Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
Lam EEC Experiences - Sematech
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Level of Sensor Integration<br />
Integration Type Examples<br />
Source Code Integration RF Match/Pressure Sensor/Control Loops,<br />
Internal OES/Interferometer<br />
DLL Dynamic Link WIDS<br />
TCP/IP(Socket) on<br />
SharedMemory<br />
External OES/Interferometer<br />
TCP/IP(Socket) on Ethernet Foreign OES/Interferometer<br />
Sensor Bus Pumps, Temperature Controller, Chiller<br />
* All can be “Plug and Play” if interface is well defined<br />
10/15/2002 12:58 PM j:\stndpres\template\IntST.ppt - 7
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