Enhanced Polymer Passivation Layer for Wafer Level Chip Scale ...
Enhanced Polymer Passivation Layer for Wafer Level Chip Scale ... Enhanced Polymer Passivation Layer for Wafer Level Chip Scale ...
Table 2.2 Comparison of Wafer Level Chip Scale Packaging Technologies[6] 2.2.2 WLCSP Process Flow In the semiconductor industry, front-end corresponds to the wafer fabrication process while back-end corresponds to product assembly, packaging and testing operations [36]. There are two types of back-end process flows, one is for wafers with in-situ bump formation and the other is for wafers requiring the placement of preformed solder balls for larger bumps. Figure 2.5 shows two separate paths for the backend processing of bumped wafers. One processes wafers with bumps already formed in the bumping front end and the other includes the process steps required for reflowing preformed solder balls [37]. 20
In-Situ Bumped Wafers Placed Preformed Balls Wafer Taping Wafer Grinding Wafer Detaping Wafer laser making Wafer map conversion Wafer probe test Wafer map merge Wafer 3D bump AOI Wafer mount Wafer saw/clean Wafer bump side AOI Wafer Pick&Place/Insp Pack Figure 2.5 Bumping Backend Process Flow [37] 21 Wafer Taping Wafer Grinding Wafer Detaping Wafer laser making Wafer fluxing Wafer ball placement Wafer solder ball reflow Wafer solder ball clean
- Page 1 and 2: Enhanced Polymer Passivation Layer
- Page 3 and 4: SolderBrace coatings were low tempe
- Page 5 and 6: Table of Contents Abstract ........
- Page 7 and 8: 4.4 Failure Analysis ..............
- Page 9 and 10: List of Figures Figure 1.1 Trends i
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- Page 13 and 14: CHAPTER 1 INTRODUCTION In the era o
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- Page 17 and 18: 1.4 Solder Joint Fatigue Figure 1.2
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- Page 25 and 26: 2.1 Chip Scale Package Technology C
- Page 27 and 28: Mountable with conventional assembl
- Page 29 and 30: Figure 2.3 Cross section of a typic
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- Page 35 and 36: of solder joint failure, and they o
- Page 37 and 38: (a) (b) Figure 2.8(a). Metalized ph
- Page 39 and 40: "underfilled" structure distributes
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- Page 47 and 48: CHAPTER 3 WLCSP DIE FABRCIATION In
- Page 49 and 50: Table 3.1 Test Die used for Reliabi
- Page 51 and 52: Figure 3.4 Fabrication Process Flow
- Page 53 and 54: spin coating. A layer of light sens
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- Page 57 and 58: 10. Final cleaning: After the passi
- Page 59 and 60: Cyclopentanone, a colorless liquid
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- Page 65 and 66: 6. Post-UV exposure bake: This step
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Table 2.2 Comparison of <strong>Wafer</strong> <strong>Level</strong> <strong>Chip</strong> <strong>Scale</strong> Packaging Technologies[6]<br />
2.2.2 WLCSP Process Flow<br />
In the semiconductor industry, front-end corresponds to the wafer fabrication process<br />
while back-end corresponds to product assembly, packaging and testing operations [36]. There<br />
are two types of back-end process flows, one is <strong>for</strong> wafers with in-situ bump <strong>for</strong>mation and the<br />
other is <strong>for</strong> wafers requiring the placement of pre<strong>for</strong>med solder balls <strong>for</strong> larger bumps. Figure 2.5<br />
shows two separate paths <strong>for</strong> the backend processing of bumped wafers. One processes wafers<br />
with bumps already <strong>for</strong>med in the bumping front end and the other includes the process steps<br />
required <strong>for</strong> reflowing pre<strong>for</strong>med solder balls [37].<br />
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