidelberg DWL66 Laser Lithography Tool ROBBINS
11 1.432 CM01 ULTRATECH Mask Cleaner GOODNIGHT
12 1.432 DM01 Leica INM 200 Optical Microscope ROBBINS
13 1.432 LWED CPK Chrome Etch & Base Develop Tool GOODNIGHT
14 1.432 LWSD CPK Solvent & Base Develop Tool GOODNIGHT
15 1.432 HS02 Leatherwood Small Solvent Hood GOODNIGHT
16 1.432 LC01 Q-4000 Series Quintel Contact Printer ROBBINS
17 1.432 LS02 CEE Coat Spinner GOODNIGHT
18 1.432 TH02 Tabletop Hotplate GOODNIGHT
19 1.432 TH03 Tabletop Hotplate GOODNIGHT
20 1.432 TO02 HMDS Oven GOODNIGHT
21 1.432 TO03 Blue M Oven BRADSHAW
22 1.432 TO04 Blue M Oven BRADSHAW
23 1.432 TO05 Blue M Oven BRADSHAW
24 1.432 TO06 Blue M Oven BRADSHAW
25 1.432 TO07 Cole Parmer Oven BRADSHAW
26 1.432 TO08 Cole Parmer Oven BRADSHAW
27 1.432 TU01 Blue M UV Ozone Oven BRADSHAW
28 1.432 TV01 Blue M Vacuum Oven BRADSHAW
29 1.432 LC03 Karl Suss Contact Printer ROBBINS
30 1.432 LS03 Resist Spinner ROBBINS
31 1.432
LS04 Solitec 820-ACB Coater Track s/n 6851 ROBBINS Undergoing
Installation
32 1.430 ME03 Temescal Evaporator MAYNARD

33 1.430
ER01 Technics Series 85-RIE (little RIE) GOODNIGHT
34 1.430 ME02 Cryo E-Gun Evaporator MAYNARD
35 1.430 EA03 March PX250 MAYNARD
36 1.430 ME04 Denton Vacuum Thermal Evaporator MAYNARD
37 1.430 MS03 AJA International ATC 1500-V Sputter System DUENES
38 1.430 PD01 UNAXIS PECVD RIEKENA
39 1.430
ER02 Plasmatherm-Batchtop PR Undercut Etcher MAYNARD Future
Installation
40 1.430 MS04 AJA International ORION Sputter System DUENES
41 1.430
PE03
UNAXIS Cl ICP (Inductively Coupled Plasma) -
metals
RIEKENA
42 1.430 PE04 UNAXIS Fl DSE (Deep Silicon Etch) - dialectrics DUENES
43 1.430
PE02 STS Deep Silicon Etcher RIEKENA
Future
Installation
44 1.436 ME05 CHA 50 E-Gun Vac Evap MAYNARD
45 1.436
AB01 K&S Ball Wire Bonder BRADSHAW
46 1.436 AB02 K&S Chisel Wire Bonder BRADSHAW
47 1.436 CD02 Micro Tech Dual-stack Spin Rinse Dryer GOODNIGHT
48 1.436
CD03
Tousimis Supercritical Dryer (MEM structure
release)
BRADSHAW
49 1.436 CO02 Samco UV-Ozone Stripper/Cleaner model UV-1 BRADSHAW
50 1.436 HS01 Leatherwood General Solvent Hood GOODNIGHT
51 1.436 HA01 Leatherwood Manual Acid Hood GOODNIGHT
52 1.436 HB01 Leatherwood Manual Base Hood GOODNIGHT
53 1.436 HR01 Leatherwood RCA Acid Hood GOODNIGHT
54 1.436 TO01 Thermal Oven BRADSHAW
55 1.436 DM08 Reichert-Jung Optical Microscope ROBBINS
56 1.440 DM05 Leica INM 100 Optical Microscope ROBBINS
57 1.440
DM07
LEO Supra40 FESEM w/ NPGS, EDAX &
Nanomanipulator
DUENES
58 1.440
DT02 SENTECH SE800 Ellipsometer BRADSHAW
59 1.440 DP03 Alessi 4-Point Probe BRADSHAW
60 1.440
DS01
Toho FLX-2320-S Wavelength Stress
Measurement
GOODNIGHT
61 1.440 DT04 Veeco Dektak VIII Profilometer BRADSHAW
62 1.440 DT05 Nanometrics Nanospec Film Thickness DUENES
63 1.440 DA01 Thermo Electron FTIR Spectrometer DUENES
64 1.440 MS02 SEM Hummer GOODNIGHT
65 1.440 LI01 obducat Nano-Imprinter NIL-2.5" Imprint Tool HU
66 1.440
DM09
Digital Instruments (Veeco) Dimension 5000 series
SPM
ROBBINS
67 1.440
DP05 Micromanipulator Probe Station BRADSHAW Undergoing
Installation
1.422
Additional Support Equipment
Integrated Ozone Delivery System (ALD
capability)
RIEKENA Shared Unit
1.430 Residual Gas Analyzer (RGA) DUENES
1.440 Ge ATR Crystal (FTIR accessory) DUENES
1.440 rame'-hart Goniometer ROBBINS
1.440
Keithly 4200 Semiconductor Characterization
System
DUENES
Appendix 1 C Safety Manual

Appendix 1 C Safety Manual
Appendix C
UTD
Cleanroom Research Laboratory
Safety Manual
and
Operating Procedures
The University of Texas at Dallas
Richardson, Texas

Appendix 1 C Safety Manual
Table of Contents:
TABLE OF CONTENTS: ............................................................................................................ 5
OVERVIEW OF SAFETY AND OPERATING PROCEDURES MANUAL ........................ 7
GENERAL INFORMATION............................................................................................................ 7
I. HOW TO OBTAIN TRAINING AND BECOME CERTIFIED. ........................................................... 7
A. Training on Safety and Operating Procedures. ............................................................ 7
B. Training on Fabrication Equipment ............................................................................. 7
II. VIOLATIONS OF SAFETY, BEHAVIOR, OR CLEANLINESS POLICIES ........................................ 7
UTD CLEAN ROOM LABORATORY: SAFETY MANUAL ................................................ 9
I. EMERGENCY PROCEDURES / PROTOCOLS. ............................................................................ 9
A. Life-Threatening Emergency Procedures. .................................................................... 9
B. Non-Life-threatening Accident / Emergency Procedures. ............................................ 9
C. Fire / Emergency-Evacuation Alarm Procedures......................................................... 9
II. PERSONNEL .......................................................................................................................... 9
A. Access ............................................................................................................................ 9
B. The “Buddy” ............................................................................................................... 10
C. External (Non-UTD) Users of the Clean Room .......................................................... 10
III. SAFETY EQUIPMENT .......................................................................................................... 10
A. Phone .......................................................................................................................... 10
B. First Aid Kit ................................................................................................................ 10
C. Fire Extinguishers ....................................................................................................... 10
D. Fire Blanket ................................................................................................................ 10
E. Chemical Showers and Eye Wash Stations ................................................................. 10
1. Chemical Spills on your clothes / body .................................................................... 11
2. Chemical Splashes into your eyes............................................................................. 11
F. Automatic Fire Sprinkler System ................................................................................ 11
G. Chemical spill Clean-up / Containment ...................................................................... 11
H. Calcium Gluconate Gel for HF Exposure Treatments .............................................. 11
IV. CHEMICAL SAFETY ............................................................................................................ 12
A. MSDS sheets................................................................................................................ 12
B. De-Ionized Water ........................................................................................................ 12
C. Cyanides ...................................................................................................................... 12
D. Solvents ....................................................................................................................... 12
E. Acids ............................................................................................................................ 12
1. Special Word about HF (Hydrofluoric Acid) ........................................................... 12
F. Bases (Caustics) .......................................................................................................... 13
G. Flammable and Combustible Chemicals .................................................................... 14
