Optoelectronics with Carbon Nanotubes

Optoelectronics with Carbon Nanotubes Optoelectronics with Carbon Nanotubes

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The CNTs produced for this study were all known to be single-wall nanotubes (SWNTs) from their prior characterizations 100-102 . The arc-discharge method was the first one used in the discovery of CNTs 2, 3, 103 . It has since been improved to produce long, aligned bundles of SWNTs suitable for electronic and optical experiments at the single-tube level 100 . Liu et al. successfully synthesized ropes of high- quality SWNTs with the individual SWNT diameter of about 1.7 nm by creating a high direct- current plasma arc between two graphite rods with appropriate metal catalysts (nickel and cobalt) and a growth promoter (sulfur). The arc-discharge SWNTs used in this study were produced by the same group at Shenyang National Laboratory for Materials Science, Institute of Metal Research in China. Its diameter range was determined to be 1.8 nm to 2.2 nm by independent TEM measurements of tubes from the same batch. Similarly to arc-discharge, laser ablation produces bulk bundles of CNTs. This technique utilizes continuous or pulsed high-intensity laser that ablates a carbon target containing metal catalysts (nickel and cobalt). CNTs form as the laser-evaporated carbon condenses in a 1200 °C furnace, and are then collected by an inert gas flow 102 . Van der Waals interactions cause the formation of bundled ropes that consist of hundreds of SWNTs each. The laser ablation sample used was synthesized at Rice University and consisted of the smallest diameter range of all the samples used. Statistics using the TEM have shown the diameters to be 0.6 nm to 1.5 nm, centered around 1.0 nm 56 . Using this sample, a large-scale study of CNT field-effect transistor (CNTFET) transport was conducted with three different contact metals, giving us a good electrical characterization of back-gated CNTFETs and better understanding of the role of the work functions of contact metals 56 . While the previous two methods produce CNT bundles which require chemical processing and sonication to be separated into individual tubes, the CVD approach allows for a direct growth of clean, spatially-separated CNTs on the substrate. Catalyst particles dispersed in solution are spun on a sample surface and heated in a tube furnace through which a hydrocarbon gas flows. CVD eliminates the need for sonication to unbundle individual CNTs, avoiding extra chemical and/or physical stress that could contribute to unwanted defects. Defects and chemical residues can significantly affect the properties of CNTs and could complicate the interpretation of experimental results. The CVD tube growth parameters had been tailored to grow small- 29

diameter (< 2 nm) SWNTs at IBM T. J. Watson Research Center where all the devices were fabricated. CNT film devices were made from laser-ablation grown bulk nanotubes dispersed in a surfactant (sodium dodecyl sulphate or SDS) solution. Via density gradient ultracentrifugation, the sample was purified to ~99 % semiconducting CNTs with a narrow diameter range 98 . The average length of individual tubes after the processing was about 1 μm. Stripes of individual tubes and bundles of ~10 μm width were self-assembled by a mechanical slip-stick process 99 . The SDS was subsequently removed by annealing at 600 °C for 60 seconds in argon. The sample used for this work had been assembled and processed previously for a CNT film FET study 99 . 2. Device fabrication i. CNTFETs For single-tube devices, CNTs produced by laser ablation or arc-discharge method were suspended in 1, 2-dichloroethane by sonication at a medium power setting for about 30 minutes, which was found sufficient to separate CNT bundles into individual tubes. The resulting tubes range in length from sub-micron to ~10 μm, with the majority of them in the 1 to 5 μm range. The solution was drop-cast onto a highly p-doped Si wafer with a 100 to 300 nm thermally- grown SiO2 layer. After waiting about 30 seconds for tubes to adhere to the surface by van der Waal forces, the extra solution was blown off by dry nitrogen gas. The solution concentration was adjusted until the surface density of the nanotubes imaged with an SEM was determined to be spatially separated, in the order of 10 CNT per 1000 μm 2 . While the spatial resolution of the SEM does not approach nanometers, imaging at the accelerating voltage of 1 kV distinctly scatters electrons off of CNT surface and enables us to determine the placement of individual tubes. Contact electrodes were written via standard electron-beam lithography. The distance between electrodes is 1 μm. Ti = 0.5 nm/Pd = 20~30 nm/Au = 20~30 nm were deposited via e- beam evaporation. The very thin Ti layer is used for adhesion and does not uniformly cover the 30

The CNTs produced for this study were all known to be single-wall nanotubes (SWNTs) from<br />

their prior characterizations 100-102 .<br />

The arc-discharge method was the first one used in the discovery of CNTs 2, 3, 103 . It has<br />

since been improved to produce long, aligned bundles of SWNTs suitable for electronic and<br />

optical experiments at the single-tube level 100 . Liu et al. successfully synthesized ropes of high-<br />

quality SWNTs <strong>with</strong> the individual SWNT diameter of about 1.7 nm by creating a high direct-<br />

current plasma arc between two graphite rods <strong>with</strong> appropriate metal catalysts (nickel and cobalt)<br />

and a growth promoter (sulfur). The arc-discharge SWNTs used in this study were produced by<br />

the same group at Shenyang National Laboratory for Materials Science, Institute of Metal<br />

Research in China. Its diameter range was determined to be 1.8 nm to 2.2 nm by independent<br />

TEM measurements of tubes from the same batch.<br />

Similarly to arc-discharge, laser ablation produces bulk bundles of CNTs. This technique<br />

utilizes continuous or pulsed high-intensity laser that ablates a carbon target containing metal<br />

catalysts (nickel and cobalt). CNTs form as the laser-evaporated carbon condenses in a 1200 °C<br />

furnace, and are then collected by an inert gas flow 102 . Van der Waals interactions cause the<br />

formation of bundled ropes that consist of hundreds of SWNTs each. The laser ablation sample<br />

used was synthesized at Rice University and consisted of the smallest diameter range of all the<br />

samples used. Statistics using the TEM have shown the diameters to be 0.6 nm to 1.5 nm,<br />

centered around 1.0 nm 56 . Using this sample, a large-scale study of CNT field-effect transistor<br />

(CNTFET) transport was conducted <strong>with</strong> three different contact metals, giving us a good<br />

electrical characterization of back-gated CNTFETs and better understanding of the role of the<br />

work functions of contact metals 56 .<br />

While the previous two methods produce CNT bundles which require chemical<br />

processing and sonication to be separated into individual tubes, the CVD approach allows for a<br />

direct growth of clean, spatially-separated CNTs on the substrate. Catalyst particles dispersed in<br />

solution are spun on a sample surface and heated in a tube furnace through which a hydrocarbon<br />

gas flows. CVD eliminates the need for sonication to unbundle individual CNTs, avoiding extra<br />

chemical and/or physical stress that could contribute to unwanted defects. Defects and chemical<br />

residues can significantly affect the properties of CNTs and could complicate the interpretation<br />

of experimental results. The CVD tube growth parameters had been tailored to grow small-<br />

29

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