Enhanced Polymer Passivation Layer for Wafer Level Chip Scale ...

Enhanced Polymer Passivation Layer for Wafer Level Chip Scale ... Enhanced Polymer Passivation Layer for Wafer Level Chip Scale ...

etd.auburn.edu
from etd.auburn.edu More from this publisher
09.06.2013 Views

Table 2.2 Comparison of Wafer Level Chip Scale Packaging Technologies[6] 2.2.2 WLCSP Process Flow In the semiconductor industry, front-end corresponds to the wafer fabrication process while back-end corresponds to product assembly, packaging and testing operations [36]. There are two types of back-end process flows, one is for wafers with in-situ bump formation and the other is for wafers requiring the placement of preformed solder balls for larger bumps. Figure 2.5 shows two separate paths for the backend processing of bumped wafers. One processes wafers with bumps already formed in the bumping front end and the other includes the process steps required for reflowing preformed solder balls [37]. 20

In-Situ Bumped Wafers Placed Preformed Balls Wafer Taping Wafer Grinding Wafer Detaping Wafer laser making Wafer map conversion Wafer probe test Wafer map merge Wafer 3D bump AOI Wafer mount Wafer saw/clean Wafer bump side AOI Wafer Pick&Place/Insp Pack Figure 2.5 Bumping Backend Process Flow [37] 21 Wafer Taping Wafer Grinding Wafer Detaping Wafer laser making Wafer fluxing Wafer ball placement Wafer solder ball reflow Wafer solder ball clean

Table 2.2 Comparison of <strong>Wafer</strong> <strong>Level</strong> <strong>Chip</strong> <strong>Scale</strong> Packaging Technologies[6]<br />

2.2.2 WLCSP Process Flow<br />

In the semiconductor industry, front-end corresponds to the wafer fabrication process<br />

while back-end corresponds to product assembly, packaging and testing operations [36]. There<br />

are two types of back-end process flows, one is <strong>for</strong> wafers with in-situ bump <strong>for</strong>mation and the<br />

other is <strong>for</strong> wafers requiring the placement of pre<strong>for</strong>med solder balls <strong>for</strong> larger bumps. Figure 2.5<br />

shows two separate paths <strong>for</strong> the backend processing of bumped wafers. One processes wafers<br />

with bumps already <strong>for</strong>med in the bumping front end and the other includes the process steps<br />

required <strong>for</strong> reflowing pre<strong>for</strong>med solder balls [37].<br />

20

Hooray! Your file is uploaded and ready to be published.

Saved successfully!

Ooh no, something went wrong!