H. Toxic Chemicals .......................................................................................................... 14
I. Photoresist and Developers ........................................................................................ 14
J. Cryogens (Liquid Nitrogen, Liquid Helium, Solid CO2) ............................................ 14
K. Waste Disposal............................................................................................................ 14
L. Chemical Spills ........................................................................................................... 14
M. Unknowns .................................................................................................................... 15
N. Compressed Gases ...................................................................................................... 15
V. SAFETY GUIDELINES .......................................................................................................... 15
A. Chemistry Reminder Summary ................................................................................... 16
UTD CLEAN ROOM LABORATORY: OPERATING PROCEDURES ............................ 17

I. GENERAL OPERATIONS POLICY ......................................................................................... 17
II. PROPER ATTIRE ................................................................................................................. 17
A. The Need for Gowning ................................................................................................ 17
B. The Gowning Order .................................................................................................... 17
C. Appropriate Street Clothes ......................................................................................... 18
D. Eye Protection ............................................................................................................. 18
E. Additional Protective Wear......................................................................................... 18
III. PERSONAL BEHAVIOR WITHIN THE UTD CLEAN ROOM ..................................................... 18
A. Lab Entry and Exit ...................................................................................................... 18
B. Process Bay and Service Chase Doors ....................................................................... 18
C. Inappropriate Behavior .............................................................................................. 18
D. Visitors to the UTD Clean Room ................................................................................ 19
E. Specific Behavior Guidelines ...................................................................................... 19
IV. EQUIPMENT PROCEDURES .................................................................................................. 20
A. Scheduling Equipment ................................................................................................ 20
B. Equipment Etiquette .................................................................................................... 20
C. Equipment Manuals .................................................................................................... 20
D. Introducing New Equipment ....................................................................................... 20
E. Equipment Repair ....................................................................................................... 20
V. CHEMICAL PROCEDURES .................................................................................................... 21
A. Standard Chemical Inventory and Availability........................................................... 21
B. Chemical Etiquette ...................................................................................................... 21
C. Chemicals and Process Training ................................................................................ 21
D. Introducing New Chemicals ........................................................................................ 21
APPENDIX A: EMERGENCY EVACUATION PLAN ........................................................ 22
I. PURPOSE: EMERGENCY EVACUATION PLANS FOR THE NSERL CLEAN ROOM ...................... 22
II. FIRE ALARM EVACUATION – FROM CLEAN ROOM................................................................. 22
III. TOXIC GAS ALARM EVACUATION – FROM CLEAN ROOM ..................................................... 22
APPENDIX B: SAFETY NOTICE – SYRINGE FILTER .................................................... 24
AGREEMENT TO FOLLOW LABORATORY PROCEDURES ................................................. 25
Appendix 1 C Safety Manual

Overview of Safety and Operating Procedures Manual
This manual provides information on how to perform research within the UTD Cleanroom Research
Laboratory (CRL) safely and considerately. A comprehensive and demonstrated understanding of these
procedures and protocols is required of any individual who works within the CRL since it will protect both the
individual users and the facility. This manual is split into three distinct sections.
The first section describes GENERAL INFORMATION on how one becomes trained and certified to work
within the CRL. It also describes what measures will be taken to ensure compliance with the protocols
described in this manual.
The second section describes SAFETY PROCEDURES and protocols. It includes subsections on the
responsibilities of users in cases of emergency or accident, on the safety equipment distributed throughout the
CRL, and on chemical safety including liquids, solids, gases and cryogens.
The third section describes OPERATING PROCEDURES covering work performed within the CRL.
Examples of these procedures include how to: schedule equipment time and resolve conflicts, become trained
and certified to use equipment in the CRL and bring equipment or unusual chemicals into the lab. It also
includes subsections on specific personal behavior expectations, what to expect if you break the operating
procedures as well as specific information on how to respond to various alarms and situations.
General Information
The following sections on Safety in the CRL and on Operating Procedures for the CRL apply to all users
of the facility. Everyone doing research in the UTD CRL must have a comprehensive and demonstrated
understanding of these procedures and protocols. They must be followed at all times in order to promote a
safe and congenial working environment. Safety is the pre-eminent concern in all situations. Never
perform a job that has high risk.
I. How to obtain training and become certified.
A. Training on Safety and Operating Procedures.
UTD CRL training will be given on a frequent basis to new users of the facility by the CRL staff as
well as required courses through on-line or electronic formats. This training will provide new users with
the CRL requirements for attire, behavior, safety considerations, standards of cleanliness, and equipment
/ processing procedures and training. This is mandatory for all users of the lab. All persons working in
the UTD CRL must obtain safety-training certification from the CRL staff before access is granted to the
facility. This safety training is considered a minimum for entry into the UTD CRL, but does not
constitute training for equipment usage. This training must be obtained separately, but will also be
provided on an as needed basis by the designated UTD CRL staff.
B. Training on Fabrication Equipment
To obtain qualifications to operate any piece of equipment in the clean room the user must first be
trained by clean room staff. Additional training for specific process operations may come from an
experienced user already trained by staff.
