MEMS Accelerometers

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Quick-Study: Purpose and Function Purpose: microchip sensor to detect acceleration Functional Features: Proof Mass Suspension Arms Substrate with Circuitry Axis of Response Sensing Function Capacitive (Analog Devices) <strong>MEMS</strong> Accelerometer
Quick Study: Control Variables Dash pot, c Mass, m Spring, k Motion Limiters Modeled as a spring/dashpot: F = ma = kx + cx . Model gives control relationships... 1. Static sensitivity: x static (s) a(s) M = K = 1 ω r 2 ω r = (K / M) 1/2 = Natural Resonance Frequency 2. Total Noise: = (4KTc) M 1/2 TN Increased Increased mass mass more sensitive, less noise <strong>MEMS</strong> Accelerometer
Page 1 and 2: MEMS Accelerometers Constantine, Fr
Page 3 and 4: Quick-Study: Background MEMS - Micr
Page 5 and 6: Quick-Study: Purpose and Function P
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Page 17 and 18: Techniques to Add Mass Ion Implanti
Page 19 and 20: CVD of Metal Benefits - Rich histor
Page 21 and 22: Best Choice Sputtering - Problems w
Page 23 and 24: Modes of Failure Stiction - 2 clean
Page 25 and 26: Economic Justification Given that t
Page 27: QUESTIONS? MEMS Accelerometer

MEMS Accelerometers

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