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Slides - CASA - Jefferson Lab

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Actuators<br />

First selection parameter: Sub nanometre resolution and precision<br />

Actuator mechanisms with moving parts and friction excluded<br />

(not better than 0.1 μm, hysteresis)<br />

Solid state mechanics<br />

Piezo electric<br />

materials<br />

Magneto Strictive<br />

materials<br />

Electrostatic plates<br />

Electro magnetic<br />

(voice coils)<br />

Shape Memory<br />

alloys<br />

Electro active<br />

polymers<br />

High<br />

rigidity<br />

No rigidity,<br />

ideal for<br />

soft<br />

supports<br />

Slow, very non linear and high hysteresis, low rigidity, only traction<br />

Slow, not commercial<br />

+ Well established<br />

- Fragile (no tensile or shear forces), depolarisation<br />

-Rare product, magnetic field, stiffness < piezo,<br />

- force density < piezo+ No depolarisation,<br />

symmetric push-pull<br />

Risk of break through, best results with μm<br />

gaps, small force density, complicated for<br />

multi d.o.f. not commercial<br />

Heat generation, influence from stray<br />

magnetic fields for nm resolution<br />

CLICMeeting100409 C. Hauviller 33

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