II. Violations of Safety, Behavior, or Cleanliness Policies
Persons not abiding by the policies and procedures contained herein may present a significant hazard to
both the other users and the CRL facility itself. It is hoped that simple violations can be corrected by further
training or education of those involved. Persistent violators of these policies will be subject to revocation of
CRL access privileges.
It should be clear that any violation of these standards for safety and operating procedures is inexcusable
and the offender can be disciplined by the CRL Management. In addition, all personal behavior is expected
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to be professional within the lab. Any form of inappropriate personal behavior must be reported and
corrected. Such behavior will be met with disciplinary measures appropriate to the violation(s). A violator
will ordinarily first be asked to correct their behavior and be trained to do so by the clean room staff. If they
do not, further discipline may be applied by the CRL Management including revoking all UTD CRL
privileges for a specified period of time. The CRL Management need not reinstate privileges if it is deemed
unsafe to allow the repeat violator to re-enter the facility.
Appendix 1 C Safety Manual

UTD Clean Room Laboratory: Safety Manual
I. Emergency Procedures / Protocols.
A. Life-Threatening Emergency Procedures.
The prime concern is for the safety of all personnel.
1. Quickly assess the emergency as to best response, and then follow that response.
2. Notify emergency personnel immediately (fire, paramedics, police), THROUGH the UTD police
emergency number.
a. UTD police can be reached at 911 from a UTD phone.
b. UTD police can be reached by cell phone at (972)883-2331.
c. Notify a UTD CRL staff member.
3. Evacuate (leave) any dangerous areas (process bay, entire lab, and/or building). Remember that the
recirculation of clean room air can quickly spread dangerous vapors throughout the entire UTD CRL.
(See Appendix A for emergency evacuation procedures.)
4. Warn others. If you must evacuate, make sure that others are notified and comply with the evacuation.
5. Do not re-enter the dangerous area until an authorized official (UTD police or fire personnel) gives the
all clear notification.
6. Subsequent Clean Room reentry will be authorized by Clean Room Staff.
B. Non-Life-threatening Accident / Emergency Procedures.
The prime concern is for the safety of all personnel, and equipment.
1. Quickly assess the incident / emergency as to best response and then follow that response.
2. Immediately notify available UTD CRL staff
3. Contain Chemical spills as quickly as safely possible. Put chemicals into their safe storage location.
For large spills, notify Clean Room Staff and exit the area.
4. Shut down electrical power to malfunctioning devices using the Red EMO button.
7. Evacuate (leave) any dangerous areas (process bay, entire lab, and/or building) immediately after . (See
Appendix A for specific evacuation procedure.) Remember that the recirculation of clean room air can
quickly spread dangerous vapors throughout the entire UTD CRL.
8. Warn others. If you must evacuate, make sure that others are notified and comply with the evacuation.
C. Fire / Emergency-Evacuation Alarm Procedures.
When the Fire / Emergency- Evacuation Alarm sounds: the safety of all personnel, and equipment is the
prime concern. Add description of NSERL alarm system
1. Evacuate the UTD CRL as quickly and as safely possible.
a. Do NOT remove your clean room clothes. Immediately exit according to the emergency evacuation
plan in Appendix A.
b. Do NOT go looking around to find out why the alarm is sounding, exit immediately.
2. Warn others. Make sure that others are notified and encourage them to comply with the evacuation.
II. Personnel
A. Access
Access to the CRL is a revocable privilege, and is available only during the hours published by the CRL
Management. Users may not enter the UTD CRL outside normal working hours. A UTD “Comet Card”
is required for access by all users.
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B. The “Buddy”
Often we forget the single best safety system available to us in the laboratory, a “buddy.” Never work
alone in any portion of the UTD CRL. The “buddy” must be a colleague who understands what you are
doing enough to competently help you in event of an accident or emergency. It is the responsibility of each
user to obtain a “buddy” during their work by verbally notifying the intended buddy that they are their
designated buddy. When leaving, notify your buddy that you are leaving. Staff can assist in serving as a
“buddy” by advance arrangement with the clean room Management in some circumstances.
C. External (Non-UTD) Users of the Clean Room
External (Non-UTD) users, such as companies or other educational institutions, may be granted
access to the UTD CRL in accordance with approved agreements, policies and regulations by the CRL
Management and the UT-System. In addition, the following conditions must be met:
1. An approved, signed agreement must be on file with UTD and the CRL Management.
2. A list of all user employees must be provided by the external user upon agreement execution and
renewal, as well as with any changes in employees.
3. No currently enrolled student may work as an employee or contractor of an external user in the CRL.
4. External users must adhere to all policies and procedures for the UTD clean room Research
Laboratory.
III. Safety Equipment
Users must know how to use the following safety equipment and their locations.
A. Phone
There are three cordless phones in the clean room. One is located in Bay 5 another in Bay 1 and the third is
mounted on the wall at the central column in the vestibule hallway. Note that if the building power goes out,
these phones quit working.
B. First Aid Kit
The First Aid Kit is located in the CRL in the gowning room on top of the entry table next to the booties
dispenser. This kit will have band-aids, and standard first aid bandages for small abrasions or burns.
C. Fire Extinguishers
There are 2 fire extinguishers Located behind stainless steel doors in the wall at the vestibule columns.
Familiarize yourself with the location of this equipment. Use these only to contain small fires – i.e.
trashcan fires, cr wipe on a hotplate, etc. and after help has been summoned.
D. Fire Blanket
The fire blanket is mounted on the front column located in the UTD CRL vestibule close to the gowning
room entry and resides inside the red cylinder labeled “Fire Blanket”. Wrap a burning victim in this blanket
securely to put out the flames – call for help. Familiarize yourself with the location of this equipment.
E. Chemical Showers and Eye Wash Stations
There are shower / eyewash stations located at the vestibule end of each bay inside the UTD CRL.
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1. Chemical Spills on your clothes / body
Use the shower if you spill dangerous chemicals on your clothes / body. Speed is essential. Do not
hesitate. Working together with your buddy, immediately begin flushing with plenty of water and continue
to flush for at least 15 minutes. While showering, remove your affected clothing so as to remove the source
of chemical danger from yourself. Concerns about modesty must not interfere with avoiding serious injury.
A spare blue smock is hung next to each shower for cover after the shower. Do not put contaminated
clothing back on after rinsing. Summon appropriate medical assistance as soon as possible and get a
thorough medical evaluation.
