Slides - CASA - Jefferson Lab

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State of art of actuators Table of Contents • Introduction and requirements • Comparison of actuator principles – Different actuators • Piezo electric actuators • Electro-magnetic actuators • Magneto striction • Electro-static plates • Shape memory alloys – Scaling laws • Design of actuators for sub nanometer positioning – Hysteresis free guidance – Non contact direct metrology – X-Y kinematics – Trajectory control and dynamic accuracy + resolution considerations – Limitations • Different configurations of piezo based actuators • Providers of nano actuators and vibration isolation • Nano positioning applications • Bench mark projects • References CLICMeeting100409 C. Hauviller 32
Actuators First selection parameter: Sub nanometre resolution and precision Actuator mechanisms with moving parts and friction excluded (not better than 0.1 μm, hysteresis) Solid state mechanics Piezo electric materials Magneto Strictive materials Electrostatic plates Electro magnetic (voice coils) Shape Memory alloys Electro active polymers High rigidity No rigidity, ideal for soft supports Slow, very non linear and high hysteresis, low rigidity, only traction Slow, not commercial + Well established - Fragile (no tensile or shear forces), depolarisation -Rare product, magnetic field, stiffness < piezo, - force density < piezo+ No depolarisation, symmetric push-pull Risk of break through, best results with μm gaps, small force density, complicated for multi d.o.f. not commercial Heat generation, influence from stray magnetic fields for nm resolution CLICMeeting100409 C. Hauviller 33
Page 1 and 2: C L I C Outline • Short overview
Page 3 and 4: C L I C CLIC main parameters http:/
Page 5 and 6: 5 Module types and numbers Type 1 T
Page 7 and 8: R&D,Conceptual Design&Cost Estimati
Page 9 and 10: C L I C • Two Beam Acceleration:
Page 11 and 12: C L I C CLIC Feasibility Issues H.S
Page 13 and 14: Dynamic imperfections C L I C • I
Page 15 and 16: Stabilization of the quadrupoles of
Page 17 and 18: How to measure the performances? Co
Page 19 and 20: Mock-up built in 2004 (S. Redaelli)
Page 21 and 22: CLICMeeting100409 C. Hauviller 21
Page 23 and 24: Contents • R & D Actions - Sensor
Page 25 and 26: Sensors How to measure nanometers a
Page 27 and 28: 5nm Vertical Lateral 2 nm Measured
Page 29 and 30: Characterize vibrations/environment
Page 31: Program of work Actuators • State
Page 35 and 36: Actuators An example of the integra
Page 37 and 38: Stabilization strategies CLICMeetin
Page 39 and 40: How to support the quadrupoles? Sof
Page 41 and 42: Option LAPP: Soft support and activ
Page 43 and 44: Test Mock-ups (CERN) Rigid support
Page 45 and 46: Main Beam Mock-up • Functionaliti
Page 47 and 48: Outline • Short overview of the C
Page 49 and 50: Validation of Quad stabilization pr
Page 51: Diode detectors on PU-Q8W
Page 54 and 55: Amplitude Calibration Measured in p
Page 56 and 57: •The CESR-TA experiment has been

Slides - CASA - Jefferson Lab

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