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WAVES AND VIBRATIONS IN INHOMOGENEOUS STRUCTURES ...

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Topology optimised broadband photonic<br />

crystal Y-splitter<br />

P.I. Borel, L.H. Frandsen, A. Harpøth, M. Kristensen,<br />

J.S. Jensen and O. Sigmund<br />

A planar photonic crystal waveguide Y-splitter that exhibits largebandwidth<br />

low-loss 3 dB splitting for TE-polarised light has been<br />

fabricated in silicon-on-insulator material. The high performance is<br />

achieved by utilising topology optimisation to design the Y-junction<br />

and by using topology optimised low-loss 60 bends. The average<br />

excess loss of the entire component is found to be 0.44 0.29 dB for a<br />

100 nm bandwidth, and the excess loss due to the Y-junction is found<br />

to be 0.34 0.30 dB in a 175 nm bandwidth.<br />

Introduction: A photonic crystal (PhC) is an optical material in which the<br />

refractive index is periodically modulated [1, 2]. Planar PhC structures are<br />

often defined as triangular arrangements of air holes in a high dielectric<br />

material, since this configuration may give rise to a large photonic bandgap<br />

(PBG) for the transverse-electric (TE) polarisation. Such PhC structures<br />

have recently gained a lot of consideration as they potentially allow for the<br />

realisation of ultra-compact photonic integrated components [3–8]. Planar<br />

PhC waveguides (PhCWs) are typically formed by locally breaking the<br />

periodicity along a specific direction of the PhC lattice. Most of the<br />

research within PhCs has hitherto relied on intuitive design approaches<br />

based on physical arguments, possibly combined with iterative trial-anderror<br />