2. Chemical Splashes into your eyes
Use the eyewash stations located at the end of each bay if chemicals have splashed into your eyes. Call
for help so that your buddy can lead you to the eyewash station and assist. Speed is essential. Do not
hesitate. Let the water flow over your closed eyes for a few moments before beginning to open them. This
will make sure that the water is clear and pure. Wash out your eyes with water for at least 15 minutes after
opening them. If you have splashed chemicals both in your eyes and on your body, then you may want to
use the shower first and rinse your eyes in the shower. After showering, rinse your eyes using the eyewash
station as well. Remove any affected clothing while rinsing your eyes at the eyewash station so as to
remove the source of chemical danger from yourself. Concerns about modesty must not interfere with
avoiding serious injury. A spare smock is hung next to each eyewash station for cover after the rinse. Do
not put contaminated clothing back on after rinsing. Summon appropriate medical assistance as soon as
possible and get a thorough medical evaluation.
F. Automatic Fire Sprinkler System
The UTD CRL has an automatic fire sprinkler system activated by heat. Also, any pressure drop sensed
in the waterline automatically trips the fire alarms and notifies the UTD police.
G. Chemical spill Clean-up / Containment
Notify CRL Staff immediately of the spill. Assist in cleaning the spill ONLY if requested by a CRL
Staff member. There are chemical spill absorbing compounds located at each hood in the clean room. Note
that there are plastic jars of neutralizer granules for acids, bases, and absorber granules for solvent spills.
The general application method is to pour a ring around the spill to initially contain it and then fill in the
ring to complete the absorption and containment.
H. Calcium Gluconate Gel for HF Exposure Treatments
Calcium gluconate gel cream (sometimes called “HF antidote”) is available near the acid hood in a
“toothpaste” tube form. Familiarize yourself with the location of this tube of gel. It can be applied to your
skin (in a topical cream form) and must always be available and within reach whenever HF is used. Apply
the gel all around and on the exposure in lavish amounts immediately. In addition, anyone exposed to HF
must go to an appropriate medical care facility for evaluation and treatment as quickly as safely possible.
The exposure must be reported to the CRL Management.
Calcium gluconate provides extra calcium ions which can bind-up free fluorine ions before they
penetrate your body and cause damage. In cases of skin contact, calcium gluconate gel must be applied
immediately to the area of contact. In cases where systemic damage is a risk, calcium gluconate can be
administered by a healthcare professional using an IV.
See the comments below in the “Acids” section as well.
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IV. Chemical Safety
You must always know the properties of the chemicals you are using in the UTD CRL. In broad terms,
chemicals fall into a few classes: Water, Cyanides, Solvents, Acids and Bases. Other descriptors are often
used to describe chemicals as well. These include “toxic,” “flammable,” “combustible,” “cryogenic” and
the state of the chemical (solid, liquid or gas). These classes and descriptors may not cover all possible
chemical properties, but are nearly always used to characterize our chemicals. The properties of every
chemical you use in the lab can be discovered by examining its Material Safety Data Sheet (MSDS). You
must be familiar with the MSDS information before using any chemical. All chemicals must be physically
transferred into the clean room facility by CRL staff – no exceptions.
A. MSDS sheets
MSDS information is contained in notebooks located on the table just inside the clean room gowning
room..
B. De-Ionized Water
De-ionized water is provided for fabrication process purposes only, is not considered potable water, and
must not be ingested.
C. Cyanides
Cyanides are generally highly toxic compounds that can release a highly toxic gas (for example,
Hydrogen Cyanide, HCN) if they come into contact with an acid. Use of these materials is restricted and
only done with prior approval of the CRL Management in a hood following the safety restriction of the
MSDS sheet completely.
D. Solvents
Solvents may only be used in the solvent hoods and an inventory of typical ULSI grade solvents is
provided. They are often very volatile - (they evaporate very quickly and therefore could get into your
lungs and poison you) - many are known carcinogens, and many are flammable or combustible. Examples
include: Acetone, Isopropyl Alcohol, Ethyl Alcohol, Methyl Alcohol, Methylene Chloride and Benzene.
Clearance for all solvents must be secured from CRL Management prior to their introduction into the clean
room. Note that in general solvents target the central nervous system and especially the female reproductive
organs.
E. Acids
Acids may only be used in the acid hoods and a supply of typical etchants is provided as standard stock
by the clean room. Acids can cause severe body damage on contact: they can chemically burn the body,
they can be toxic, they can cause rapid heating through exothermic reactions (and thermally burn the body)
and they can even initiate explosions. Examples include: Hydrofluoric (HF), (Hydrochloric) HCl, (Sulfuric)
H2SO4, (Nitric) HNO3, (Ammonium Fluoride) NH4F, (Perchloric) HClO4, (Acetic) C2H4O2 and (Buffered
Oxide Etch) Mix of water, NH4F and HF. Note that some acids require special precautions. For example,
perchloric acid cannot be used in a standard acid hood. Clearance for all etchants must be secured from
CRL Management prior to their introduction into the cleanroom.
1. Special Word about HF (Hydrofluoric Acid)
Concentrated HF is considered “extremely” toxic – (4 on the health hazard scale of 0-4). This is
because it is a source of free fluorine ions. Any solution containing a source of free fluorine ions is also
hazardous to your health. A concentrated ammonium fluoride solution is “very’ toxic (3 on the health
hazard scale) and becomes “extremely” toxic when made more acidic, such as in Buffered Oxide Etch
(BOE) mixtures. Consequently, BOE presents the same level of toxic hazard to your body as 49% HF even
Appendix 1 C Safety Manual

though 20:1 BOE has much less “HF” in it (about 7% of volume) than “pure” HF (about 49% of volume). It
is equally hazardous because it also has about 38% NH4F, and is acidic.
On contact, fluorine ions (from the HF) easily pass through skin and tissue. Because HF’s action can be
delayed for many hours, it can distribute throughout your body. The negatively charged fluorine ions bind
very easily and tightly to positively charged calcium and magnesium ions to form insoluble salts (CaF2 and
MgF2 salts form some natural gemstones). In the body, Ca and Mg ions mediate a variety of physiological
processes, such as muscle movement and body chemistry. Calcium is also a chief component in bone. The
result can be several severe forms of damage to your body and even death!
Local tissue damage (at the point of contact) results from free hydrogen ions which cause
corrosive chemical burns and free fluorine ions which cause deep tissue damage including erosion of your
bones.
