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Ph. D. THESIS 2009

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4.5.3. 3D structures<br />

The 3D structure was written in a thick film with a thickness estimated at<br />

30m, using a 100x<strong>Ph</strong>3 immersion-oil objective lens to deliver 15 mW to the<br />

sample. It is important to mention that the actual transmission of the optical<br />

microscope set-up between laser output and the focal point is 43%. That is to<br />

say that a given 15mW output of laser corresponds to 6-7mW sent at the focal<br />

point within the material.<br />

a b<br />

Figure 26. Optical images of a 3D woodpile with a period of 2.5 m, 7x7 lines<br />

per layer and 20 m height: (a) in transmitted light with x100 oil-immersion<br />

objective; (b) in dark-field with x20 objective.<br />

The woodpile-like structure is a quadratic prism, with 15 m width of base<br />

along x and y axis, and 20 m total height. The three-dimensional object<br />

consists of 10 layers. Each layer contains 7 parallel lines with a period of 2.5<br />

m, which are oriented alternatively, on X and Y, layer by layer. The height of<br />

each layer is about 2 m, with a 0.2 m step size for Z-axis and 10 integer dzunits.<br />

17

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