procedures, to improve the performance of the PhC component.<br />

Recently, we have proposed to use a systematic inverse design strategy<br />

called topology optimisation [9] to optimise the performance of PhCW 60<br />

and 120 bends [10, 11]. In this Letter, we consider the important and<br />

commonly encountered 50=50 Y-splitter and utilise topology optimisation<br />

to design a silicon-on-insulator (SOI) based PhCW Y-splitter having a<br />

smooth broadband spectral performance. A transmission bandwidth of<br />

more than 100 nm with less than 1 dB excess loss is obtained for a<br />

fabricated PhCW component with a size smaller than 10 15 mm.<br />

initial 50 500 final<br />

1 mm<br />

Fig. 1 Scanning electron micrograph of fabricated structure containing<br />

topology-optimised Y-junction and 60 bends<br />

Top panel shows material distribution in Y-junction design domain<br />

during optimisation procedure after 0, 50, 500 iterations, and for final<br />

topology-optimised structure<br />

Design and fabrication: We utilise e-beam lithography and standard<br />

anisotropic reactive-ion etch to define the PhC structures in the top<br />

silicon layer of a SOI material. The PhC is defined by circular air<br />

holes arranged in a triangular lattice and the PhCWs are formed by<br />

removing one row of holes in the G-K direction of the crystal lattice.<br />

The lattice period is L ’ 400 nm and the diameter of the holes<br />

D ’ 275 nm.<br />

Several PhCW based Y-splitters have previously been reported in the<br />

literature [4–7]. Attempts have been made to improve the performance<br />

by adding, removing and=or resizing holes in the splitting region.<br />

1<br />

2<br />

However, the useful bandwidth ( 30 –50 nm) of experimentally<br />

realised Y-splitters has typically been almost one order of magnitude<br />

smaller than the bandgap. The topology optimisation design method<br />

implies that the distribution of silicon and air is freely interchanged in<br />

the chosen design domain with no geometrically enforced restrictions.<br />

The optimisation algorithm is based on a 2D frequency-domain finiteelement<br />

solver. The solver is used repeatedly in an iterative scheme, in<br />

which the material distribution is updated every iteration based on<br />

analytical sensitivity analysis and use of a mathematical programming<br />

tool [9]. The Y-junction is optimised by modifying the material<br />

distribution in such a way that the transmission (power flow) through<br />

both output ports of the splitter is maximised. The material is only<br />

redistributed in a small design area of approximately 1.5 2.5 mm as<br />

illustrated in the top panel of Fig. 1. During the optimisation procedure<br />

the power flow is evaluated for six frequencies in a chosen frequency<br />

range so that a broadband component is achieved. The optimised<br />

splitter design was obtained after approximately 1200 iterations of the<br />

optimisation algorithm. It is seen that the optimised splitter region has<br />

been smoothened in both the inner and outer sides of the two waveguide<br />

branches of the splitter region. However, the smoothening is not trivial<br />

as the splitter region contains several separate complex structures.<br />

Fig. 1 shows a scanning electron micrograph of the fabricated PhCW<br />

Y-splitter containing the topology-optimised Y-junction followed by two<br />

topology-optimised 60 bends [11]. The PhC structures have been<br />

fabricated without applying any special proximity corrections to the<br />

irregular shaped holes during the e-beam patterning. The designed<br />

structure is symmetric and the minor asymmetries of the fabricated<br />

splitter are due to fabrication tolerances.<br />

normalised transmission, dB<br />

0<br />

-2<br />

-4<br />

-6<br />

-8<br />

-10<br />

-12<br />

-14<br />

-16<br />

-18<br />

-20<br />

ELECTRONICS LETTERS 20th January 2005 Vol. 41 No. 2<br />

l, nm<br />

1250 1300 1350 1400 1450 1500<br />

TO output 1<br />

TO output 2<br />

DUV written<br />

0.32 0.31 0.30 0.29 0.28 0.27<br />

normalised frequency L/ l<br />

Fig. 2 Measured normalised transmission against normalised frequency<br />

from two output ports for topology-optimised (TO) component shown in<br />

Fig. 1 (solid and dashed lines, respectively) (in this case, normalised<br />

frequency corresponds to wavelength scale at top of graph)<br />

Also shown is measured normalised output against normalised frequency from<br />

previously fabricated Y-junction with consecutive 60 bends (dotted lines)<br />

[6]. For this component normalised frequency range roughly corresponds to<br />

1350–1600 nm. Horizontal dotted line at 3 dB corresponds to zero excess<br />

loss of component<br />

Results: The fabricated Y-splitter has been optically characterised using a<br />

setup described in detail in [10, 11]. Fig. 2 shows the normalised<br />

transmission for TE polarised light from the two output ports of the<br />

complete PhCW structure displayed in Fig. 1. The spectra have been<br />

normalised to the transmission spectrum for a straight PhCW of same<br />

length in order to extract the performance of the Y-junction and subsequent<br />

60 bend. The topology-optimised splitter displays smooth, low-loss, and<br />

nearly indistinguishable transmission spectra for the two output ports. The<br />

complete component is experimentally found to have a 100 nm bandwidth<br />

with an average loss of 0.44 0.29 dB. This value includes excess losses<br />

due to both the Y-junction and the subsequent 60 bend. Also shown in<br />

Fig. 2 is the performance of a previously reported low-loss Y-splitter [4]<br />

designed using intuitive design ideas and fabricated using deep UV (DUV)<br />

lithography. In contrast to the topology-optimised splitter, the spectrum for<br />

the DUV written Y-splitter is seen to be rather spiky, indicating resonant<br />

and high-loss behaviour often observed for PhCW components.<br />

Fig. 3 displays the normalised transmission of the topologyoptimised<br />

Y-splitter corrected for the loss introduced by the 60 bend<br />

[11]. Hence, this graph presents the excess loss due to the Y-junction<br />

itself. The excess loss is found to be 0.18 0.20 and 0.34 0.30 dB for<br />

100 and 175 nm bandwidths, respectively. Hence, the topology optimised<br />

design opens up for a practical implementation of the Y-splitter<br />

without the need for delicately matching a narrow operational

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