Systemic conditions include hypocalcemia (loss of calcium) and hyperkalemia (too much
potassium). Since calcium and potassium regulate the beating of your heart, an irregular heartbeat and
cardiac arrest can result. “Deaths have been reported from concentrated acid burns to as little as 2.5% of
body surface exposed to skin contact.” That is the equivalent of a single hand.
Even dilute HF must be treated with extreme caution. It is highly dangerous to your body
because it can poison you without your knowledge. Dilute HF may not cause a visible and painful skin burn
(or tissue burn), and you can be fooled because you do not feel any pain. Even so, the fluorine ions can
soak through the skin and upset your body’s Ca and K balance as well as etch away your bones. The result
may only become extremely painful hours after the exposure.
Calcium gluconate gel cream (sometimes called “HF antidote”) is available near the acid hood in a
“toothpaste” tube form. Familiarize yourself with the location of this tube of gel. It can be applied to your
skin (in a topical cream form) and must always be available and within reach whenever HF is used. Apply
the gel all around and over the exposure in lavish amounts immediately. In addition, anyone exposed to HF
must go to an appropriate medical care facility for evaluation and treatment as quickly as safely possible.
The exposure must be reported to the CRL Management.
Calcium gluconate provides extra calcium ions, which can scavenge free fluorine ions (to form CaF2)
before they penetrate your body and cause damage. In cases of skin contact, calcium gluconate gel must be
applied immediately to the area of contact. In cases where systemic damage is a risk, calcium gluconate can
be administered by a healthcare professional using an IV. Anyone exposed to HF must go to an appropriate
medical care facility for evaluation and treatment. The exposure must also be reported to the clean room
management.
Note also that Hydrogen Fluoride gas is extremely toxic as well. It very easily dissolves in water to
become Hydrofluoric Acid. Gaseous HF can easily become liquid and liquid HF can easily become a vapor;
so HF- and NH4F- containing solutions give off toxic HF fumes. If you breathe these fumes, you are
bringing HF into your lungs where it is rapidly absorbed by the blood stream and distributed throughout
your body. Therefore, HF containing chemical containers may only be opened and used in an appropriately
vented Acid hood with all required safety gear.
F. Bases (Caustics)
Bases (also referred to as caustics) can only be used in an approved hood and a supply of typical caustics
is provided. They can cause severe burns, severe irritation, pain, nausea, vomiting, diarrhea, deep skin
ulcers, coughing, breathing difficulty, shock, blindness, possibly even coma and death. Examples of bases
include: (Potassium Hydroxide) KOH, (Sodium Hydroxide) NaOH, (Ammonium Hydroxide) NH4OH, and
Photoresist Developers. Clearance for all caustics must be secured from CRL Management prior to their
introduction into the clean room..
Appendix 1 C Safety Manual

G. Flammable and Combustible Chemicals
Users must obtain approval prior to introduction into the clean room for any flammable or combustible
chemicals from the CRL Management. These chemicals must be used in approved hoods with appropriate
fire extinguishers/suppression systems.
H. Toxic Chemicals
Many chemicals are toxic in one form or another. See the MSDS sheet for appropriate safety
precautions and then follow those precautions. Users must obtain approval from the CRL Management
prior to introduction into the clean room for any toxic chemicals.
I. Photoresist and Developers
Most photoresists are a mixture of solvents, novolac resins and photo-active compounds. The resulting
chemical can be toxic, flammable and/or irritating. Use these chemicals only in approved ventilated areas,
such as solvent hoods or photoresist spinners. As a reminder, do not breathe the vapors given off by
photoresist as it bakes on a hotplate. Utilize the “hooded” hotplates on the CEE coater and associated bake
stations. This hotplate can be precisely set to any desired temperature and it has an exhausted cover to
capture the escaping vapors.
Most Photoresist Developers are bases. See the Bases section above for further information.
J. Cryogens (Liquid Nitrogen, Liquid Helium, Solid CO2)
Liquid nitrogen, Liquid Argon, Liquid Helium and Solid CO2 (dry ice) are examples of cryogens.
Cryogenic chemicals present a safety hazard due to their extreme cold. Users should be familiar with this
hazard and use appropriate cryogen gloves as well as designated personal protective equipment against the
freezing effects. Under no circumstances should a user allow to contact LN2 with their body. Severe injury
can result from such contact.
All cryogens listed above can displace the oxygen in the air your body needs to live as they evaporate.
Therefore you must only use nitrogen, liquid nitrogen, helium, liquid helium and carbon dioxide in wellventilated
rooms and after having performed an analysis of the amount of air that could be displaced by the
cryogen proposed for use. Provided only a small fraction of the air will be displaced, the cryogen can be
used safely. Keep the room especially well ventilated during use.
Filling of all cryogenic vessels shall be done by CRL Staff. Users should make arrangements in
advance for their needs.
K. Waste Disposal
The CRL has clearly identified waste streams for solvents, acids, caustics, sharps, and other associated
trash. Never pour solvents down the water sink drain! The CRL solvent hoods are equipped with solvent
sinks connected to waste containers under the hood deck that are properly exhausted. New acid hoods are
equipped with acid neutralization facilities, permitting the disposal of diluted acids down the acid waste
drain system, which is drained into the back dock acid neutralization system.
L. Chemical Spills
Notify CRL Staff immediately of the spill. Clean up of chemical spills (outside hoods) shall be
performed only by CRL Staff. After notifying the CRL Staff, cordon off the area and have your “buddy” or
another user restrict access to the area until the CRL Staff member arrives to clean the area up. Small
volume (< 1liter) chemical spills inside of hoods should be cleaned up safely after consultation with CRL
Staff.
Appendix 1 C Safety Manual

M. Unknowns
Never use unknown/unlabeled chemicals. Report any unlabelled chemicals to CRL staff immediately.
All chemicals should be both labeled and dated at all times. The label should describe the chemical in the
container (beaker, flask, bottle, etc.), have an expiration date, the owner contact information, and date.
N. Compressed Gases
Compressed gas cylinders present a significant safety hazard to lab personnel. A broken off valve can
cause high-pressure gas to launch the cylinder causing great physical danger and damage. Leaks hooking
up the cylinder to system lines can cause chemical injury to lungs, fire hazards, etc.
Only personnel authorized by the CRL Management are allowed to change, replace, or otherwise
handle compressed gas bottles. Cylinders are to be properly anchored. Some equipment may require the
use of small gas bottles within the machinery – these will be handled on a case-by-case manner. Toxic gas
bottles may only be stored and used inside designated toxic gas cabinets appropriate for them. Toxic gas
monitors will be employed where necessary for safety. Only authorized personnel may handle these
systems. There are no exceptions.
