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Slides - CASA - Jefferson Lab

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Selection of piezo actuators<br />

Positioning and/or<br />

stabilisation<br />

(< 20 % mechanical<br />

limit)<br />

20 MPa for<br />

dynamic behaviour<br />

Range<br />

30 μm<br />

Prestress<br />

Dimensions<br />

Resolution<br />

0.1 nm<br />

HVPZT or LVPZT<br />

Resonance<br />

frequency and<br />

rigidity<br />

Force/load<br />

capacity<br />

Required power,<br />

frequency range controller<br />

As high as<br />

possible<br />

Up to<br />

100Kg<br />

Weight<br />

compensating<br />

spring,<br />

reduces<br />

range<br />

Assembly<br />

CLICMeeting100409 C. Hauviller 34

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