Lam EEC Experiences - Sematech

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2300 Adaptive Data Collector • Basic PM Data - Gas/Pressure System, ESC, RF System – AI type data are collected at 1, 2, 5, and 10 Hz, configurable by user – DI/DO/AO type data are event driven – Time stamped at data source • OES Sensor Data – Time trace data(IBs and BFs) are part of basic PM data – Finger printing data are collected at 10 Hz and sent to CTC directly • Plug and Play Sensor Data – Sensor controller defines data specifications and notifies PMC – Data rate at 1, 2, 5 and 10Hz – Data are logged as regular PM data(easy for data correlation) – Raw data can be sent directly to EEC applications – 3 sensors completed, VI Probe, Plasma Monitoring Device, and Advanced IEP 10/15/2002 12:58 PM j:\stndpres\template\IntST.ppt - 8
Interface Flexibility • Supported Interface –HSMS – CORBA (used by Lam Remote Monitor application) – ModBus (used by customer for monitoring purposes) – Plug & Play (used by Lam Data Analyzer application) – MS File System (used by Lam Data Analyzer application) – Net Meeting (used by Net Meeting application) • Future Interface Plans – Database access – Interface A and other established standards 10/15/2002 12:58 PM j:\stndpres\template\IntST.ppt - 9
Page 1 and 2: Lam 2300 EEC Experience Tina Ku, C.
Page 3 and 4: 2300 EEC Components Windows 2000/NT
Page 5 and 6: EEC Sensor - Lam P & P TCP Innovati
Page 7: Level of Sensor Integration Integra
Page 11 and 12: EEC INTF - 2nd HSMS Port for APC Co
Page 13 and 14: 2300 ModBus/TCP Operation Model CTC
Page 15 and 16: Lam EEC Applications 10/15/2002 12:
Page 17 and 18: Future EEC Plan • Lam will modify

Lam EEC Experiences - Sematech

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