V. Safety Guidelines
1. Never work alone in the UTD CRL. In addition you must have a spotter “buddy” present for safety.
2. When in doubt, ask questions of experienced personnel before taking any action.
3. Always clean up after yourself and clean the aisles of chairs and other obstructions.
4. Do not work in the UTD CRL if you feel particularly tired or unwell (heavy cold, etc.) or if you have
taken even a small amount of alcohol.
5. For safety reasons, do not sit on worktables or lean on benches or equipment.
6. Contact lenses are not allowed when using chemicals, since vapors can be drawn under the lenses by
absorption and capillary action and concentrated there. Wear prescription glasses and safety glasses
instead.
7. When pouring or refilling liquid N2, proper goggles and insulating gloves are required
8. Always wear complete safety apparel when handling chemicals and follow all safety instructions. An
acid proof apron, face shield, and acid gloves are required when using acids. (Basically, any time you
poke your hand inside an acid hood when acid is present, you should have full “acid armor” on! Beware
that residual drops or small puddles observed inside the acid hood could very well consist of an acid!!)
9. Do not touch your face, nose, mouth, etc. when wearing acid gloves. Skin damage can result from glove
contamination. In addition, skin oils can spoil processes and contaminate samples by transfer from face
to glove to sample.
10. Do not leave hazardous equipment/materials unattended when in use (e.g. chemicals on hotplates,
liquids in beakers in hoods, etc.) Before starting an experiment, the user must label the containers for
his process with all of the following information:
a. User name
b. How to contact the user (phone number required)
c. A complete list of all the chemicals being used or equipment process parameters
d. The date/time the user initiated use of the chemicals
11. Please keep chairs pushed out of the aisle ways when you finish so that an obstacle-free escape route is
maintained.
12. The following chemical types must be stored in separate storage cabinets and properly labeled: a) acids,
b) solvents, and c) bases. Do not place chemicals in the wrong cabinet.
13. When mixing etches, always add acid to water. Never add water to acid. (If you add water to acid,
exothermal mixing energy can cause the water to rapidly heat to the boiling point and splatter a mixture
of water and acid.)
14. Before removing acid gloves, rinse well with water at a sink to remove any remaining acid. Do not
allow water to get inside gloves.
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15. Wear goggles and insulating gloves when pouring liquid N2.
16. Rinse empty chemical bottles 3 times with DI water and label “rinsed.”
A. Chemistry Reminder Summary
1. Acids react with cyanides to produce extremely dangerous hydrogen cyanide gas.
2. Concentrated acids react violently with concentrated bases
3. Acids can cause flammables, such as acetone or other solvents to catch fire.
4. Oxidizers, such as hydrogen peroxide, can cause spontaneous combustion of flammables, such as
solvents.
Appendix 1 C Safety Manual

UTD Clean Room Laboratory: Operating Procedures
I. General Operations Policy
The following bullets present some of the more general operational policies that all users are expected to
follow. Each of these topics is covered in greater detail in the appropriate sections presented later.
1. No food or drink may be brought into any area of the CRL.
2. Regularly wipe down tables and equipment surfaces with DI water and Clean Room Lint-Free
towels. Users may be designated by CRL Management to do this on a regular schedule as well.
3. Always clean up after yourself.
4. No personal items (such as backpacks, makeup, combs, brushes, handkerchiefs, etc.) may be brought
into the UTD CRL or the gowning area.
5. No paper should enter the UTD CRL unless it is UTD CRL certified lint-free.
6. No spray cans or powdered materials are allowed in the UTD CRL or gowning area.
7. No cardboard boxes or packages are to be brought into the UTD CRL.
8. Shoes should be clean and free from dried mud, dirt, etc. before walking over the tacky mat and
putting on the booties.
9. Use the tacky mats to do a final clean of your shoe soles before covering with booties. Make sure
the tacky mat is clean before stepping on it. Remove heavily soiled tacky mats prior to stepping on
them. Dirty mats are a contaminant source.
10. UTD CRL garments are only to be worn inside the UTD CRL areas. The only exception to this rule
is in an emergency. In that case, the garment may not be worn in the clean room after having been
worn outside and must be returned to the designated laundry bin..
11. UTD CRL garments must be laundered on a regular basis and whenever they become frayed from
use or stained from chemical spills/splashes.
II. Proper Attire
Everyone entering the UTD CRL must be properly attired before proceeding into the lab. Proper attire
includes all of the following: appropriate street clothes, including closed toe shoes complete UTD CRL
garments (booties, hoods, UTD CRL smock and gloves) and approved safety glasses.
A. The Need for Gowning
The primary reason for gowning in clean room attire before entering the facility is to maintain the
cleanliness of the facility. Humans are major sources of both contaminants and particulates (dust). The
contamination of the facility by exposure to human skin, hair and street clothes must be minimized to
promote a reasonable research environment. People shed both particles and chemical contaminants
(skin oils, sodium, saliva etc.) that can destroy the ability of researchers to fabricate good devices if not
properly contained.
B. The Gowning Order
Everyone entering the UTD CRL must properly dress in the gowning area before entering. We have
adopted new clean room attire to reduce particulate contamination in the clean room. The correct
gowning order is as follows:
1. Enter the clean room lobby and walk on the sticky mat.
2. Put on clean shoe covers (blue or white booties) at the entry bench,
a. Check the booties for holes or cuts and discard bad booties.
3. Put on a Hair net ensuring that all hair is contained.
4. Put on the jump suit.
5. Put on white shoe covers.
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6. Put on clean room gloves (no powder gloves) folded over the sleeves of the coverall.
7. Put on safety goggles.
The garments are removed in the reverse order when leaving the clean room. The garments are
laundered every week. The laundry schedule calls for all garments to be gathered and put into the
commercial laundry barrel on Friday nights – a staff operation.
C. Appropriate Street Clothes
The proper attire prior to entering the gowning area includes long pants full length socks and closedtoe
shoes with low heels. These are necessary to obtain sufficient protection while working in the lab.
Shorts (or some other forms of dress), bare midriffs, bare feet and open-toe shoes including sandals are
not allowed. They do not adequately protect the user, nor do they adequately protect the clean room
environment from the user. In addition, long flowing garments and jewelry are not allowed. They can
inadvertently contact dangerous materials or catch in a mechanical pinch point.
