Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
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2300 Adaptive Data Collector<br />
• Basic PM Data - Gas/Pressure System, ESC, RF System<br />
– AI type data are collected at 1, 2, 5, and 10 Hz, configurable by user<br />
– DI/DO/AO type data are event driven<br />
– Time stamped at data source<br />
• OES Sensor Data<br />
– Time trace data(IBs and BFs) are part of basic PM data<br />
– Finger printing data are collected at 10 Hz and sent to CTC directly<br />
• Plug and Play Sensor Data<br />
– Sensor controller defines data specifications and notifies PMC<br />
– Data rate at 1, 2, 5 and 10Hz<br />
– Data are logged as regular PM data(easy for data correlation)<br />
– Raw data can be sent directly to <strong>EEC</strong> applications<br />
– 3 sensors completed, VI Probe, Plasma Monitoring Device, and<br />
Advanced IEP<br />
10/15/2002 12:58 PM j:\stndpres\template\IntST.ppt - 8
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