MEMS Accelerometers
MEMS Accelerometers
MEMS Accelerometers
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Economic Justification<br />
It is possible to add a<br />
layer with a density of<br />
16.6 g/cm 3 .<br />
– Assume this layer is 0.5<br />
microns thick<br />
This makes the density<br />
of the proof mass 5.2<br />
g/cm 3<br />
– (Silicon [ρ=2.3g/cm 3 ] is 2<br />
microns thick, 80% of<br />
volume, rest is metal layer)<br />
<strong>MEMS</strong> Accelerometer