D. Eye Protection
Everyone in the UTD CRL is required to wear approved eye protection. (This includes visitors to
the UTD CRL.) Contact lenses do not provide adequate eye protection and in fact can be hazardous in
the presence of chemical vapors. Therefore, contact lenses are not allowed in the UTD CRL. Wear
corrective glasses instead. Safety glasses must be worn over corrective glasses and are available in the
gowning area. Please return your safety glasses to the rack when exiting.
E. Additional Protective Wear
Persons performing specific chemical processes, such as working with acids, must wear additional
designated personal protective equipment (PPE) attire. This includes the use of appropriate gloves, face
guards, and chemical aprons for protection against spills or splashes. Such attire is stored in the vicinity
of the acid hood for convenient access. Its’ location is noted during the initial training.
Additionally, workers in the clean room are required to use latex gloves during ordinary handling of
their specimens and equipment, to avoid contact with skin. These gloves should be considered
contaminated when leaving and must be discarded before exiting the clean room. Office doors or other
outside items should not be handled while wearing these gloves, for both your own safety and that of
colleagues or visitors to your office areas.
III. Personal Behavior within the UTD Clean Room
A. Lab Entry and Exit
Entry is only permitted through the main entry door (card reader). Entry or exit through the process
bay doors or the service chase doors is not permitted except in case of emergency. Everyone must swipe
their comet card on the clean room entry card reader even if they are following someone through the
open door.
B. Process Bay and Service Chase Doors
The doors in the vestibule hall are to be considered only emergency exits by users. They are not to
be used for ordinary entry or exit to the clean room, or for thru-the-door material pass-through.
Entry to the chase areas is restricted to the CRL Staff except for special entry accompanied by a staff
member. Specifically, there shall be no crawling under the wall to access the chase by users.
C. Inappropriate Behavior
Any violation of these standards for safety and operating procedures is inexcusable and the offender
can be disciplined by the CRL Management. All personal behavior is expected to be professional within
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the lab. Any form of inappropriate personal behavior must be reported and stopped. Such behavior will
be met with disciplinary measures appropriate to the violation(s). A violator will ordinarily first be
asked to correct their behavior. If they do not, further discipline may be applied by the CRL
Management, including the revocation all UTD CRL privileges for a specified period of time. The CRL
Management need not reinstate privileges if it is deemed unsafe to allow the repeat violator to re-enter
the facility.
D. Visitors to the UTD Clean Room
Visitors may be taken into the UTD CRL provided all of the following requirements have been met:
1. The clean room staff has been apprised of the reason for the visit and has approved the visit.
2. An authorized UTD CRL user must be present to escort a visitor to the UTD CRL. Only persons
who have passed all required training and are authorized to work in the lab are authorized to escort a
visitor. The escort will be held responsible for the safety of his/her visitor; consequently, the escort
must remain with the visitor during the entire visit.
3. All visitors must be properly gowned (clean room garments identifying them as a visitor along with
safety glasses).
4. All visitors must abide by the UTD CRL safety policies and operating procedures. All rules of
safety and personal behavior will remain in effect during the visit. The escort will be held
responsible for any violations.
5. Visitors are not allowed to operate tools.
E. Specific Behavior Guidelines
1. Before operating any tool, sign-in to the logbook.
2. Always cleanup after yourself AS SOON AS you have finished a process or using a tool.
3. Note any tool malfunctions in the associated logbook and also report them to CRL staff .
4. Any debris on the floor or at a work station in the UTD CRL is to be picked up and properly
disposed. Assume the responsibility for a neat, clean and safe work area. Please return your chair to
a safe position out of the aisle way when you get up.
5. Do not operate equipment until first trained by clean room staff.
6. Touching any surface in the UTD CRL requires wearing appropriate gloves.
7. Touching of quartz ware for furnaces is off-limits unless utilizing it in process. Handling quartz
ware in process requires wearing the appropriate PPE, which includes heat resistant gloves when
loading and unloading materials from the furnaces.
8. All materials, samples, etc. that are not in the process of being worked on must be stored in a
designated covered box. Chemicals will NOT be stored in such boxes. ALL OTHER
MATERIALS WILL BE DISPOSED BY CRL STAFF PERIODICALLY.
9. All beakers, graduated cylinders, etc., should be emptied, rinsed and dried at the end of their use and
stored properly. Rinse out empty chemical bottles (3 times minimum) and label “rinsed”.
10. Do not leave hazardous equipment/materials unattended when in use (e.g. chemicals on hotplates,
etc.).
11. Gloves, aprons, safety glasses or face shields are not to be left laying on the worktables or
equipment. Return them to their storage locations.
12. Do not touch your face when wearing plastic or rubber gloves.
13. Do not taste, smell or touch any chemical, vapor or gas.
14. Never mix acids and solvents. Keep all solvents away from acid areas and vice-versa. Do not store
them together. Use the correct chemical hood for each process.
15. Never store a chemical container on the floor.
16. Small amounts of solvents for individual use may be kept inside appropriately labeled squeeze
bottles and stored in the solvent hoods.
17. Use chemicals in well-ventilated chemical hoods.
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18. Never work alone.
19. Dispose of wipes in properly labeled red waste cans.
20. Do not use unlabeled chemicals.
21. Broken wafers and glassware are disposed of in a “sharps” trash-container and not in the regular
trash bin. Make certain the sharps are free of chemicals before disposal.
22. If you break a wafer or piece of glass, the affected area must also be vacuumed to remove the
particles – contact the CRL Staff for assistance.
IV. Equipment procedures
A. Scheduling Equipment
All equipment is presently scheduled according to CRL Management procedures. Contact CRL
Management for details.
B. Equipment Etiquette
Each piece of fabrication or characterization equipment in the UTD CRL will have one or more
designated modes of operation. These will be detailed in operation manuals accompanying each
machine. These modes are the only accepted modes in which each machine may be operated. If users
need to operate outside of the standard operational boundaries, they must first obtain permission from
the lab staff. The machine must be returned to standard operational conditions and parameters at the
conclusion of the special operation.
C. Equipment Manuals
Equipment manuals are continuously being developed by the clean room staff and are periodically
posted on the clean room web site which is embedded in the general UTD web site under “Centers” and
listed as “Clean Room.” In the clean room section you can find the equipment manuals under
“Manuals.”
