MEMS Accelerometers

Economic Justification
It is possible to add a
layer with a density of
16.6 g/cm 3 .
– Assume this layer is 0.5
microns thick
This makes the density
of the proof mass 5.2
g/cm 3
– (Silicon [ρ=2.3g/cm 3 ] is 2
microns thick, 80% of
volume, rest is metal layer)
MEMS Accelerometer