D. Introducing New Equipment
A goal of the lab is to be flexible and provide required capability to all users. It is expected that
from time to time, users will want to introduce new equipment into the UTD CRL. Introduction of
anything new into the UTD CRL without the approval of the CRL Management is prohibited. Proposals
must be provided sufficiently in advance to the CRL Management so that its safety and compatibility
with other aspects of the lab can be managed and supported in a safe and clean manner. Final decisions
on the appropriateness of such new introductions to the UTD CRL rest with the management.
E. Equipment Repair
Only authorized personnel (designated CRL staff) are permitted to repair equipment. Also, no
machines may be altered from their normal operating conditions without the express permission of staff.
During the time the special conditions exist, a sign must be displayed to note the conditions. When the
experiment is completed with the machine out of its normal condition, the machine must be returned to
normal operating conditions.
Report any malfunctioning equipment to CRL staff as soon as possible. Do not leave it to be
discovered by the next user.
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V. Chemical Procedures
A. Standard Chemical Inventory and Availability
All chemicals used in the CRL facility must be approved by the CRL Management and inventoried.
Chemicals can not be brought into the CRL facility by users without the explicit approval of the
CRL Management. Users requiring fresh chemicals which have been depleted in the CRL stock must
contact the CRL Staff, who will transport those chemicals safely to the CRL facility for users.
B. Chemical Etiquette
All users are required to follow all established procedures for proper handling of any chemical that
they use in the clean room. This includes providing the lab management with appropriate
documentation (MSDS required, including an electronic copy mailed to the safety officer), proper
storage of the chemicals within the lab or adjacent areas, correct use of the chemicals in their processes,
proper disposal of used chemicals.
C. Chemicals and Process Training
Users are responsible for the development of specific chemical processes and recipes for their own
needs. Training on these recipes is the responsibility of the user, and details on the training must be
provided to the CRL Management. General safety practices associated with the usage, storage and
handling of chemicals is provided during the certification process, but this training is no substitute for
the detailed safety training required for user-specific recipes. Certain chemicals are discussed during the
annual training and broad classes of chemicals are discussed in the safety manual.
D. Introducing New Chemicals
A goal of the lab is to be flexible and provide required capability to all users. It is expected that
from time to time, users will want to introduce new chemicals, or processes into the UTD CRL.
Introduction of anything new into the UTD CRL without the expressed knowledge and permission of the
CRL Management is prohibited. Proposals must be provided sufficiently in advance to the CRL
Management so that its safety and compatibility with other aspects of the lab can be managed and
supported in a safe and clean manner. MSDS sheets for the proposed chemicals must be included as
part of the request. Final decisions on the appropriateness of such new introductions to the UTD CRL
rest with the management. Before any new chemical is introduced to the clean room, an electronic copy
of the MSDS sheet must be mailed to the staff safety officer. All chemicals and materials must be
transferred into the clean room by CRL staff – no exceptions.
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Appendix 1 C Safety Manual
Appendix A: Emergency Evacuation Plan
I. Purpose: Emergency Evacuation plans for the NSERL Clean Room
II. Fire Alarm Evacuation – from Clean Room
Vestibule hallway Red Light and White Strobe light Flashing and Horn sounding with human voice
instructions:
o Exit immediately (without removing smocks) through the sliding glass doors at the end of the
Bay (Red Arrows in Figure 1)
Take note of who is in the bay with you and insure that everyone exits.
o Proceed straight through the wooden emergency Exit doors immediately in front of each bay.
o Turn right and exit the building through the wood office area exit door.
o Go to the grassy area or parking lot away from the building.
Gather with other Clean Room users for head count.
o Do not go back into the building until the Fire Department sounds the all clear.
Options
o If a fire or other obstruction is between you and the preferred exit door, exit through the back
doors into the back hallway, turn left and go around to the front of the building through the
hallway to the elevator lobby and out to the grassy area or parking lot. (Blue Arrows in Figure 1)
III. Toxic Gas Alarm Evacuation – from Clean Room
Toxic Gas Monitor System Light Yellow or Red – located in the upper South East corner of each bay
(Green Circles in Figure 1)
o Exit immediately (without removing smocks) through the sliding glass doors at the end of the
Bay
Take note of who is in the bay with you and insure that everyone exits.
Proceed straight through the wooden emergency Exit doors immediately in front of each
bay.
If the light is yellow, stop in the Clean Room office area until it clears or turns red.
If it turns Red, exit the building through the wood office area exit door.
Go out of the building to the grassy area or parking lot away from the building.
Gather with other Clean Room users for head count.
Do not go back into the building until the Fire Department sounds the all clear.
o If the light is flashing Blue, notify a Clean Room Staff member immediately. Call staff if this
happens on a weekend. Staff phone numbers are posted above the vestibule phone on the center
column.

Figure 1. Clean Room Exit Paths
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Appendix B: Safety Notice – Syringe Filter
Roger Robbins 2/2/2009 Lord High Chief
Safety Officer of the Entire Clean Room
On January 29, 2009, the Clean room experienced a minor accident whereby liquid from a syringe with
a filter squirted onto the face of a student. The student had loaded a viscous liquid into a 1 ml syringe and
attached a filter to the nozzle to apply the material to a sample. Since the fluid was viscous, the student had to
apply a large force to the plunger to force the fluid through the filter. The problem was that the syringe and
filter were held on by hand because of the design of the syringe. The applied pressure forced separation of the
filter from the syringe and allowed a stream of fluid to erupt, hitting the student in the face.
Because of the possible serious consequences of this type of accident and the currently common use of
this application method in the Clean Room, the Clean Room has decided to provide Luer Lock syringes to allow
locked attachment between syringe and filter. The new syringes are 3 ml size and are located in a labeled tray
on the top shelf of the Hot Plate table next to the resist transfer pipettes. Unlocked 1 ml syringes should not be
used with a filter.
Figure 1. New Rule: No filters allowed on 1 ml syringes.
Figure 2. New 3 ml Luer Lock syringes with secure filter attachment provision are supplied by the Clean Room
and are located in a labeled tray on the top shelf of the hot Plate table next to the resist transfer pipettes in Bay
2.

Appendix 1 C Safety Manual
AGREEMENT TO FOLLOW LABORATORY PROCEDURES
I _____________________ have read and fully understand the UTD Cleanroom Laboratory Rules, Safety
Manual and Operating Procedures. I acknowledge that my activities in the CRL and associated areas may be
monitored electronically. I further agree to abide the content of these documents, and comply with any other
instructions provided by the CRL Management and Staff. I also understand that these documents and
instructions can be amended at any time.
Signature Date
Printed Name:_________________________
Title: _________________________
Company Represented (if applicable): ________________________________